JPS6017002A - Production of composite metallic micro-ball - Google Patents
Production of composite metallic micro-ballInfo
- Publication number
- JPS6017002A JPS6017002A JP58125694A JP12569483A JPS6017002A JP S6017002 A JPS6017002 A JP S6017002A JP 58125694 A JP58125694 A JP 58125694A JP 12569483 A JP12569483 A JP 12569483A JP S6017002 A JPS6017002 A JP S6017002A
- Authority
- JP
- Japan
- Prior art keywords
- ball
- balls
- grain size
- metal
- particle size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000011806 microball Substances 0.000 title abstract 7
- 239000002184 metal Substances 0.000 claims abstract description 41
- 229910052751 metal Inorganic materials 0.000 claims abstract description 41
- 239000000843 powder Substances 0.000 claims abstract description 12
- 239000011230 binding agent Substances 0.000 claims abstract description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 7
- 239000000956 alloy Substances 0.000 claims abstract description 7
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 7
- 239000010439 graphite Substances 0.000 claims abstract description 7
- 238000010438 heat treatment Methods 0.000 claims abstract description 6
- 230000001590 oxidative effect Effects 0.000 claims abstract description 5
- 238000001816 cooling Methods 0.000 claims abstract description 4
- 239000002245 particle Substances 0.000 claims description 38
- 229910001111 Fine metal Inorganic materials 0.000 claims description 12
- 238000004898 kneading Methods 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- 230000008018 melting Effects 0.000 claims description 4
- 239000007771 core particle Substances 0.000 claims description 2
- 239000011812 mixed powder Substances 0.000 abstract description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 6
- 239000000919 ceramic Substances 0.000 abstract description 5
- 239000000203 mixture Substances 0.000 abstract description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 abstract description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052742 iron Inorganic materials 0.000 abstract description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 2
- 239000003822 epoxy resin Substances 0.000 abstract description 2
- 229920000647 polyepoxide Polymers 0.000 abstract description 2
- 239000011805 ball Substances 0.000 abstract 7
- 239000007769 metal material Substances 0.000 abstract 2
- 238000009826 distribution Methods 0.000 description 13
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 238000007747 plating Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000889 atomisation Methods 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Landscapes
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Powder Metallurgy (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、粒径のそろった複合微小金属球の製造方法に
関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing composite fine metal spheres having uniform particle sizes.
半導体工業の発展により半導体チップと基板との接合に
複合微小金属球が使用されたり、種々の微細な部品のろ
う接、はんだ付にも複合微小金属球の使用が急激に増加
している。With the development of the semiconductor industry, composite microscopic metal balls are being used for joining semiconductor chips and substrates, and the use of composite microscopic metal balls for brazing and soldering of various microscopic parts is rapidly increasing.
（１）
従来、複合微小金属球を製造するには、アトマイズ法に
より粒度分布の広い粉末を製造し、所望の粒径に分級後
Ｉ浅域加工により整粒したり、金属線を所望の重量に切
断後機械加工若しくは再溶解したりすることにより、略
均−な粒径の微小金属球を作り、然る１多無電ＩＷめっ
き又は電気めっきにより外表面に所要の金属膜を形成し
て複合微小金属球を作っていた。(1) Conventionally, in order to manufacture composite micro metal spheres, powder with a wide particle size distribution is manufactured by the atomization method, and after classification to the desired particle size, the particles are sized by I shallow area processing, or metal wires are sized to the desired weight. After cutting and machining or remelting, fine metal spheres of approximately uniform particle size are made, and then a desired metal film is formed on the outer surface by electroless IW plating or electroplating to form a composite. They were making tiny metal balls.
