JPS6079653A - 電子顕微鏡等の対物レンズ - Google Patents

電子顕微鏡等の対物レンズ

Info

Publication number
JPS6079653A
JPS6079653A JP58187392A JP18739283A JPS6079653A JP S6079653 A JPS6079653 A JP S6079653A JP 58187392 A JP58187392 A JP 58187392A JP 18739283 A JP18739283 A JP 18739283A JP S6079653 A JPS6079653 A JP S6079653A
Authority
JP
Japan
Prior art keywords
magnetic
excitation
magnetic pole
lens
excitation coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58187392A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02816B2 (enrdf_load_stackoverflow
Inventor
Katsushige Tsuno
勝重 津野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58187392A priority Critical patent/JPS6079653A/ja
Priority to US06/584,712 priority patent/US4585942A/en
Publication of JPS6079653A publication Critical patent/JPS6079653A/ja
Publication of JPH02816B2 publication Critical patent/JPH02816B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
JP58187392A 1983-03-17 1983-10-06 電子顕微鏡等の対物レンズ Granted JPS6079653A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58187392A JPS6079653A (ja) 1983-10-06 1983-10-06 電子顕微鏡等の対物レンズ
US06/584,712 US4585942A (en) 1983-03-17 1984-02-29 Transmission electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58187392A JPS6079653A (ja) 1983-10-06 1983-10-06 電子顕微鏡等の対物レンズ

Publications (2)

Publication Number Publication Date
JPS6079653A true JPS6079653A (ja) 1985-05-07
JPH02816B2 JPH02816B2 (enrdf_load_stackoverflow) 1990-01-09

Family

ID=16205219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58187392A Granted JPS6079653A (ja) 1983-03-17 1983-10-06 電子顕微鏡等の対物レンズ

Country Status (1)

Country Link
JP (1) JPS6079653A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2644930A1 (fr) * 1989-03-21 1990-09-28 Cameca Lentille electromagnetique composite a focale variable
JP2000348658A (ja) * 1999-04-15 2000-12-15 Applied Materials Inc 荷電粒子ビーム装置用カラム
WO2018189850A1 (ja) * 2017-04-13 2018-10-18 株式会社 日立ハイテクノロジーズ 電子顕微鏡

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2644930A1 (fr) * 1989-03-21 1990-09-28 Cameca Lentille electromagnetique composite a focale variable
JP2000348658A (ja) * 1999-04-15 2000-12-15 Applied Materials Inc 荷電粒子ビーム装置用カラム
WO2018189850A1 (ja) * 2017-04-13 2018-10-18 株式会社 日立ハイテクノロジーズ 電子顕微鏡

Also Published As

Publication number Publication date
JPH02816B2 (enrdf_load_stackoverflow) 1990-01-09

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