JPS6057653B2 - Manufacturing method of magnetron cathode body - Google Patents
Manufacturing method of magnetron cathode bodyInfo
- Publication number
- JPS6057653B2 JPS6057653B2 JP54169238A JP16923879A JPS6057653B2 JP S6057653 B2 JPS6057653 B2 JP S6057653B2 JP 54169238 A JP54169238 A JP 54169238A JP 16923879 A JP16923879 A JP 16923879A JP S6057653 B2 JPS6057653 B2 JP S6057653B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetron
- cathode body
- magnetron cathode
- filament
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microwave Tubes (AREA)
Description
【発明の詳細な説明】
本発明は、マグネトロンのフィラメントを支持すると共
にこのフィラメントから放出される電子の軸方向への放
射を防止する目的て設けられる支持部材を備えたマグネ
トロン陰極体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a magnetron cathode body, which includes a support member provided for the purpose of supporting a magnetron filament and preventing electrons emitted from the filament from being radiated in the axial direction. .
一般にマグネトロン陰極体は第１図に示すように、フィ
ラメント１の中心にヒートサポート２を配置し、このフ
ィラメント１を支持し、かつ電子の軸方向への放射を防
止するために、フィラメント１の両端に上支持部材３お
よび下支持部材４を配置して構成されている。Generally, as shown in Figure 1, in a magnetron cathode body, a heat support 2 is placed at the center of a filament 1, and a heat support 2 is placed at both ends of the filament 1 to support the filament 1 and prevent electrons from being emitted in the axial direction. An upper support member 3 and a lower support member 4 are arranged at the top.
そして、マグネトロンの使用に際してフィラメント１は
約１７００℃の高温度に上昇するため支持部材３、４は
タングステン又はモリブデン等の高融点金属により形成
されている。When the magnetron is used, the temperature of the filament 1 rises to a high temperature of about 1700° C., so the supporting members 3 and 4 are made of a high melting point metal such as tungsten or molybdenum.
このように構成されたマグネトロン陰極体は、フィラメ
ント１が前述のようにマグネトロンの使用に際して約１
７００℃の温度にまで上昇するため、このフィラメント
１の酸化等を防ぐ目的で、真空状態としたマグネトロン
の気密室内（図示せず）に装着されている。In the magnetron cathode body constructed in this way, the filament 1 is approximately 1
Since the temperature rises to 700° C., the filament 1 is installed in an airtight chamber (not shown) of a magnetron in a vacuum state in order to prevent the filament 1 from being oxidized.
さて、近時支持部材に高融点金属粉末の焼結体を用いる
ことが実用化されつつある。Recently, the use of sintered bodies of high-melting point metal powders for support members has been put into practical use.
このような焼結体でなる支持部材を用いた陰極体におい
ては２次電子放射の点あるいは製造の容易なこと等の、
利点を有しているにもかかわらず、次のような難点があ
り、この点の改善が要望されていた。すなわち、前述の
ような真空状態の気密室内で使用されるにもかかわらず
、マグネトロン陰極体の支持部材３、４として多孔性の
高融点金属焼結フ体を用いた場合には、比較的早期に放
射効率が低下したり、あるいはフィラメント１が酸化す
るという現象が往々にして生じることである。このよう
な場合には、マグネトロンの特性が早期に劣化し、マグ
ネトロンの寿命を短縮することとなる。In a cathode body using a support member made of such a sintered body, there are several issues such as secondary electron emission and ease of manufacture.
Although it has advantages, it has the following drawbacks, and improvements in these points have been desired. In other words, although it is used in an airtight chamber in a vacuum state as described above, when a porous high melting point metal sintered body is used as the support members 3 and 4 of the magnetron cathode body, the The phenomenon that the radiation efficiency decreases or the filament 1 oxidizes often occurs. In such a case, the characteristics of the magnetron deteriorate early, shortening the life of the magnetron.
本発明はかかる原因を追求すべく鋭意研究を進めた結果
、次のような事実を見出した。The present invention has conducted extensive research to find the cause of this problem, and as a result, the following facts have been discovered.
すなわち、マグネトロン陰極体の支持部材３，４に使用
される高融点金属焼結体は、高融点金属の粉末をブレス
型内に一定量充填してブレス加工した後加熱焼結するこ
とにより得られている。That is, the high melting point metal sintered body used for the support members 3 and 4 of the magnetron cathode body is obtained by filling a certain amount of high melting point metal powder into a press mold, pressing it, and then heating and sintering it. ing.
