JPH0364716B2 - - Google Patents

Info

Publication number
JPH0364716B2
JPH0364716B2 JP58114281A JP11428183A JPH0364716B2 JP H0364716 B2 JPH0364716 B2 JP H0364716B2 JP 58114281 A JP58114281 A JP 58114281A JP 11428183 A JP11428183 A JP 11428183A JP H0364716 B2 JPH0364716 B2 JP H0364716B2
Authority
JP
Japan
Prior art keywords
cylinder
refrigerator
pump
case
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58114281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS608481A (ja
Inventor
Hidetoshi Morimoto
Katsumi Morizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Cryogenics Inc
Original Assignee
Ulvac Cryogenics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Cryogenics Inc filed Critical Ulvac Cryogenics Inc
Priority to JP11428183A priority Critical patent/JPS608481A/ja
Publication of JPS608481A publication Critical patent/JPS608481A/ja
Publication of JPH0364716B2 publication Critical patent/JPH0364716B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP11428183A 1983-06-27 1983-06-27 クライオポンプ Granted JPS608481A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11428183A JPS608481A (ja) 1983-06-27 1983-06-27 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11428183A JPS608481A (ja) 1983-06-27 1983-06-27 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS608481A JPS608481A (ja) 1985-01-17
JPH0364716B2 true JPH0364716B2 (enrdf_load_stackoverflow) 1991-10-08

Family

ID=14633901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11428183A Granted JPS608481A (ja) 1983-06-27 1983-06-27 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS608481A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102686880B (zh) 2009-11-09 2015-05-13 住友重机械工业株式会社 低温泵及真空排气方法
JP5553638B2 (ja) 2010-02-19 2014-07-16 住友重機械工業株式会社 コールドトラップ、及び真空排気装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4884902A (enrdf_load_stackoverflow) * 1972-02-15 1973-11-10

Also Published As

Publication number Publication date
JPS608481A (ja) 1985-01-17

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