JPS6084713A - 電気絶縁材の製造法 - Google Patents

電気絶縁材の製造法

Info

Publication number
JPS6084713A
JPS6084713A JP59077401A JP7740184A JPS6084713A JP S6084713 A JPS6084713 A JP S6084713A JP 59077401 A JP59077401 A JP 59077401A JP 7740184 A JP7740184 A JP 7740184A JP S6084713 A JPS6084713 A JP S6084713A
Authority
JP
Japan
Prior art keywords
substrate
silicon carbide
sintered body
insulating material
boron nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59077401A
Other languages
English (en)
Japanese (ja)
Other versions
JPS644285B2 (enExample
Inventor
松下　安男
竹田　幸男
浩介 中村
大越　時夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59077401A priority Critical patent/JPS6084713A/ja
Publication of JPS6084713A publication Critical patent/JPS6084713A/ja
Publication of JPS644285B2 publication Critical patent/JPS644285B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/884—
    • H10W90/734—
    • H10W90/754—

Landscapes

  • Inorganic Insulating Materials (AREA)
JP59077401A 1984-04-16 1984-04-16 電気絶縁材の製造法 Granted JPS6084713A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59077401A JPS6084713A (ja) 1984-04-16 1984-04-16 電気絶縁材の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59077401A JPS6084713A (ja) 1984-04-16 1984-04-16 電気絶縁材の製造法

Publications (2)

Publication Number Publication Date
JPS6084713A true JPS6084713A (ja) 1985-05-14
JPS644285B2 JPS644285B2 (enExample) 1989-01-25

Family

ID=13632875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59077401A Granted JPS6084713A (ja) 1984-04-16 1984-04-16 電気絶縁材の製造法

Country Status (1)

Country Link
JP (1) JPS6084713A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2538276B (en) 2015-05-13 2017-05-10 Univ Southampton Cleaning apparatus and method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3954483A (en) * 1974-01-08 1976-05-04 General Electric Company Dense polycrystalline silicon carbide

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3954483A (en) * 1974-01-08 1976-05-04 General Electric Company Dense polycrystalline silicon carbide

Also Published As

Publication number Publication date
JPS644285B2 (enExample) 1989-01-25

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