JPS6057959A - 薄膜コンデンサ - Google Patents

薄膜コンデンサ

Info

Publication number
JPS6057959A
JPS6057959A JP16527083A JP16527083A JPS6057959A JP S6057959 A JPS6057959 A JP S6057959A JP 16527083 A JP16527083 A JP 16527083A JP 16527083 A JP16527083 A JP 16527083A JP S6057959 A JPS6057959 A JP S6057959A
Authority
JP
Japan
Prior art keywords
thin film
ta2o5
film capacitor
layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16527083A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6349385B2 (en:Method
Inventor
Shunji Seki
関　俊司
Takashi Umigami
海上　隆
Bunjiro Tsujiyama
辻山　文治郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP16527083A priority Critical patent/JPS6057959A/ja
Publication of JPS6057959A publication Critical patent/JPS6057959A/ja
Publication of JPS6349385B2 publication Critical patent/JPS6349385B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Formation Of Insulating Films (AREA)
JP16527083A 1983-09-09 1983-09-09 薄膜コンデンサ Granted JPS6057959A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16527083A JPS6057959A (ja) 1983-09-09 1983-09-09 薄膜コンデンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16527083A JPS6057959A (ja) 1983-09-09 1983-09-09 薄膜コンデンサ

Publications (2)

Publication Number Publication Date
JPS6057959A true JPS6057959A (ja) 1985-04-03
JPS6349385B2 JPS6349385B2 (en:Method) 1988-10-04

Family

ID=15809139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16527083A Granted JPS6057959A (ja) 1983-09-09 1983-09-09 薄膜コンデンサ

Country Status (1)

Country Link
JP (1) JPS6057959A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225286A (en) * 1991-06-13 1993-07-06 Kabushiki Kaisha Toyota Chuo Kenkyusho Dielectric film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225286A (en) * 1991-06-13 1993-07-06 Kabushiki Kaisha Toyota Chuo Kenkyusho Dielectric film

Also Published As

Publication number Publication date
JPS6349385B2 (en:Method) 1988-10-04

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