JPS6077795U - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPS6077795U
JPS6077795U JP1983169910U JP16991083U JPS6077795U JP S6077795 U JPS6077795 U JP S6077795U JP 1983169910 U JP1983169910 U JP 1983169910U JP 16991083 U JP16991083 U JP 16991083U JP S6077795 U JPS6077795 U JP S6077795U
Authority
JP
Japan
Prior art keywords
turbo molecular
spacer
molecular pump
rotor
outer cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983169910U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0229269Y2 (OSRAM
Inventor
岡村　治郎
潔 成田
川口　重一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1983169910U priority Critical patent/JPS6077795U/ja
Publication of JPS6077795U publication Critical patent/JPS6077795U/ja
Application granted granted Critical
Publication of JPH0229269Y2 publication Critical patent/JPH0229269Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP1983169910U 1983-10-31 1983-10-31 タ−ボ分子ポンプ Granted JPS6077795U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983169910U JPS6077795U (ja) 1983-10-31 1983-10-31 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983169910U JPS6077795U (ja) 1983-10-31 1983-10-31 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6077795U true JPS6077795U (ja) 1985-05-30
JPH0229269Y2 JPH0229269Y2 (OSRAM) 1990-08-06

Family

ID=30371068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983169910U Granted JPS6077795U (ja) 1983-10-31 1983-10-31 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS6077795U (OSRAM)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6424200A (en) * 1987-07-04 1989-01-26 Pfeiffer Vakuumtechnik Pump
JP2000064986A (ja) * 1998-08-12 2000-03-03 Seiko Seiki Co Ltd ターボ分子ポンプ
WO2016121573A1 (ja) * 2015-01-30 2016-08-04 エドワーズ株式会社 真空ポンプ
JP2020023949A (ja) * 2018-08-08 2020-02-13 エドワーズ株式会社 真空ポンプ、及びこの真空ポンプに用いられる円筒部、並びにベース部
JP2022185262A (ja) * 2021-06-02 2022-12-14 株式会社島津製作所 真空ポンプおよびリークディテクタ
US11574653B2 (en) 2021-06-14 2023-02-07 Kabushiki Kaisha Toshiba Disk device and method of manufacturing disk device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6424200A (en) * 1987-07-04 1989-01-26 Pfeiffer Vakuumtechnik Pump
JP2000064986A (ja) * 1998-08-12 2000-03-03 Seiko Seiki Co Ltd ターボ分子ポンプ
WO2016121573A1 (ja) * 2015-01-30 2016-08-04 エドワーズ株式会社 真空ポンプ
JP2016142156A (ja) * 2015-01-30 2016-08-08 エドワーズ株式会社 真空ポンプ
CN107208649A (zh) * 2015-01-30 2017-09-26 埃地沃兹日本有限公司 真空泵
JP2020023949A (ja) * 2018-08-08 2020-02-13 エドワーズ株式会社 真空ポンプ、及びこの真空ポンプに用いられる円筒部、並びにベース部
WO2020031927A1 (ja) * 2018-08-08 2020-02-13 エドワーズ株式会社 真空ポンプ、及びこの真空ポンプに用いられる円筒部、並びにベース部
CN112469902A (zh) * 2018-08-08 2021-03-09 埃地沃兹日本有限公司 真空泵、以及在该真空泵中使用的圆筒部及底座部
JP2022185262A (ja) * 2021-06-02 2022-12-14 株式会社島津製作所 真空ポンプおよびリークディテクタ
US11574653B2 (en) 2021-06-14 2023-02-07 Kabushiki Kaisha Toshiba Disk device and method of manufacturing disk device

Also Published As

Publication number Publication date
JPH0229269Y2 (OSRAM) 1990-08-06

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