JPS6073216U - Magnetic film production equipment - Google Patents

Magnetic film production equipment

Info

Publication number
JPS6073216U
JPS6073216U JP16502183U JP16502183U JPS6073216U JP S6073216 U JPS6073216 U JP S6073216U JP 16502183 U JP16502183 U JP 16502183U JP 16502183 U JP16502183 U JP 16502183U JP S6073216 U JPS6073216 U JP S6073216U
Authority
JP
Japan
Prior art keywords
magnetic film
base material
evaporation source
slit
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16502183U
Other languages
Japanese (ja)
Other versions
JPH0322900Y2 (en
Inventor
龍野　哲男
有川　節
弘 高橋
Original Assignee
太陽誘電株式会社
株式会社エイコーエンジニアリング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 太陽誘電株式会社, 株式会社エイコーエンジニアリング filed Critical 太陽誘電株式会社
Priority to JP16502183U priority Critical patent/JPS6073216U/en
Publication of JPS6073216U publication Critical patent/JPS6073216U/en
Application granted granted Critical
Publication of JPH0322900Y2 publication Critical patent/JPH0322900Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、この考案の実施例を示す磁性膜製作装置の説
明図、第２図は、第１図のＡ−Ａ線切断面図である。 １・・・被蒸着面を含む空間を形成する真空槽、３・・
・蒸発源を含む空間を形成する蒸発室、６・・・電子銃
、９・・・基材、１０・・・蒸発源、１１・・・スリッ
ト、１４．１５・・・給排気系、ａ・・・被蒸着面、Ｅ
Ｂ・・・電子線。FIG. 1 is an explanatory diagram of a magnetic film manufacturing apparatus showing an embodiment of this invention, and FIG. 2 is a cross-sectional view taken along the line A--A in FIG. 1... Vacuum chamber forming a space including the surface to be deposited, 3...
- Evaporation chamber forming a space containing an evaporation source, 6... Electron gun, 9... Base material, 10... Evaporation source, 11... Slit, 14.15... Supply/exhaust system, a ...Deposition surface, E
B...Electron beam.

Claims (1)

【実用新案登録請求の範囲】 １　酸素ガス雰囲気中で基材の上に磁性材料を真空蒸着
して磁性膜を作製するようにした装置において、基材の
被蒸着面を含む空間と蒸発源を含む空間を仕切り、蒸着
に必要かつ最小限の広さを持つスリットをこれら雨空間
の間に開設して、蒸発源を被蒸着面に臨ませ、蒸発源を
含む空間側には、上記蒸発源に電子線を照射する電子銃
を配置し、上記各空間をそれぞれ独立した給排気系によ
り圧力制御するようにしたことを特徴とする磁性膜作製
装置。 ２　長い基材の幅方向に沿って細長いスリットを開設し
、電磁偏向等の手段によって、蒸発源に対し同スリット
の長手方向に電子線を掃引照射して磁性材料を蒸発する
ようにした実用新案登録請求の範囲第１項記載の磁性膜
作製装置。[Claims for Utility Model Registration] 1. In an apparatus for producing a magnetic film by vacuum evaporating a magnetic material onto a base material in an oxygen gas atmosphere, the space including the surface of the base material to be deposited and the evaporation source are separated. A slit with the minimum width necessary for evaporation is opened between these rain spaces, and the evaporation source faces the surface to be evaporated. 1. An apparatus for producing a magnetic film, characterized in that an electron gun for irradiating an electron beam is arranged in the space, and the pressure of each space is controlled by an independent air supply/exhaust system. 2. A utility model in which an elongated slit is opened along the width direction of a long base material, and the magnetic material is evaporated by sweeping an electron beam toward the evaporation source in the longitudinal direction of the slit using means such as electromagnetic deflection. A magnetic film manufacturing apparatus according to claim 1.
JP16502183U 1983-10-25 1983-10-25 Magnetic film production equipment Granted JPS6073216U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16502183U JPS6073216U (en) 1983-10-25 1983-10-25 Magnetic film production equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16502183U JPS6073216U (en) 1983-10-25 1983-10-25 Magnetic film production equipment

Publications (2)

Publication Number Publication Date
JPS6073216U true JPS6073216U (en) 1985-05-23
JPH0322900Y2 JPH0322900Y2 (en) 1991-05-20

Family

ID=30361633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16502183U Granted JPS6073216U (en) 1983-10-25 1983-10-25 Magnetic film production equipment

Country Status (1)

Country Link
JP (1) JPS6073216U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54116202A (en) * 1978-03-01 1979-09-10 Tdk Corp Production of magnetic recording media
JPS5812317U (en) * 1981-07-14 1983-01-26 村田　信夫 Automatic opening umbrella safety device
JPS58124467U (en) * 1982-02-17 1983-08-24 日本真空技術株式会社 Vacuum deposition equipment

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812317B2 (en) * 1979-07-31 1983-03-07 工業技術院長 How to stop a solid waste pyrolysis furnace

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54116202A (en) * 1978-03-01 1979-09-10 Tdk Corp Production of magnetic recording media
JPS5812317U (en) * 1981-07-14 1983-01-26 村田　信夫 Automatic opening umbrella safety device
JPS58124467U (en) * 1982-02-17 1983-08-24 日本真空技術株式会社 Vacuum deposition equipment

Also Published As

Publication number Publication date
JPH0322900Y2 (en) 1991-05-20

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