而して、このようにして製造された支持部材３，４は、
第２図に示すように内部に微小な空隙５を多数有してお
り、この空隙内に焼結時の雰囲気ガス以外のガスが包含
されることがある。このような支持部材３，４がマグネ
トロンの気密室内に装着され、真空状態で使用されて高
温とされた場合このガスが徐々に拡散により気密室内に
放出され放射効率を低下させたり、フィラメント１を酸
化させてマグネトロンの特性を劣下させていたのである
。本発明はかかる知見に基いてなされたもので、フィラ
メントを支持する高融点金属焼結体からなる支持部材を
、マグネトロン陰極体の気密室内へ装着するにあたり、
この支持部材を非酸化性ガス雰囲気中で加熱し、支持部
材を構成する焼結体の空隙中のガスを非酸化性ガスで置
換する処理を施こすことにより、長期にわたり良好な特
性を保持するマグネトロン陰極体を提供しようとするも
のである。Thus, the supporting members 3 and 4 manufactured in this way are as follows:
As shown in FIG. 2, it has many minute voids 5 inside, and gases other than the atmospheric gas during sintering may be contained in these voids. When such support members 3 and 4 are installed in the airtight chamber of a magnetron and used in a vacuum state and the temperature is high, this gas is gradually released into the airtight chamber by diffusion, reducing the radiation efficiency and causing the filament 1 to This caused the magnetron's properties to deteriorate due to oxidation. The present invention was made based on this knowledge, and when installing a support member made of a high melting point metal sintered body that supports a filament into an airtight chamber of a magnetron cathode body,
By heating this supporting member in a non-oxidizing gas atmosphere and replacing the gas in the voids of the sintered body constituting the supporting member with non-oxidizing gas, good properties can be maintained over a long period of time. The purpose is to provide a magnetron cathode body.
以下本発明の一実施例を図面を参照して説明する。An embodiment of the present invention will be described below with reference to the drawings.
なお、本発明により得られるマグネトロン陰極体は、外
観的には従来のマグネトロン陰極体と同一構成であるの
で、第１図および第２図を用いて説明する。モリブデン
粉末を所定形状に成形した後焼結する。Note that the magnetron cathode body obtained by the present invention has the same external structure as a conventional magnetron cathode body, and therefore will be explained using FIG. 1 and FIG. 2. After molding molybdenum powder into a predetermined shape, it is sintered.
このモリブデンの粉末を焼結させて得られるマグネトロ
ン陰極体の支持部材３，４中には微小な空隙５が形成さ
れており、焼結時にはこの微小空隙は焼結時の雰囲気ガ
スにより充満されている−が、焼結後の加工工程あるい
は長期にわたる保管の際にその一部は空気等と置換され
る。而して、本発明においてはこのように内部空隙に空
気その他のフィラメントの劣化を促進させるガスを包含
した支持部材に、例えば水素ガスあるいは水素と窒素と
の混合ガスのような非酸化性ガス雰囲気中で１０００〜
１４００℃で３紛〜１時間加熱処理が施される。この加
熱処理により、支持部材３，４の空隙５内に存在する空
気その他のガスは、非酸化性ガスにより置換される。Micro voids 5 are formed in the support members 3 and 4 of the magnetron cathode body obtained by sintering this molybdenum powder, and during sintering, these micro voids are filled with the atmospheric gas during sintering. However, some of it is replaced with air during processing steps after sintering or during long-term storage. Accordingly, in the present invention, the support member containing air or other gas that promotes deterioration of the filament in its internal void is provided with an atmosphere of a non-oxidizing gas such as hydrogen gas or a mixed gas of hydrogen and nitrogen. 1000~ inside
Heat treatment is performed at 1400°C for 3 to 1 hour. By this heat treatment, air and other gases existing in the gaps 5 of the support members 3 and 4 are replaced with non-oxidizing gas.