然し乍ら、斯かる製造方法では微小金属球の外表面に金
属膜を形成する為の無電解めっき又は電気めっきに於い
ては合金めっきが難しく、無電解めっきに於いてはさら
にめっきの種類が限定されるという問題があった。However, with this manufacturing method, alloy plating is difficult in electroless plating or electroplating to form a metal film on the outer surface of the micro metal sphere, and the types of plating are further limited in electroless plating. There was a problem that
本発明は斯かる諸事情に鑑みなされたもので、微小金属
球の外表面に形成する金属膜の種類に限定されることが
無く、広い粒度範囲にわたって粒径のそろった複合微小
金属球を効率良く容易且つ確実に作ることのできる製造
方法を提供せんとするものである。The present invention was made in view of the above circumstances, and is not limited to the type of metal film formed on the outer surface of the micro metal sphere, and is capable of efficiently producing composite micro metal balls with uniform particle sizes over a wide range of particle sizes. It is an object of the present invention to provide a manufacturing method that can be manufactured easily and reliably.
本発明の複合微小金属球の製造方法は、黒鉛板（２）
又はセラミックス板上に芯となる粒径０．１〜３闘の微
小金属球を置き、次にこの−にに粒径４４ ｔｔ以下の
金属の単体若しくは混合粉末又は合金粉末とその重量の
１〜５０％の有機バインダー例えばアクリル酸、エチレ
ングリコール、エポキシ樹用１とをン昆練した混練物を
定量供給機にて所望の膜厚となる量を滴下し、次いで混
練物中の金属の融点よりも０〜１００℃高い温度で非酸
化性雰囲気中で加熱保持した後冷却して複合微小金属球
を得ることを特徴とするものである。The method for manufacturing composite micrometallic spheres of the present invention involves placing a micrometallic sphere with a particle size of 0.1 to 3mm as a core on a graphite plate (2) or a ceramic plate, and then placing a micrometallic sphere with a particle size of 44tt on the core. A desired film is prepared by kneading a mixture of the following metal powders, mixed powders, or alloy powders with 1 to 50% of the weight of an organic binder such as acrylic acid, ethylene glycol, or epoxy resin 1 using a quantitative feeder. A method characterized by dropping a thick amount, followed by heating and holding in a non-oxidizing atmosphere at a temperature 0 to 100°C higher than the melting point of the metal in the kneaded material, and then cooling to obtain composite microscopic metal spheres. It is.
本発明の複合微小金属球の製造方法に於いて用いる金属
の混合粉末又は合金わ）末の粒径を４４ｐ以下とした理
由は、４４！ｌを超えると微小金属球の外表面に形成す
る金属膜の膜厚を薄くできないからである。また金属の
単体若しくは混合粉末又は合金粉末に対する有機バイン
ダーの混入割合をその粉末重量の１〜５０％とした理由
は、１％未満では定量供給機で供給滴下するに必要な粘
性を持たーｌることができず、５０％を超えると加熱時
粉末が十分に凝集せず、所望の膜厚が得られないからで
あ（３）
る。さらに微小金属球を置いて混練物を滴下する台とし
て、黒鉛板又はセラミックス板を用いる理由は、金属膜
を形成する混練物中の金属との濡れ性が小さいからであ
る。また加熱温度を混練物中の金属の融点よりも０〜１
００°Ｃ高くした理由は、融点以下では固相が介在して
芯である微小金属球との濡れが悪く、融点よりも１００
℃超えると芯で微小金属球と合金化するようになるから
である。The reason why the particle size of the metal mixed powder or alloy powder used in the method for manufacturing composite microscopic metal balls of the present invention is set to 44p or less is because it is 44! This is because if it exceeds l, the thickness of the metal film formed on the outer surface of the micro metal sphere cannot be reduced. Also, the reason why the proportion of organic binder mixed in the single metal, mixed powder, or alloy powder is set to 1 to 50% of the powder weight is that if it is less than 1%, it will not have the viscosity necessary to be fed dropwise with a metering feeder. If it exceeds 50%, the powder will not coagulate sufficiently during heating and the desired film thickness will not be obtained (3). Furthermore, the reason why a graphite plate or a ceramic plate is used as a table on which the fine metal balls are placed and the kneaded material is dropped is that the wettability with the metal in the kneaded material that forms the metal film is low. Also, the heating temperature is 0 to 1 higher than the melting point of the metal in the kneaded material.
