JPS609007A - 蓄電器用誘電体薄膜の製造方法 - Google Patents
蓄電器用誘電体薄膜の製造方法Info
- Publication number
- JPS609007A JPS609007A JP11775783A JP11775783A JPS609007A JP S609007 A JPS609007 A JP S609007A JP 11775783 A JP11775783 A JP 11775783A JP 11775783 A JP11775783 A JP 11775783A JP S609007 A JPS609007 A JP S609007A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- dielectric
- capacitor
- page
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 title claims description 8
- 239000003989 dielectric material Substances 0.000 title description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000006482 condensation reaction Methods 0.000 claims description 4
- 239000003960 organic solvent Substances 0.000 claims description 2
- 239000003125 aqueous solvent Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 description 22
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- 229920000728 polyester Polymers 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229920001296 polysiloxane Polymers 0.000 description 5
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 5
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 2
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- -1 methylchloroxane Chemical compound 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- QSLPNSWXUQHVLP-UHFFFAOYSA-N $l^{1}-sulfanylmethane Chemical compound [S]C QSLPNSWXUQHVLP-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 1
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- 206010010071 Coma Diseases 0.000 description 1
- 241000087799 Koma Species 0.000 description 1
- 241000406668 Loxodonta cyclotis Species 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 235000019439 ethyl acetate Nutrition 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052760 oxygen Chemical group 0.000 description 1
- 239000001301 oxygen Chemical group 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Organic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11775783A JPS609007A (ja) | 1983-06-28 | 1983-06-28 | 蓄電器用誘電体薄膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11775783A JPS609007A (ja) | 1983-06-28 | 1983-06-28 | 蓄電器用誘電体薄膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS609007A true JPS609007A (ja) | 1985-01-18 |
| JPH0439164B2 JPH0439164B2 (https=) | 1992-06-26 |
Family
ID=14719567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11775783A Granted JPS609007A (ja) | 1983-06-28 | 1983-06-28 | 蓄電器用誘電体薄膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS609007A (https=) |
-
1983
- 1983-06-28 JP JP11775783A patent/JPS609007A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0439164B2 (https=) | 1992-06-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW574422B (en) | Lead zirconate titanate dielectric thin film composites on metallic foils | |
| US2798990A (en) | Electrical capacitors | |
| Zhou et al. | Optimized energy storage performance of SBT-based lead-free relaxor ferroelectric thin film | |
| CN101093751B (zh) | 高比容阴极箔的制备方法 | |
| US5719741A (en) | Zinc-deposited base material for metallized capacitors and method of manufacture thereof | |
| US9208952B2 (en) | Electric double layer capacitor material | |
| JP7345778B2 (ja) | 電子部品の製造方法 | |
| JP4184407B2 (ja) | 回路板用剥離性箔 | |
| JPS609007A (ja) | 蓄電器用誘電体薄膜の製造方法 | |
| JPS589317A (ja) | 電子部品 | |
| JPS60175310A (ja) | 蓄電器用誘電体 | |
| CN213960443U (zh) | 一种提高电子元器件和其他材料耐低温的膜层 | |
| JPS6329403B2 (https=) | ||
| KR900002043B1 (ko) | 콘덴서용 금속화 플라스틱 필름 제조방법 | |
| JPH05139745A (ja) | チタン酸ストロンチウム薄膜の形成方法 | |
| CN108909070A (zh) | 一种耐化学腐蚀的绝缘材料及其制备方法 | |
| JPH03116918A (ja) | コンデンサ | |
| JPH03143629A (ja) | 金属化フィルムおよびそれを用いたコンデンサの製造方法 | |
| CN117831954A (zh) | 一种驻极体膜及其制备方法 | |
| JPH03209808A (ja) | 積層フィルムチップコンデンサ | |
| JP3622773B2 (ja) | セラミック電子部品 | |
| JPS5837988A (ja) | 電気絶縁基板 | |
| FR2217782A1 (en) | Electrical condensers for high temperature use - made of metallised and devolatilised polyimide film | |
| JPH0585733A (ja) | ランタンクロマイト薄膜の形成方法 | |
| JPS6412085B2 (https=) |