JPH02816B2 - - Google Patents
Info
- Publication number
- JPH02816B2 JPH02816B2 JP58187392A JP18739283A JPH02816B2 JP H02816 B2 JPH02816 B2 JP H02816B2 JP 58187392 A JP58187392 A JP 58187392A JP 18739283 A JP18739283 A JP 18739283A JP H02816 B2 JPH02816 B2 JP H02816B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- excitation
- excitation coil
- pole piece
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005284 excitation Effects 0.000 claims description 96
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 description 15
- 230000004075 alteration Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 4
- 201000009310 astigmatism Diseases 0.000 description 3
- 238000002003 electron diffraction Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000012916 structural analysis Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58187392A JPS6079653A (ja) | 1983-10-06 | 1983-10-06 | 電子顕微鏡等の対物レンズ |
| US06/584,712 US4585942A (en) | 1983-03-17 | 1984-02-29 | Transmission electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58187392A JPS6079653A (ja) | 1983-10-06 | 1983-10-06 | 電子顕微鏡等の対物レンズ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6079653A JPS6079653A (ja) | 1985-05-07 |
| JPH02816B2 true JPH02816B2 (enrdf_load_stackoverflow) | 1990-01-09 |
Family
ID=16205219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58187392A Granted JPS6079653A (ja) | 1983-03-17 | 1983-10-06 | 電子顕微鏡等の対物レンズ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6079653A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2644930B1 (fr) * | 1989-03-21 | 1996-04-26 | Cameca | Lentille electromagnetique composite a focale variable |
| US6452175B1 (en) * | 1999-04-15 | 2002-09-17 | Applied Materials, Inc. | Column for charged particle beam device |
| WO2018189850A1 (ja) * | 2017-04-13 | 2018-10-18 | 株式会社 日立ハイテクノロジーズ | 電子顕微鏡 |
-
1983
- 1983-10-06 JP JP58187392A patent/JPS6079653A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6079653A (ja) | 1985-05-07 |
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