JPS6067652U - 走査電子顕微鏡用加熱装置 - Google Patents

走査電子顕微鏡用加熱装置

Info

Publication number
JPS6067652U
JPS6067652U JP13386184U JP13386184U JPS6067652U JP S6067652 U JPS6067652 U JP S6067652U JP 13386184 U JP13386184 U JP 13386184U JP 13386184 U JP13386184 U JP 13386184U JP S6067652 U JPS6067652 U JP S6067652U
Authority
JP
Japan
Prior art keywords
electron microscope
scanning electron
hole
electric furnace
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13386184U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6322610Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
和夫 桑原
新田　明人
正義 田中
貞幸 袴田
Original Assignee
インストロン・ジヤパン・カンパニイ・リミテツド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by インストロン・ジヤパン・カンパニイ・リミテツド filed Critical インストロン・ジヤパン・カンパニイ・リミテツド
Priority to JP13386184U priority Critical patent/JPS6067652U/ja
Publication of JPS6067652U publication Critical patent/JPS6067652U/ja
Application granted granted Critical
Publication of JPS6322610Y2 publication Critical patent/JPS6322610Y2/ja
Granted legal-status Critical Current

Links

JP13386184U 1984-09-03 1984-09-03 走査電子顕微鏡用加熱装置 Granted JPS6067652U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13386184U JPS6067652U (ja) 1984-09-03 1984-09-03 走査電子顕微鏡用加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13386184U JPS6067652U (ja) 1984-09-03 1984-09-03 走査電子顕微鏡用加熱装置

Publications (2)

Publication Number Publication Date
JPS6067652U true JPS6067652U (ja) 1985-05-14
JPS6322610Y2 JPS6322610Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-06-21

Family

ID=30301809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13386184U Granted JPS6067652U (ja) 1984-09-03 1984-09-03 走査電子顕微鏡用加熱装置

Country Status (1)

Country Link
JP (1) JPS6067652U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016189326A (ja) * 2015-03-27 2016-11-04 新日鐵住金株式会社 試験装置およびそれを備えた電子顕微鏡

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834066A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-09-06 1973-05-15
JPS5218061U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-07-28 1977-02-08
JPS5376441A (en) * 1976-12-20 1978-07-06 Hitachi Ltd Specimen heating device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834066A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-09-06 1973-05-15
JPS5218061U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-07-28 1977-02-08
JPS5376441A (en) * 1976-12-20 1978-07-06 Hitachi Ltd Specimen heating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016189326A (ja) * 2015-03-27 2016-11-04 新日鐵住金株式会社 試験装置およびそれを備えた電子顕微鏡

Also Published As

Publication number Publication date
JPS6322610Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-06-21

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