JPS605802A - Production of fine metallic ball - Google Patents
Production of fine metallic ballInfo
- Publication number
- JPS605802A JPS605802A JP58113581A JP11358183A JPS605802A JP S605802 A JPS605802 A JP S605802A JP 58113581 A JP58113581 A JP 58113581A JP 11358183 A JP11358183 A JP 11358183A JP S605802 A JPS605802 A JP S605802A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- particle size
- weight
- mixture
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 35
- 239000002184 metal Substances 0.000 claims abstract description 35
- 239000000843 powder Substances 0.000 claims abstract description 10
- 239000011230 binding agent Substances 0.000 claims abstract description 7
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000000919 ceramic Substances 0.000 claims abstract description 6
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 6
- 239000010439 graphite Substances 0.000 claims abstract description 6
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 5
- 239000000956 alloy Substances 0.000 claims abstract description 5
- 230000001590 oxidative effect Effects 0.000 claims abstract description 4
- 238000001816 cooling Methods 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- 239000000203 mixture Substances 0.000 abstract description 5
- 239000011812 mixed powder Substances 0.000 abstract description 3
- 238000004898 kneading Methods 0.000 abstract description 2
- 239000007769 metal material Substances 0.000 abstract 2
- 239000002245 particle Substances 0.000 description 27
- 238000009826 distribution Methods 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Powder Metallurgy (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、粒径のそろった微小金属球の製造方法に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing microscopic metal spheres having uniform particle sizes.
半導体工業の発展により、半導体デツプと基板の接合に
微小な金属球が使用されたり、種々の微細な製品のろう
接、はんだ付にも微小な金属球の使用が急激に増加して
いる。その他ブローチ、ペンダント、指輪、ネックレス
、イヤリング等の装飾品の製作にも利用されている。With the development of the semiconductor industry, the use of minute metal balls for bonding semiconductor chips and substrates, as well as for brazing and soldering of various minute products, is rapidly increasing. It is also used to make decorative items such as brooches, pendants, rings, necklaces, and earrings.
従来、微小金属球を製造するには、アトマイズ法により
粒度分布の広い粉末を作り、これを所望の粒径に分級後
機械加工により整粒するか、又は金属線を所望の重量に
順次切断した後、機械加工若しくは再溶解することによ
り、略均−な粒径の微小金属球を作っていた。Conventionally, in order to manufacture micro metal spheres, powder with a wide particle size distribution was created using the atomization method, classified to the desired particle size, and then sized by mechanical processing, or metal wires were sequentially cut to the desired weight. Then, by machining or remelting, microscopic metal spheres of approximately uniform particle size were produced.
然し乍ら、これらの製造方法に於いては、粒径0.5龍
以上の金属球を作るについては問題は無いが、粒径Q、
5+am未満の微小金属球を作るとなると甚だ歩留りが
悪く、待に後者の製造方法では細い金属線を所望の重量
に順次切断することが極めて川蝉であった。However, with these manufacturing methods, there is no problem in producing metal spheres with a particle size of 0.5 or more, but with a particle size of Q,
The production of minute metal spheres of less than 5+ am would result in extremely low yields, and in the latter manufacturing method, it was extremely difficult to sequentially cut thin metal wires to desired weights.
本発明は斯かる諸事情に鑑みなされたもので、広い寸法
範囲にわたって粒径のそろった微小金属球を得ることの
できる製造方法を提供せんとするものでる。The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a manufacturing method capable of obtaining fine metal spheres having a uniform particle size over a wide size range.
