JPS6068610A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6068610A
JPS6068610A JP58176239A JP17623983A JPS6068610A JP S6068610 A JPS6068610 A JP S6068610A JP 58176239 A JP58176239 A JP 58176239A JP 17623983 A JP17623983 A JP 17623983A JP S6068610 A JPS6068610 A JP S6068610A
Authority
JP
Japan
Prior art keywords
tube
opaque
welded
ampoule
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58176239A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6352450B2 (enExample
Inventor
Shigeji Ito
伊東　茂次
Katsuya Masuda
克也 増田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP58176239A priority Critical patent/JPS6068610A/ja
Publication of JPS6068610A publication Critical patent/JPS6068610A/ja
Publication of JPS6352450B2 publication Critical patent/JPS6352450B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/0436—

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Formation Of Insulating Films (AREA)
JP58176239A 1983-09-26 1983-09-26 半導体装置の製造方法 Granted JPS6068610A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58176239A JPS6068610A (ja) 1983-09-26 1983-09-26 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58176239A JPS6068610A (ja) 1983-09-26 1983-09-26 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6068610A true JPS6068610A (ja) 1985-04-19
JPS6352450B2 JPS6352450B2 (enExample) 1988-10-19

Family

ID=16010069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58176239A Granted JPS6068610A (ja) 1983-09-26 1983-09-26 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6068610A (enExample)

Also Published As

Publication number Publication date
JPS6352450B2 (enExample) 1988-10-19

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