JPS6078136U - 半導体製造装置 - Google Patents
半導体製造装置Info
- Publication number
- JPS6078136U JPS6078136U JP16972683U JP16972683U JPS6078136U JP S6078136 U JPS6078136 U JP S6078136U JP 16972683 U JP16972683 U JP 16972683U JP 16972683 U JP16972683 U JP 16972683U JP S6078136 U JPS6078136 U JP S6078136U
- Authority
- JP
- Japan
- Prior art keywords
- adhesive tape
- tape
- semiconductor wafer
- lower guide
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 239000002390 adhesive tape Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000005507 spraying Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16972683U JPS6078136U (ja) | 1983-10-31 | 1983-10-31 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16972683U JPS6078136U (ja) | 1983-10-31 | 1983-10-31 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6078136U true JPS6078136U (ja) | 1985-05-31 |
| JPH0143869Y2 JPH0143869Y2 (enrdf_load_stackoverflow) | 1989-12-19 |
Family
ID=30370724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16972683U Granted JPS6078136U (ja) | 1983-10-31 | 1983-10-31 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6078136U (enrdf_load_stackoverflow) |
-
1983
- 1983-10-31 JP JP16972683U patent/JPS6078136U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0143869Y2 (enrdf_load_stackoverflow) | 1989-12-19 |
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