本発明の微小金属球の製造方法は、441!以下の金属
の単体若しくは混合わ(末又は合金粉末とその重量の1
〜50%にあたる有機バインダーとを混練し、次にこの
混練物を定量供給機にて所望の球となる重量毎に黒鉛板
又はセラミックス板上に滴下し、次いで非酸化性雰囲気
中で前記金属の融点よりも0〜200°C高い温度にて
加熱した後冷却して微小金属球を作ることを特徴とする
ものである。The method for manufacturing micro metal spheres of the present invention includes 441! The following metals alone or mixed (powder or alloy powder and 1 part of its weight)
~50% of the organic binder is kneaded, and then this kneaded material is dropped onto a graphite plate or ceramic plate by weight to form the desired spheres using a quantitative feeder, and then the metal is mixed in a non-oxidizing atmosphere. It is characterized by heating at a temperature 0 to 200°C higher than the melting point and then cooling to produce minute metal spheres.
本発明の微小金属球の製造方法に於いて、44μ以下の
金属の単体若しくは混合粉末又は合金粉末を用いる理由
は、44μを超えると粒径Q、5m+w以下の微小金属
球を作るのが難しくなるからである。In the method for manufacturing micro metal balls of the present invention, the reason for using single metal powder, mixed powder, or alloy powder with a particle size of 44 μ or less is that if the particle size exceeds 44 μ, it becomes difficult to produce micro metal balls with a particle size Q of 5 m + w or less. It is from.
また有機バインダー(例えばアクリル酸、エチレングリ
コール、エポキシ樹脂)の混入割合を1〜50%とした
理由は、1%未満では定量供給機に供せられる混練物に
粘性を持たせることができず、50%を超えると加熱時
に粉末が十分に凝簗せず、所望の微小金属球を得ること
ができないからである。さらに混練物を黒鉛板又はセラ
ミックス板に滴下する理由は、溶融金属との濡れ性が小
さい為である。また加熱雰囲気を還元性又は不活性の非
酸化性雰囲気とした理由は、溶融金属の表面に酸化被膜
を形成さセず、表面張力を効果的に作用させて、略真球
にする為である。さらに加熱温度を溶融する金属の融点
よりも0〜200℃高い温度とした理由は、融点よりも
低い温度では同相が介在し、球が得られない為であり、
融点よりも200°Cを超える温度では表面張力が小さ
くなり、球をiMることができず、扁平となるからであ
る。The reason why the proportion of organic binders (e.g., acrylic acid, ethylene glycol, epoxy resin) is set at 1 to 50% is that if it is less than 1%, the kneaded material that is fed to the quantitative feeder cannot have viscosity. This is because if it exceeds 50%, the powder will not be sufficiently agglomerated during heating, making it impossible to obtain the desired minute metal spheres. Furthermore, the reason why the kneaded material is dropped onto a graphite plate or a ceramic plate is that its wettability with molten metal is low. The reason why the heating atmosphere is a reducing or inert non-oxidizing atmosphere is to prevent the formation of an oxide film on the surface of the molten metal and to effectively apply surface tension to the metal to make it into a nearly perfect sphere. . Furthermore, the reason why the heating temperature is set to 0 to 200 degrees Celsius higher than the melting point of the metal to be melted is that at a temperature lower than the melting point, the same phase will intervene and a sphere will not be obtained.
This is because at a temperature higher than 200° C. than the melting point, the surface tension becomes small, and the ball cannot be formed into a sphere, resulting in a flat shape.
次に本発明による微小金属球の製造方法の具体的な実施
例について説明する。Next, a specific example of the method for manufacturing micro metal spheres according to the present invention will be described.
〔実施例1〕
1〜5メ!の粒度分布を有する還元銀粉を重量比20%
のアクリル酸から成る有機バインダーと共に混練し、次
にこの混練物を定量供給機にて計算粒径0.5+u+、
1.11J 2.4量園の微小金属球を得るべく 1
mg 、 lomg、 100mg毎に各100個黒
鉛板上に滴下し、次いで窒素ガス雰囲気中で1000℃
5分間加熱保持した後冷却して3種のサイズの異なる微
小金属球を作った。[Example 1] 1-5 meters! Reduced silver powder with a particle size distribution of 20% by weight
This kneaded material is then kneaded with an organic binder consisting of acrylic acid, and then this kneaded material is fed into a quantitative feeder with a calculated particle size of 0.5+u+,
1.11J 2. To obtain 4 quantities of micrometallic spheres 1
100 mg, lomg, and 100 mg each were dropped onto a graphite plate, and then heated at 1000°C in a nitrogen gas atmosphere.