The reason for raising the temperature by 00°C is that below the melting point, a solid phase intervenes and the wetting with the micro metal sphere that is the core is poor.
This is because if the temperature exceeds ℃, the core will become alloyed with minute metal balls.
さらにまた加熱雰囲気を還元性、不活性等の非酸化性の
雰囲気とした理由は、芯である微小金属球の外表面に酸
化膜が形成されて金属膜との濡れ性がり［（くなるのを
防ぐ為である。Furthermore, the reason why the heating atmosphere is a reducing, inert, or other non-oxidizing atmosphere is that an oxide film is formed on the outer surface of the microscopic metal sphere that is the core, which reduces the wettability with the metal film. This is to prevent
次に本発明による複合微小金属球の製造方法の具体的な
実施例について説明する。Next, a specific example of the method for manufacturing composite fine metal spheres according to the present invention will be described.
〔実施例１〕
黒鉛板上に芯となる粒径１■の鉄球を２００個置き、次
に１〜５μの粒度分布を有する還元銀粉７２重量％と１
〜５ Ｉｔの粒度分布を有する電解銅粉２８重惜％との
混合粉末を該混合粉末の重量の５０％にあたるアクリル
酸から成る有機バインダーと共に（４）
混練した後、この混練物を定量供給機により前記黒鉛板
−１ユの鉄球各１０（ｌ （ｌＸ＋に、夫々計算粒径１
．ｏ３鰭。[Example 1] 200 iron balls with a core particle size of 1 μm were placed on a graphite plate, and then 72% by weight of reduced silver powder with a particle size distribution of 1 to 5 μm and 1 μm were added.
After kneading (4) a mixed powder of 28% electrolytic copper powder having a particle size distribution of ~5 It with an organic binder consisting of acrylic acid that accounts for 50% of the weight of the mixed powder, the kneaded product is passed through a quantitative feeder. According to the above-mentioned graphite plate - 1 unit of iron balls each 10 (l (l
．． o3 fins.
計算膜厚０．０１５罪と計算粒径１．２５幽ｍ、計算膜
厚０．１２５ｍ１ｌの複合微小金属球を得るべく１■、
１０■を供給滴下し、次いで８００℃、５分間窒素ガス
雰囲気中で加熱保持した後、冷却してサイズの異なる２
種類の複合微小金属球を得た。この２種類の複合微小金
属球の粒径を測定した処、第１図ａ、ｂのグラフに示す
如き粒度分布で、大部分のものは計算粒径と同じで、そ
の前後の近似粒径のものは僅かで、粒径のそろった複合
微小金属球であった。またその２種類の複合微小金属球
の外表面の金属膜の膜厚を測定した処、第２図ａ、ｂの
グラフに示す如き膜厚分布で、大部分のものは計算膜厚
と同じで、残りはその前後の近似膜厚であった。In order to obtain composite fine metal spheres with a calculated film thickness of 0.015 mm, a calculated particle size of 1.25 m, and a calculated film thickness of 0.125 ml,
10cm was supplied dropwise, and then heated and held at 800°C for 5 minutes in a nitrogen gas atmosphere, cooled and
Different types of composite micro metal spheres were obtained. When we measured the particle size of these two types of composite micrometallic spheres, we found that the particle size distribution was as shown in the graphs in Figure 1 a and b, and most of the particles were the same as the calculated particle size, and the approximate particle sizes before and after that were the same as the calculated particle size. There were only a few particles, and they were composite microscopic metal spheres of uniform particle size. In addition, when we measured the thickness of the metal film on the outer surface of the two types of composite micrometallic spheres, we found that the film thickness distribution was as shown in the graphs in Figure 2 a and b, and most of the thicknesses were the same as the calculated film thickness. , and the rest are approximate film thicknesses before and after that.
