JPS5542738A - Abrasive grain processing device - Google Patents
Abrasive grain processing deviceInfo
- Publication number
- JPS5542738A JPS5542738A JP11458578A JP11458578A JPS5542738A JP S5542738 A JPS5542738 A JP S5542738A JP 11458578 A JP11458578 A JP 11458578A JP 11458578 A JP11458578 A JP 11458578A JP S5542738 A JPS5542738 A JP S5542738A
- Authority
- JP
- Japan
- Prior art keywords
- abrasive grain
- processed object
- grain processing
- head
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To constitute the device that the processed object is moved to the abrasive grain processing part, the cleaning part provided between the abrasive grain processing part and the receiving part which tempolarily supports the processed object, and the receiving part according to the constant sequence to achieve highly precise processing.
CONSTITUTION: The device to polish the processed object W is constituted by the head part 1, the abrasive grain processing part 2, the cleaning part 3, the receiving part 4, and the head driving mechanism 5, etc. Then, the head part 1 is shifted from the processing part 2 to be cleaned at the cleaning part 3 which is provided apart from the processing part 2 so that the head part 1 is cleaned easily and completely. Therefore, the processed object W is accurately mounted on the head part 1, and the abrasive grain processing accuracy can be remarkably improved. As the processed object W is mounted or removed on the head part 1 by pressure reducing or pressurizing, the accuracy can also by improved compared to that with the adhesives.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11458578A JPS5542738A (en) | 1978-09-20 | 1978-09-20 | Abrasive grain processing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11458578A JPS5542738A (en) | 1978-09-20 | 1978-09-20 | Abrasive grain processing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5542738A true JPS5542738A (en) | 1980-03-26 |
Family
ID=14641523
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11458578A Pending JPS5542738A (en) | 1978-09-20 | 1978-09-20 | Abrasive grain processing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5542738A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5748462A (en) * | 1980-09-01 | 1982-03-19 | Nippon Telegr & Teleph Corp <Ntt> | Grinding attachment for modifying automatically form |
JPS57132965A (en) * | 1981-02-03 | 1982-08-17 | Shibayama Kikai Kk | One pass type multi-head plane grinding, polishing, washing automatic machine |
JPS6087643U (en) * | 1983-11-25 | 1985-06-15 | 東芝機械株式会社 | Surface plate spacing structure of polishing equipment |
JPH02308241A (en) * | 1989-05-24 | 1990-12-21 | Fuji Photo Film Co Ltd | Prefogged direct positive silver halide emulsion |
WO1993025347A1 (en) * | 1992-06-15 | 1993-12-23 | Speedfam Corporation | Wafer polishing method and apparatus |
DE4392793T1 (en) * | 1992-06-15 | 1997-07-31 | Speedfam Corp | Method and device for polishing wafers |
-
1978
- 1978-09-20 JP JP11458578A patent/JPS5542738A/en active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5748462A (en) * | 1980-09-01 | 1982-03-19 | Nippon Telegr & Teleph Corp <Ntt> | Grinding attachment for modifying automatically form |
JPS5815265B2 (en) * | 1980-09-01 | 1983-03-24 | 日本電信電話株式会社 | Automatic shape correction polishing equipment |
JPS57132965A (en) * | 1981-02-03 | 1982-08-17 | Shibayama Kikai Kk | One pass type multi-head plane grinding, polishing, washing automatic machine |
JPS6243832B2 (en) * | 1981-02-03 | 1987-09-17 | Shibayama Kikai Kk | |
JPS6087643U (en) * | 1983-11-25 | 1985-06-15 | 東芝機械株式会社 | Surface plate spacing structure of polishing equipment |
JPH02308241A (en) * | 1989-05-24 | 1990-12-21 | Fuji Photo Film Co Ltd | Prefogged direct positive silver halide emulsion |
WO1993025347A1 (en) * | 1992-06-15 | 1993-12-23 | Speedfam Corporation | Wafer polishing method and apparatus |
US5329732A (en) * | 1992-06-15 | 1994-07-19 | Speedfam Corporation | Wafer polishing method and apparatus |
US5498196A (en) * | 1992-06-15 | 1996-03-12 | Speedfam Corporation | Wafer polishing method and apparatus |
DE4392793T1 (en) * | 1992-06-15 | 1997-07-31 | Speedfam Corp | Method and device for polishing wafers |
USRE37622E1 (en) | 1992-06-15 | 2002-04-02 | Speedfam-Ipec Corporation | Wafer polishing method and apparatus |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5542738A (en) | Abrasive grain processing device | |
JPS5236399A (en) | Apparatus for removing dust from capsule and polishing same | |
JPS52114191A (en) | Method and device for polishing inner surface in tube | |
JPS5756263A (en) | Dust remover for plate drum of printing machine | |
JPS545292A (en) | Grinding device | |
JPS5222189A (en) | Polishing method for watch cases | |
JPS51140294A (en) | Apparatus for compenstating for wearing down in grinding machine | |
JPS5371395A (en) | Grinder | |
JPS5289872A (en) | Apparatus for holding tools | |
JPS5378495A (en) | Cleaning apparatus for grinding wheel | |
JPS523798A (en) | Multiple continuous stone material grinding apparatus | |
JPS52147071A (en) | Basket for etching | |
JPS53124393A (en) | Burr removing device | |
JPS5428082A (en) | Processing device | |
JPS52155870A (en) | Apparatus for removing dusts of filter of cleaner | |
JPS53134294A (en) | Grinding stone for semiconductor wafer bevel | |
JPS5351962A (en) | Dicing unit providing automatic handling mechanism | |
JPS52140091A (en) | Grinding apparatus | |
JPS5264087A (en) | Polishing tool | |
JPS52124295A (en) | Method of grinding with jet liquid supply | |
JPS5236398A (en) | Continuous grinding apparatus for wire materials, etc. | |
JPS52114195A (en) | Grinding machine for outer surface of tube | |
JPS5385591A (en) | Device for collecting and reprodusing grit | |
JPS5214996A (en) | Method for halting polishing work | |
JPS5433480A (en) | Method and apparatus conveying eccentric shaft member |