The mixture was heated for 5 minutes and then cooled to produce three different sizes of microscopic metal spheres.
この3種の微小金属球の粒1¥を測定した処、第1図a
、b、cのグラフに示す如き粒度分布で、各微小金属球
は夫々所要の計算粒径及びそれに近似の粒径のそろった
ものであった。Figure 1a shows the measurement of the particle size of these three types of micrometallic spheres.
With the particle size distribution as shown in the graphs of , b, and c, each of the micro metal spheres had the required calculated particle size and a particle size similar to the required calculated particle size.
〔実施例2〕
1〜5μの粒度分布を有する還元銀粉90重量%と1〜
5μの粒度分布を有する還元パラジウム粉10重量%と
を■型ミキサーにて混合後、重量比50%のエチレング
リコールより成る有機バインダーと共に混練し、次にこ
の混練物を定量供給機にて計算粒i¥0.4實m 、0
.9mm 、2.hmの微小金属球を得るべく 1mg
、10mg+100mg毎に各100個セラミ・ノクス
板上に滴下し、次いでアルゴンガス雰囲気中で1100
”c 5分間加熱保持した後冷却して3種のサイスの異
なる微小金属球を作った。[Example 2] 90% by weight of reduced silver powder having a particle size distribution of 1 to 5μ and 1 to 5μ
After mixing 10% by weight of reduced palladium powder with a particle size distribution of 5μ in a type mixer, kneading it with an organic binder consisting of ethylene glycol at a weight ratio of 50%, and then converting this kneaded product into calculated particles using a quantitative feeder. i¥0.4m, 0
.. 9mm, 2. 1mg to obtain hm minute metal spheres
, 100 pieces each of 10 mg + 100 mg were dropped onto a ceramic Nox plate, and then 1100 pieces of each were dropped in an argon gas atmosphere.
``c'' After heating and holding for 5 minutes, the mixture was cooled to produce three types of microscopic metal spheres with different sizes.
この3種の微小金属球の粒径を測定した処、第2図a、
b、cのグラフに示す如き粒度分布で、各微小金属球は
夫々所要の計算粒径及びそれに近似の粒径のそろったも
のであった。The particle diameters of these three types of micrometallic spheres were measured, as shown in Figure 2a,
With the particle size distribution as shown in the graphs b and c, each of the micro metal spheres had the required calculated particle size and a particle size similar to the required calculated particle size.
以上の説明で判るように本発明の微小金属球の製造方法
によれば、粒径のそろった微小金属球を広い寸法範囲に
わたって効率良く且つ確実に作成することができるとい
う優れた効果がある。As can be seen from the above description, the method for manufacturing micrometallic spheres of the present invention has the excellent effect of being able to efficiently and reliably produce micrometallic spheres with uniform particle sizes over a wide size range.
第1図a、b、c及び第2図a、b、cは夫々本発明の
微小金属球の製造方法の具体的な実施例においてBJら
れた微小金属球の粒度分布を示すグラフである。
1外廓人 田中貴金属工業株式会社
第1図
(a)
(b) 抹旧mm)
(。) “ff(”ゝ
第2図
(Q)
(b) 1! 4’k (mm)
、。) R″′°“。FIGS. 1a, b, and c and FIGS. 2a, b, and c are graphs showing the particle size distribution of micrometallic spheres subjected to BJ in a specific example of the method for producing micrometallic spheres of the present invention, respectively. 1 Outer Person Tanaka Kikinzoku Kogyo Co., Ltd. Figure 1 (a) (b) Deleted mm) (.) "ff ("ゝFigure 2 (Q) (b) 1! 4'k (mm) ,.) R″′°“.
