JPS6066174A - 試料分析装置 - Google Patents

試料分析装置

Info

Publication number
JPS6066174A
JPS6066174A JP58172938A JP17293883A JPS6066174A JP S6066174 A JPS6066174 A JP S6066174A JP 58172938 A JP58172938 A JP 58172938A JP 17293883 A JP17293883 A JP 17293883A JP S6066174 A JPS6066174 A JP S6066174A
Authority
JP
Japan
Prior art keywords
ion
electron
detecting
magnetic field
scintillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58172938A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0555832B2 (cs
Inventor
Hifumi Tamura
田村　一二三
Toru Ishitani
亨 石谷
Kaoru Umemura
馨 梅村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58172938A priority Critical patent/JPS6066174A/ja
Publication of JPS6066174A publication Critical patent/JPS6066174A/ja
Publication of JPH0555832B2 publication Critical patent/JPH0555832B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP58172938A 1983-09-21 1983-09-21 試料分析装置 Granted JPS6066174A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58172938A JPS6066174A (ja) 1983-09-21 1983-09-21 試料分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58172938A JPS6066174A (ja) 1983-09-21 1983-09-21 試料分析装置

Publications (2)

Publication Number Publication Date
JPS6066174A true JPS6066174A (ja) 1985-04-16
JPH0555832B2 JPH0555832B2 (cs) 1993-08-18

Family

ID=15951129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58172938A Granted JPS6066174A (ja) 1983-09-21 1983-09-21 試料分析装置

Country Status (1)

Country Link
JP (1) JPS6066174A (cs)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54123987A (en) * 1978-03-20 1979-09-26 Toshiba Corp Radiation detector
JPS58101458U (ja) * 1981-12-29 1983-07-09 株式会社島津製作所 質量分析装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54123987A (en) * 1978-03-20 1979-09-26 Toshiba Corp Radiation detector
JPS58101458U (ja) * 1981-12-29 1983-07-09 株式会社島津製作所 質量分析装置

Also Published As

Publication number Publication date
JPH0555832B2 (cs) 1993-08-18

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