なお、放冷時空隙内に再び空気が混入するのを防ぐため
放冷は非酸化性雰囲気下で行ない、またマグネトロンへ
の装着までに長期間保管する必要があるときは、非酸化
性雰囲気下で保管することが望ましい。In addition, in order to prevent air from entering the gap again during cooling, the cooling should be performed in a non-oxidizing atmosphere, and if it is necessary to store it for a long period of time before installing it on the magnetron, it should be stored in a non-oxidizing atmosphere. It is recommended to store it in
内部空隙を非酸化性ガスにより置換された支持部材３，
４は、フィラメント１と組立てられ、図示を省略したマ
グネトロンの気密室内へ装着され、気密室内の排気、気
密の各処理が施される。a support member 3 whose internal voids are replaced with non-oxidizing gas;
4 is assembled with the filament 1 and installed in an airtight chamber of a magnetron (not shown), and the airtight chamber is subjected to exhaust and airtight treatment.
而して、本発明により得られたマグネトロン陰極体にお
いては、マグネトロン製造工程中の所定の真空排気処理
により、焼結体内部のガス成分が簡単に除去できるため
、長期間所望の真空状態を維持することができる。この
ガス除去作用は、非酸化性ガスを水素ガスとしたときに
顕著であり、水素ガスを含むフォーミングガスのような
ものであつても効果を有する。したがつて、支持部材３
，４からの酸化性ガスの放出に由来するマグネトロンの
特性劣化等は回避され、性能のよいしかも寿命の長いマ
グネトロンを得ることができる。なお、本実施例におい
てはモリブデン焼結体を使用した。Therefore, in the magnetron cathode body obtained according to the present invention, the gas components inside the sintered body can be easily removed by a predetermined vacuum evacuation treatment during the magnetron manufacturing process, so that the desired vacuum state can be maintained for a long period of time. can do. This gas removal effect is remarkable when hydrogen gas is used as the non-oxidizing gas, and is effective even when using a forming gas containing hydrogen gas. Therefore, the support member 3
, 4 is avoided, and a magnetron with good performance and long life can be obtained. Note that in this example, a molybdenum sintered body was used.
モリブデンは、支持部材としての特性および製造上の容
易なことからマグネトロン陰極体として好ましいが、タ
ングステンも適用できる。Molybdenum is preferred as the magnetron cathode body because of its properties as a support member and ease of manufacture, but tungsten can also be used.
第１図はマグネトロン陰極体を示す縦断面図、第２図は
高融点金属焼結体の空孔を示す説明図である。
１・・・・・フィラメント、２・・・・・・ヒートサポ
ート、３・・・・・・上支持部材、４・・・・・・下支
持部材、５・・・・・・微小な空孔。FIG. 1 is a longitudinal sectional view showing a magnetron cathode body, and FIG. 2 is an explanatory view showing pores in a high melting point metal sintered body. 1...Filament, 2...Heat support, 3...Upper support member, 4...Lower support member, 5...Minute sky Hole.
Claims (1)
形成し、この焼結体を水素又は水素を含む非酸化性ガス
雰囲気中で加熱することを特徴とするマグネトロン陰極
体の製造方法。 ２ 高融点金属は、モリブデンから成る特許請求の範囲
第１項に記載のマグネトロン陰極体の製造方法。[Scope of Claims] 1. A magnetron cathode body characterized in that a support member for supporting a filament is formed of a high melting point sintered body, and this sintered body is heated in an atmosphere of hydrogen or a non-oxidizing gas containing hydrogen. manufacturing method. 2. The method for manufacturing a magnetron cathode body according to claim 1, wherein the high melting point metal is molybdenum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54169238A JPS6057653B2 (en) | 1979-12-27 | 1979-12-27 | Manufacturing method of magnetron cathode body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54169238A JPS6057653B2 (en) | 1979-12-27 | 1979-12-27 | Manufacturing method of magnetron cathode body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5693246A JPS5693246A (en) | 1981-07-28 |
| JPS6057653B2 true JPS6057653B2 (en) | 1985-12-16 |
Family
ID=15882791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP54169238A Expired JPS6057653B2 (en) | 1979-12-27 | 1979-12-27 | Manufacturing method of magnetron cathode body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6057653B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110676137B (en) * | 2019-09-16 | 2022-05-27 | 九江学院 | Preparation method of cathode for magnetron |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52137968A (en) * | 1976-05-14 | 1977-11-17 | Hitachi Ltd | Preparation for magnetron cathode construction |
-
1979
- 1979-12-27 JP JP54169238A patent/JPS6057653B2/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52137968A (en) * | 1976-05-14 | 1977-11-17 | Hitachi Ltd | Preparation for magnetron cathode construction |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5693246A (en) | 1981-07-28 |
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