JPS6073216U - 磁性膜作製装置 - Google Patents

磁性膜作製装置

Info

Publication number
JPS6073216U
JPS6073216U JP16502183U JP16502183U JPS6073216U JP S6073216 U JPS6073216 U JP S6073216U JP 16502183 U JP16502183 U JP 16502183U JP 16502183 U JP16502183 U JP 16502183U JP S6073216 U JPS6073216 U JP S6073216U
Authority
JP
Japan
Prior art keywords
magnetic film
base material
evaporation source
slit
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16502183U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322900Y2 (enrdf_load_stackoverflow
Inventor
龍野　哲男
有川　節
弘 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Priority to JP16502183U priority Critical patent/JPS6073216U/ja
Publication of JPS6073216U publication Critical patent/JPS6073216U/ja
Application granted granted Critical
Publication of JPH0322900Y2 publication Critical patent/JPH0322900Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP16502183U 1983-10-25 1983-10-25 磁性膜作製装置 Granted JPS6073216U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16502183U JPS6073216U (ja) 1983-10-25 1983-10-25 磁性膜作製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16502183U JPS6073216U (ja) 1983-10-25 1983-10-25 磁性膜作製装置

Publications (2)

Publication Number Publication Date
JPS6073216U true JPS6073216U (ja) 1985-05-23
JPH0322900Y2 JPH0322900Y2 (enrdf_load_stackoverflow) 1991-05-20

Family

ID=30361633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16502183U Granted JPS6073216U (ja) 1983-10-25 1983-10-25 磁性膜作製装置

Country Status (1)

Country Link
JP (1) JPS6073216U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54116202A (en) * 1978-03-01 1979-09-10 Tdk Corp Production of magnetic recording media
JPS5812317U (ja) * 1981-07-14 1983-01-26 村田　信夫 自動開洋傘の安全装置
JPS58124467U (ja) * 1982-02-17 1983-08-24 日本真空技術株式会社 真空蒸着装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54116202A (en) * 1978-03-01 1979-09-10 Tdk Corp Production of magnetic recording media
JPS5812317U (ja) * 1981-07-14 1983-01-26 村田　信夫 自動開洋傘の安全装置
JPS58124467U (ja) * 1982-02-17 1983-08-24 日本真空技術株式会社 真空蒸着装置

Also Published As

Publication number Publication date
JPH0322900Y2 (enrdf_load_stackoverflow) 1991-05-20

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