Claims (1)
を重量比1〜50%の有機バインダーと共に混練し、次
にこの混練物を定量供給機にて所望の球となる重量毎に
黒鉛板又はセラミックス板上に滴下し・マ次いで非酸化
性雰囲気中で前記金属の融点よりも0〜200℃高い温
度にて加熱した後冷却して微小金属球を作ることを特徴
とする微小金属球の製造方法。Single or mixed metal powder or alloy powder with a size of 44μ or less is kneaded with an organic binder at a weight ratio of 1 to 50%, and then this kneaded material is fed into a graphite plate or ceramic plate by weight to form desired balls using a quantitative feeder. 1. A method for producing micro metal balls, which comprises dropping the metal onto the surface of the metal, heating the metal at a temperature of 0 to 200° C. higher than the melting point of the metal in a non-oxidizing atmosphere, and then cooling the metal to produce micro metal balls.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58113581A JPS605802A (en) | 1983-06-23 | 1983-06-23 | Production of fine metallic ball |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58113581A JPS605802A (en) | 1983-06-23 | 1983-06-23 | Production of fine metallic ball |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS605802A true JPS605802A (en) | 1985-01-12 |
Family
ID=14615850
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58113581A Pending JPS605802A (en) | 1983-06-23 | 1983-06-23 | Production of fine metallic ball |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS605802A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS533980A (en) * | 1976-06-30 | 1978-01-14 | Dainippon Toryo Co Ltd | Production of fluorescent substance coated with pigment |
-
1983
- 1983-06-23 JP JP58113581A patent/JPS605802A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS533980A (en) * | 1976-06-30 | 1978-01-14 | Dainippon Toryo Co Ltd | Production of fluorescent substance coated with pigment |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104668807B (en) | Spherical low-melting-point brazing filler metal powder manufacturing method | |
JPH03115535A (en) | Method for decreasing oxygen in rare earth metal | |
JPS605802A (en) | Production of fine metallic ball | |
JPS6199640A (en) | Manufacture of composite target material | |
JPS6017002A (en) | Production of composite metallic micro-ball | |
JP2006183076A (en) | Atomizing gold powder, electrically conductive gold paste using the same and gold clay for decoration | |
JPH04262895A (en) | Manufacture of metallic ultra fine ball | |
JPS605801A (en) | Production of fine metallic ball | |
JPH03155493A (en) | Gold alloy solder paste for semiconductor device | |
US2745742A (en) | Method of making a sintered brazing pellet | |
JPH1140862A (en) | Manufacture of cobalt antomonide thermoelectric material | |
JP2010261094A (en) | GRANULAR MATERIAL FOR VAPOR-DEPOSITING Au-Sn ALLOY, AND METHOD FOR PRODUCING THE SAME | |
JP2679267B2 (en) | Manufacturing method of brazing material | |
JP2005076119A (en) | Composite material for substrate incorporated with semiconductor device, and its production method | |
JPH03180401A (en) | Manufacture of fine metallic ball having uniform size | |
JP2973390B2 (en) | Method for producing metal in which fine particles of metal or metal oxide are dispersed | |
JP2001262248A (en) | Zn-Sb SERIES MATERIAL, ITS PRODUCING METHOD AND METHOD FOR SUPPRESSING CRACK IN Zn-Sb SERIES MATERIAL | |
JP3046342B2 (en) | Method for producing aluminum nitride powder | |
JPH1025502A (en) | Production of fine metal ball | |
JPH04259310A (en) | Production of superfine metal ball | |
JPH0350106A (en) | Production of oxide superconductor | |
JPH108113A (en) | Production of metallic ball | |
JPH02225636A (en) | Manufacture of electrical contact material | |
JPH1140861A (en) | Manufacture of cobalt antimonide thermoelectric material | |
JPS60114506A (en) | Production of fine composite particle of hardly workable material |