〔実施例２〕
セラミックス板上に粒径０．５龍の銅球を２００個置き
、次に３０〜４４μの粒度分布を有する５ｎ−Ｐｂ４０
重量％合金のア１−マイズ粉を該アトマイズ粉の重量の
２０％にあたるエチレングリコールから成る（５）
有機バインダーと共に混練した後、この混練物を定量供
給機により前記セラミックス板上の銅球各１０ （Ｈ［
ＦＡニ、夫々計算粒径０．７ｍ、計算膜厚０．ｈｍと計
算粒径１．２６ｍｍ、計算膜厚０．３８ｆｌの複合微小
金属球を得るべく１ｍｇ、１０■を供給滴下し、次いで
２５０℃、３分間窒素ガス雰囲気中で加熱保持した後、
冷却してサイズの異なる２種類の複合微小金属球を得た
。この２種類の複合微小金属球の粒径を測定した処、第
３図ａ、ｂのグラフに示す如き粒度分布で、大部分のも
のは 計算粒径と同じで、その前後の近似粒径のものは
僅がで、粒径のそろった複合微小金属球であった。また
その２種類の複合微小金属球の外表面の金属膜の膜厚を
測定した処、第４図ａ、ｂのグラフに示す如き膜厚分布
で、大部分のものは計算膜厚と同じで、その残りはその
前後の近似膜厚であった。[Example 2] 200 copper balls with a grain size of 0.5 μm were placed on a ceramic plate, and then 5n-Pb40 having a grain size distribution of 30 to 44μ was placed.
After kneading the atomized powder of 1-wt% alloy with an organic binder (5) consisting of ethylene glycol corresponding to 20% of the weight of the atomized powder, the kneaded product was fed to 10 copper balls each on the ceramic plate using a quantitative feeder. (H[
FA D, calculated particle size 0.7m, calculated film thickness 0. hm, a calculated particle size of 1.26 mm, and a calculated film thickness of 0.38 fl, 1 mg of 10 μm was supplied dropwise, and then heated and held at 250° C. for 3 minutes in a nitrogen gas atmosphere.
After cooling, two types of composite fine metal spheres with different sizes were obtained. When we measured the particle size of these two types of composite micrometallic spheres, we found that the particle size distribution was as shown in the graphs in Figure 3 a and b, and most of them were the same as the calculated particle size, and the approximate particle sizes before and after that were the same as the calculated particle size. There were only a few particles, and they were composite microscopic metal spheres with uniform particle sizes. In addition, when we measured the thickness of the metal film on the outer surface of the two types of composite micrometal balls, we found that the film thickness distribution was as shown in the graphs in Figure 4 a and b, and most of the thicknesses were the same as the calculated film thickness. , and the rest were approximate film thicknesses before and after that.
以上の説明で判るように本発明の複合微小金属球の製造
方法によれば、芯となる微小金属球の外表面に形成する
金属膜の種類に限定されることが無く、広い粒度範囲に
わたって適宜所要の膜厚の（６）
金属膜を有し且つ所要の粒径のそろった複合微小金属球
を、スクラップを生じさせること無く、効率良く容易口
４つ６′ＩＣ実に製造することができるという優れた効
果がある。As can be seen from the above explanation, according to the method for manufacturing composite micrometal balls of the present invention, there is no limitation to the type of metal film formed on the outer surface of the core micrometallic sphere, and the metal film can be appropriately applied over a wide particle size range. It is said that it is possible to efficiently and easily produce composite micrometallic spheres having a (6) metal film with the required film thickness and the required particle size without producing scrap. It has excellent effects.
