JPS6089702A - コンビヘッド取付け位置観察用鏡筒 - Google Patents

コンビヘッド取付け位置観察用鏡筒

Info

Publication number
JPS6089702A
JPS6089702A JP19783683A JP19783683A JPS6089702A JP S6089702 A JPS6089702 A JP S6089702A JP 19783683 A JP19783683 A JP 19783683A JP 19783683 A JP19783683 A JP 19783683A JP S6089702 A JPS6089702 A JP S6089702A
Authority
JP
Japan
Prior art keywords
head
image
combination head
beam splitter
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19783683A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0568641B2 (enrdf_load_stackoverflow
Inventor
Keinosuke Kanejima
敬之介 金島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP19783683A priority Critical patent/JPS6089702A/ja
Publication of JPS6089702A publication Critical patent/JPS6089702A/ja
Publication of JPH0568641B2 publication Critical patent/JPH0568641B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP19783683A 1983-10-21 1983-10-21 コンビヘッド取付け位置観察用鏡筒 Granted JPS6089702A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19783683A JPS6089702A (ja) 1983-10-21 1983-10-21 コンビヘッド取付け位置観察用鏡筒

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19783683A JPS6089702A (ja) 1983-10-21 1983-10-21 コンビヘッド取付け位置観察用鏡筒

Publications (2)

Publication Number Publication Date
JPS6089702A true JPS6089702A (ja) 1985-05-20
JPH0568641B2 JPH0568641B2 (enrdf_load_stackoverflow) 1993-09-29

Family

ID=16381146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19783683A Granted JPS6089702A (ja) 1983-10-21 1983-10-21 コンビヘッド取付け位置観察用鏡筒

Country Status (1)

Country Link
JP (1) JPS6089702A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4475794A (en) * 1982-02-03 1984-10-09 Martin Marietta Corporation Aluminum, aluminum oxide, cromium, gold mirror
US4482209A (en) * 1981-02-27 1984-11-13 Siemens Aktiengesellschaft Mirror structure
JPH01116908U (enrdf_load_stackoverflow) * 1988-02-01 1989-08-07

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655806U (enrdf_load_stackoverflow) * 1979-10-02 1981-05-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655806U (enrdf_load_stackoverflow) * 1979-10-02 1981-05-15

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4482209A (en) * 1981-02-27 1984-11-13 Siemens Aktiengesellschaft Mirror structure
US4475794A (en) * 1982-02-03 1984-10-09 Martin Marietta Corporation Aluminum, aluminum oxide, cromium, gold mirror
JPH01116908U (enrdf_load_stackoverflow) * 1988-02-01 1989-08-07

Also Published As

Publication number Publication date
JPH0568641B2 (enrdf_load_stackoverflow) 1993-09-29

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