JPS6077148A - Method for working glass substrate - Google Patents

Abstract

PURPOSE:To make it possible to carry out chemical etching of only the end of a glass substrate with ease, by applying an ethylene-vinyl acetate based hot-melt resin having the acid resistance to at least one principal surface of the glass substrate. CONSTITUTION:A soda lime based glass substrate 1 which is worked into a given shape and has just a roughly ground end 2 is heated in an oven at about 90 deg.C, taken out thereof, and a resin 3 consisting essentially of rosin and beeswax as an ethylene-vinyl acetate based hot-melt type resin is rubbed against both principal surfaces under high temperature conditions, melted and applied thereto. The resultant substrate 1 is then dipped in a chemical etching solution prepared by mixing about 3% hydrofluoric acid with about 56% sulfuric acid for about 2min to give the end 2 of the glass substrate 1 a smooth end 4. The resultant substrate 1 is washed, dried and dipped in an organic solvent, e.g. trichloroethylene, for about 5min to peel the resin 3 therefrom.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a method for applying carbon to soda lime glass, borosilicate glass, molten stone, etc. used in photomasks of semiconductor integrated circuits, amorphous silicon solar cells, electroluminescent devices, etc. Related to processing methods for glass substrates for electronic devices.

If the glass chip is chipped from the edge of the glass substrate, the main surface of the glass substrate (normally, the main surface requires strict flatness accuracy).

) or scratches on the fully refracted thin film formed on its main surface.In order to prevent this from occurring, a processing method is known in which each end face is polished to give it a mirror finish. ing.

However, this method of processing glass substrates is
As each end face undergoes several stages of polishing from rough polishing to fine polishing, productivity is unavoidably reduced.Furthermore, since the end faces are finished to a mirror finish, handling efficiency is reduced. was decreasing.

On the other hand, there is a known processing method in which the entire surface of a glass substrate is chemically etched, but since the free-standing surface is also chemically etched, the flatness of the free-standing surface is seriously deteriorated. After etching, the surface to be coated must be rubbed by at least 100 mm.

The present invention has been made in order to eliminate the above-mentioned drawbacks, and it is an object of the present invention to provide a method for processing a glass substrate in which only the end face can be easily chemically etched.

The main components of the present invention include a step of applying an ethylene-vinyl acetate-based hot-melt resin having acid resistance on at least the -1 surface of a glass substrate, a step of chemically etching the end surface of the glass substrate, and a step of chemically etching the end surface of the glass substrate. The process consists of two steps: immersing a 1-Mel type resin in a released solvent and peeling it off.

Hereinafter, the present invention will be described in detail with reference to the drawings.

FIG. 1 is a perspective view showing the steps of an embodiment of the present invention. In this example, in the same figure (a), a saw lime-based glass substrate 1 (size: 127 mm square, thickness 2.
3Tnm) is processed into a predetermined shape, and its four end surfaces 2 are phase ? Even the polish has been applied. Next, in (1) of the same figure, the glass substrate 1 is placed in an oven at about 90°C and heated to a high temperature, and ethylene vinyl acetate is placed on both sides of the glass substrate 1 in the high temperature state taken out from the Δ-bun. A small sotomel 1-type resin of the system is melted and applied by pouring resin 3 whose main components are rosin and beeswax. At that time, in order to prevent the molten resin 3 from exceeding the edge and reaching the end surface, 3 to 10 Ill II
It is preferable to rub the resin 3 by + degree d) toward the center. In addition, when the resin 3 reaches the end surface, &J
, and the like, to remove the resin in that area.

Next, in the same figure (C), 3? The glass substrate 1 is immersed for 2 minutes in a chemical etching solution containing a mixture of p(1)% hydrofluoric acid and 56% by weight sulfuric acid, so that the end face of the glass substrate IJi2'1 is formed into a smooth end face 4. Next, after cleaning and drying the glass substrate 1, it is immersed in an organic solvent such as a tyrene solution for 5 minutes to remove the resin 33 on the bibulous surface as shown in FIG. Thorn part 1 ruru.

The fine 411 machining for the lifetime surface mj of the glass substrate 1 is as follows:
Before the process according to the invention, t)iU '-C' is also present; in any case, is its -main surface ?? 4. Before the film is formed using (),

When a metal thin film such as chromium is formed by sputtering or the like on the −1 surface of the glass substrate 1 that has undergone the process of the present invention, the pinholes in the chromium thin film at −1 are removed by conventional methods (chemical tweezing on the end surface). (Conventional product that does not apply) There were about 10 culms in 1 cm2, but the number was reduced by 1/100 culms. Further, according to the present invention, since the main surface of the glass substrate is not chemically etched, even if the main surface is finely polished and then the steps of the present invention are performed, the main surface is not chemically etched. Surface plane II'
It will not make the first degree worse. Furthermore, the edge surface of the glass plate according to the present invention can be described as a very smooth surface microscopically, but not a mirror surface macroscopically, which improves workability during handling. C can be automatically transported during manufacturing processes such as film formation and resist coating.

FIG. 2 is a view from r1 showing the step 8'r in another embodiment of the present invention. In this example, the glass substrate 1 is immersed in a container in which resin 3 is melted at J3 in FIG. Next, in (1) of the same figure, the 4-piece resin 3 coated on the end surface 2 portion of the glass substrate 1 is peeled off by lapping, and chamfer lapping is performed if necessary. Next, in the same figure (C), as in the previous embodiment, the end surface 3 is chemically rounded to J, and the end surface 4 is made into a flat d'I shape. Then, as shown in FIG. 3(d), both main surfaces of the glass substrate 1 are immersed in an organic solvent and removed as in the previous embodiment.

In this example as well, the same effect as in the previous example is achieved.
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[Brief explanation of drawings]

FIGS. 1 and 2 are perspective views showing steps of an embodiment of the present invention, respectively.

Claims (2)

[Claims] (1) A step of applying an acid-resistant ethylene-vinyl acetate hot-melt resin on at least the surface of the glass substrate, a step of chemically etching the end surface of the glass substrate, and a step of applying an organic hot-melt resin to the glass substrate. A method for processing a glass substrate, comprising a step of immersing it in a solvent and peeling it off. (2) The step of applying a cordylene vinyl acetate-based hot melt resin that has acid resistance on the entire surface of the glass substrate, and the step of peeling off the hot melt resin applied to the end surface of the glass substrate; A method for processing a glass substrate, comprising the steps of chemically etching the end face and peeling off the hot-melt resin by immersing it in an organic solvent.