第１図ａ、ｂ４；ｊ、夫々本発明の複合微小金属球の製
造方法の具体的な一実施例によって得られた複合微小金
属球の粒度分布を示すグラフ、第２図ａ、ｂば夫々その
複合微小金属球の外表面の金属膜の膜厚分布を示すグラ
フ、第３図ａ、ｂば夫々本発明の複合微小金属球の製造
方法の具体的な他の実施例によって得られた複合微小金
属球の粒度分布を示すグラフ、第４図ａ、ｂは夫々その
複合微小金属球の外表面の金属膜の膜厚分布を示すグラ
フである。
出願人 Ｈ１中貴金属＝Ｃ業株式会社
（７）
第１図
（Ｑ）
（ｂ）
粒径（ｍｍ）
第２図
（（１）
（ｂ）
膜厚（ｍｍ）
第３図
（Ｑ）
粒径（ｍｍ）
（ｂ）
粒 イ予（ｍｍ）Figures 1 a and b are graphs showing the particle size distribution of composite fine metal spheres obtained by a specific example of the method for producing composite fine metal spheres of the present invention; Figures 2 a and b are graphs showing the particle size distribution, respectively. Graphs showing the film thickness distribution of the metal film on the outer surface of the composite micrometallic sphere, FIGS. Graphs showing the particle size distribution of the fine metal spheres, FIGS. 4a and 4b, are graphs showing the thickness distribution of the metal film on the outer surface of the composite fine metal spheres, respectively. Applicant H1 Precious Metals = C Gyo Co., Ltd. (7) Figure 1 (Q) (b) Particle size (mm) Figure 2 ((1) (b) Film thickness (mm) Figure 3 (Q) Grain size (mm) (b) Grain size (mm)
Claims (1)
３１謙の微小金属球を置き、次にこの−１−に粒径４４
μ以下の金属の単体若しくは混合粉末又は合金粉末とそ
の重量の１〜５０％の有機バインダーとをン昆練した混
練物を定量供給機にて所望の膜厚となる量を滴下し、次
いで混練物中の金属の融点よりも０〜１００℃高い温度
で非酸化性雰囲気中で加熱保持した後冷却して複合微小
金属球を得ることを特徴とする複合微小金属球の製造方
法。Graphite plate or 9? Core particle size 0.1~ on Laminx plate
Place a 31mm micrometal ball, then place a particle size 44mm on this -1-
A kneaded product made by kneading single or mixed metal powder or alloy powder with a particle size of less than μ and an organic binder of 1 to 50% of its weight is dropped in an amount to obtain the desired film thickness using a quantitative feeder, and then kneaded. 1. A method for producing composite fine metal spheres, which comprises heating and holding in a non-oxidizing atmosphere at a temperature 0 to 100° C. higher than the melting point of the metal in the object, followed by cooling to obtain composite fine metal spheres.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58125694A JPS6017002A (en) | 1983-07-11 | 1983-07-11 | Production of composite metallic micro-ball |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58125694A JPS6017002A (en) | 1983-07-11 | 1983-07-11 | Production of composite metallic micro-ball |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6017002A true JPS6017002A (en) | 1985-01-28 |
Family
ID=14916386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58125694A Pending JPS6017002A (en) | 1983-07-11 | 1983-07-11 | Production of composite metallic micro-ball |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6017002A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012170998A (en) * | 2011-02-23 | 2012-09-10 | National Institute Of Advanced Industrial Science & Technology | Jig for forming metal ball, method of forming metal ball using the same, and metal ball produced by the method |
| CN108015274A (en) * | 2017-12-27 | 2018-05-11 | 洛阳神佳窑业有限公司 | A kind of novel powder metallurgy material |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5414587A (en) * | 1977-07-06 | 1979-02-02 | Sekisui Chem Co Ltd | Preparation of bacterial cells |
-
1983
- 1983-07-11 JP JP58125694A patent/JPS6017002A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5414587A (en) * | 1977-07-06 | 1979-02-02 | Sekisui Chem Co Ltd | Preparation of bacterial cells |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012170998A (en) * | 2011-02-23 | 2012-09-10 | National Institute Of Advanced Industrial Science & Technology | Jig for forming metal ball, method of forming metal ball using the same, and metal ball produced by the method |
| CN108015274A (en) * | 2017-12-27 | 2018-05-11 | 洛阳神佳窑业有限公司 | A kind of novel powder metallurgy material |
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