JPS6087643U - Surface plate spacing structure of polishing equipment - Google Patents
Surface plate spacing structure of polishing equipmentInfo
- Publication number
- JPS6087643U JPS6087643U JP1983181696U JP18169683U JPS6087643U JP S6087643 U JPS6087643 U JP S6087643U JP 1983181696 U JP1983181696 U JP 1983181696U JP 18169683 U JP18169683 U JP 18169683U JP S6087643 U JPS6087643 U JP S6087643U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- spacing structure
- plate spacing
- polishing equipment
- spacing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はポリシング装置の概略的断面図、第２図は要部
の平面図、第３図は同じく縦断面図、第４図は従来の研
摩布の洗浄状態を示す要部拡大断面図、第５図は本考案
に係る研磨布の洗浄状態の一実施例を示す要部断面図、
第６図は間隔片の拡大平面図、第７図から第９図は間隔
片の他の実施例をそれぞた示す説明図である。
１・・・上定盤、２・・・下定盤、３，４・・・研磨布
、１６・・・カップリング、２０・・・軸、２０ａ・・
・スプライン軸、２９・・・洗浄用ブラシ。
第１図。
第４図FIG. 1 is a schematic sectional view of the polishing device, FIG. 2 is a plan view of the main parts, FIG. 3 is a longitudinal sectional view, and FIG. 4 is an enlarged sectional view of the main parts showing the cleaning state of a conventional polishing cloth. FIG. 5 is a cross-sectional view of essential parts showing an example of the cleaning state of the polishing cloth according to the present invention;
FIG. 6 is an enlarged plan view of the spacing piece, and FIGS. 7 to 9 are explanatory views showing other embodiments of the spacing piece. DESCRIPTION OF SYMBOLS 1... Upper surface plate, 2... Lower surface plate, 3, 4... Polishing cloth, 16... Coupling, 20... Shaft, 20a...
・Spline shaft, 29...Cleaning brush. Figure 1. Figure 4
Claims (2)
た上下一対の定盤間に洗浄用ブラシを介在させて研摩布
を洗浄し得るようにしたポリシング装置において、前記
上定盤のカップリングと、このカップリングに係合され
る上定盤の回転駆動軸との間に間隔調整部材を着脱可能
に介在させたことを特徴とするポリシング装置の定盤間
隔保持構造。(1) In a polishing device in which a cleaning brush is interposed between a pair of upper and lower surface plates each having an abrasive cloth attached to at least one of opposing surfaces so that the abrasive cloth can be washed, the cup of the upper surface plate A surface plate spacing structure for a polishing apparatus, characterized in that a spacing adjustment member is removably interposed between a ring and a rotational drive shaft of an upper surface plate that is engaged with the coupling.
たことを特徴とする実用新案登録請求の範囲第１項に記
載のポリシング装置の定盤間隔保持構造。(2) A surface plate spacing structure for a polishing apparatus according to claim 1, wherein the spacing adjusting member is formed to be adjustable in vertical thickness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983181696U JPH0630367Y2 (en) | 1983-11-25 | 1983-11-25 | Platen spacing holding structure for polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983181696U JPH0630367Y2 (en) | 1983-11-25 | 1983-11-25 | Platen spacing holding structure for polishing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6087643U true JPS6087643U (en) | 1985-06-15 |
| JPH0630367Y2 JPH0630367Y2 (en) | 1994-08-17 |
Family
ID=30393669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983181696U Expired - Lifetime JPH0630367Y2 (en) | 1983-11-25 | 1983-11-25 | Platen spacing holding structure for polishing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0630367Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5542738A (en) * | 1978-09-20 | 1980-03-26 | Toshiba Corp | Abrasive grain processing device |
| JPS5715668A (en) * | 1980-06-27 | 1982-01-27 | Fujikoshi Kikai Kogyo Kk | Lapping process and lapping device |
-
1983
- 1983-11-25 JP JP1983181696U patent/JPH0630367Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5542738A (en) * | 1978-09-20 | 1980-03-26 | Toshiba Corp | Abrasive grain processing device |
| JPS5715668A (en) * | 1980-06-27 | 1982-01-27 | Fujikoshi Kikai Kogyo Kk | Lapping process and lapping device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0630367Y2 (en) | 1994-08-17 |
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