JPS608481A - クライオポンプ - Google Patents
クライオポンプInfo
- Publication number
- JPS608481A JPS608481A JP11428183A JP11428183A JPS608481A JP S608481 A JPS608481 A JP S608481A JP 11428183 A JP11428183 A JP 11428183A JP 11428183 A JP11428183 A JP 11428183A JP S608481 A JPS608481 A JP S608481A
- Authority
- JP
- Japan
- Prior art keywords
- outer surfaces
- pump
- refrigerator
- members
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011347 resin Substances 0.000 claims abstract description 7
- 229920005989 resin Polymers 0.000 claims abstract description 7
- 239000010409 thin film Substances 0.000 claims abstract description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052802 copper Inorganic materials 0.000 abstract description 7
- 239000010949 copper Substances 0.000 abstract description 7
- 230000007797 corrosion Effects 0.000 abstract description 5
- 238000005260 corrosion Methods 0.000 abstract description 5
- 239000010408 film Substances 0.000 abstract description 3
- 238000012423 maintenance Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract description 2
- 229920002313 fluoropolymer Polymers 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 150000002222 fluorine compounds Chemical class 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 8
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 102100031102 C-C motif chemokine 4 Human genes 0.000 description 1
- 101100054773 Caenorhabditis elegans act-2 gene Proteins 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 241001311547 Patina Species 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11428183A JPS608481A (ja) | 1983-06-27 | 1983-06-27 | クライオポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11428183A JPS608481A (ja) | 1983-06-27 | 1983-06-27 | クライオポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS608481A true JPS608481A (ja) | 1985-01-17 |
| JPH0364716B2 JPH0364716B2 (enrdf_load_stackoverflow) | 1991-10-08 |
Family
ID=14633901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11428183A Granted JPS608481A (ja) | 1983-06-27 | 1983-06-27 | クライオポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS608481A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8572988B2 (en) | 2010-02-19 | 2013-11-05 | Sumitomo Heavy Industries, Ltd. | Cold trap and vacuum evacuation apparatus |
| US9032741B2 (en) | 2009-11-09 | 2015-05-19 | Sumitomo Heavy Industries, Ltd. | Cryopump and vacuum pumping method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884902A (enrdf_load_stackoverflow) * | 1972-02-15 | 1973-11-10 |
-
1983
- 1983-06-27 JP JP11428183A patent/JPS608481A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884902A (enrdf_load_stackoverflow) * | 1972-02-15 | 1973-11-10 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9032741B2 (en) | 2009-11-09 | 2015-05-19 | Sumitomo Heavy Industries, Ltd. | Cryopump and vacuum pumping method |
| US8572988B2 (en) | 2010-02-19 | 2013-11-05 | Sumitomo Heavy Industries, Ltd. | Cold trap and vacuum evacuation apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0364716B2 (enrdf_load_stackoverflow) | 1991-10-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EA200600475A1 (ru) | Композитная труба | |
| KR900005610Y1 (ko) | 차압 2중 진공 씨스템 | |
| KR20070044508A (ko) | 플라즈마 처리 용기내 복합막 피복 부재 및 그 제조 방법 | |
| JPH0625597B2 (ja) | ピストンリング | |
| JPS608481A (ja) | クライオポンプ | |
| JPH102452A (ja) | 高真空バルブ | |
| WO2015147162A1 (ja) | アルミニウム部材の表面被覆方法及び表面被覆アルミニウム部材並びに内燃機関用ピストン | |
| US4644847A (en) | Reduction of failure incidence of metallic diaphragms for compressors | |
| KR100605402B1 (ko) | 금속적층형 개스킷 | |
| US5522371A (en) | Thermal insulation engine | |
| JPS61197794A (ja) | 容積形オイルフリ−式ガス圧送ポンプ | |
| KR102727364B1 (ko) | 적층체 및 그 제조 방법 | |
| CN216742383U (zh) | 一种硬度高且耐锈蚀性能强的不锈钢锁紧螺母 | |
| CN110678676A (zh) | 金属垫圈 | |
| US2860018A (en) | Piston assembly | |
| CN201513639U (zh) | 改良型不锈钢管 | |
| US2063904A (en) | Aluminum-coated piston | |
| US5799493A (en) | Corrosion resistant cryopump | |
| CN212718688U (zh) | 一种耐磨钢衬四氟管道 | |
| JP2685389B2 (ja) | 回転式圧縮機 | |
| US4785638A (en) | Refrigerant fluid trap for vacuum evaporators for the deposit of thin metal films | |
| RU2054136C1 (ru) | Способ изготовления уплотняющих металлических элементов | |
| JPH05248578A (ja) | 真空シール用ガスケット | |
| JPH01188764A (ja) | 高真空用ガスケツト | |
| CN118497694A (zh) | 一种提升铝材耐腐蚀的方法 |