JP2775261B2 - Manufacturing method of cathode - Google Patents

Manufacturing method of cathode

Info

Publication number
JP2775261B2
JP2775261B2 JP63119350A JP11935088A JP2775261B2 JP 2775261 B2 JP2775261 B2 JP 2775261B2 JP 63119350 A JP63119350 A JP 63119350A JP 11935088 A JP11935088 A JP 11935088A JP 2775261 B2 JP2775261 B2 JP 2775261B2
Authority
JP
Japan
Prior art keywords
sintered body
main
round bar
cathode
sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63119350A
Other languages
Japanese (ja)
Other versions
JPH01292730A (en
Inventor
慶祐 中野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHINNIPPON MUSEN KK
Original Assignee
SHINNIPPON MUSEN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHINNIPPON MUSEN KK filed Critical SHINNIPPON MUSEN KK
Priority to JP63119350A priority Critical patent/JP2775261B2/en
Publication of JPH01292730A publication Critical patent/JPH01292730A/en
Application granted granted Critical
Publication of JP2775261B2 publication Critical patent/JP2775261B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、マイクロ波電子管などに用いる高融点金属
粉末焼結体陰極の製造方法に関する。
Description: TECHNICAL FIELD The present invention relates to a method for producing a high-melting-point metal powder sintered body cathode used for a microwave electron tube or the like.

〔従来の技術〕 従来、この種焼結体陰極の製造には、高融点金属粉末
または高融点金属粉末と電子放射性物質を混合したもの
をプレス成形し、プレス成形した成形体を、機械加工で
きる硬度にするために、還元性雰囲気もしくは真空中に
おいて約1200℃で約15分間仮焼結し、仮焼結した状態で
所定の寸法の円筒状に機械加工し、その後、第4図に示
すように、円筒状に機械加工した仮焼結体1を炉のステ
ージ4に載置し、還元性雰囲気もしくは真空中において
2000℃で約1時間本焼結する方法を採ってきた。なお、
高融点金属粉末のみを焼結した場合には、本焼結後に電
子放射性物質を含浸させる。
[Prior art] Conventionally, in the production of this kind of sintered compact cathode, press molding of a high melting point metal powder or a mixture of a high melting point metal powder and an electron emitting substance can be performed, and the pressed molded body can be machined. In order to obtain the hardness, it is pre-sintered at about 1200 ° C. for about 15 minutes in a reducing atmosphere or vacuum, and machined into a cylinder having a predetermined size in the pre-sintered state, and then as shown in FIG. Then, the pre-sintered body 1 machined into a cylindrical shape is placed on the stage 4 of a furnace, and is placed in a reducing atmosphere or
The method of main sintering at 2000 ° C. for about 1 hour has been adopted. In addition,
When only the high melting point metal powder is sintered, an electron emitting material is impregnated after the main sintering.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

上記のような従来の製造方法では、本焼結のとき、仮
焼結体1の炉のステージ4と接触している部分において
他の部分より多くの熱の逃げが発生し、該部分で真円度
が悪くなったり、上下で収縮率が違ってきて、大きな変
形が生ずるという問題があった。
In the conventional manufacturing method as described above, at the time of main sintering, more heat escapes in the portion of the pre-sintered body 1 that is in contact with the stage 4 of the furnace than in other portions, and the true sintering is performed in this portion. There has been a problem that the degree of circularity deteriorates or the shrinkage ratio differs between the upper and lower portions, resulting in large deformation.

本発明は上記の問題を解消するためになされたもの
で、本焼結時に変形の起こらない方法を提供することを
目的とする。
The present invention has been made to solve the above problems, and has as its object to provide a method that does not cause deformation during main sintering.

〔課題を解決するための手段〕[Means for solving the problem]

本発明は、円筒状の仮焼結体の中空に、本発明の際、
仮焼結体の収縮した内径より、熱膨張した外径がわずか
に大きくなる高融点金属製の丸棒を挿入し、仮焼結体が
本焼結を行う炉のステージに直接接触しないように、丸
棒を配置して本焼結を行うことを特徴とするものであ
る。
The present invention, in the hollow of the cylindrical temporary sintered body, in the case of the present invention,
Insert a round bar made of high melting point metal whose thermal expansion outside diameter is slightly larger than the contracted inner diameter of the pre-sintered body, so that the pre-sintered body does not directly contact the stage of the furnace for main sintering. The main sintering is performed by disposing a round bar.

〔作用〕[Action]

上記のようにして、本焼結を行うと、各部分からの熱
の逃げが均一になるとともに、焼結体の中空部が収縮す
る際、焼結体の中空の内壁が丸棒に密着し、真円度が良
好に保たれ、上下部分で寸法差が生ずることがない。
When the main sintering is performed as described above, the escape of heat from each part becomes uniform, and when the hollow part of the sintered body contracts, the hollow inner wall of the sintered body adheres to the round bar. Good roundness is maintained, and there is no dimensional difference between the upper and lower portions.

〔実施例〕〔Example〕

第1図は本発明における本焼結時の仮焼結体の保持方
法の一例を示す。
FIG. 1 shows an example of a method for holding a temporarily sintered body during the main sintering in the present invention.

タングステン粉末と約10%の電子放射性物質の酸化ト
リウムを混合してプレス成形し、約1000℃で約10分間仮
焼結し、内径約16mm,外径約18mm,高さ約15mmの円筒状に
機械加工した仮焼結体1の中空にモリブデン製丸棒2を
挿入し、このモリブデン製丸棒2をモリブデン製の台3
に固定し、この台3を水素炉のステージ4に設置し、仮
焼結体1が直接水素炉のステージ4に接触しないように
配置し約2000℃で約1時間本焼結を行う。
Tungsten powder and about 10% of thorium oxide, an electron-emitting substance, are mixed and press-molded. The molybdenum round bar 2 is inserted into the hollow of the machined temporary sintered body 1 and the molybdenum round bar 2 is inserted into the molybdenum base 3.
The stage 3 is placed on a stage 4 of a hydrogen furnace, and the pre-sintered body 1 is arranged so as not to directly contact the stage 4 of the hydrogen furnace, and the main sintering is performed at about 2000 ° C. for about 1 hour.

モリブデン丸棒2の焼結中の熱膨張率は2000℃で約1.
5%であり、仮焼結体1の焼結中の熱膨張率は2000℃で
約1.1%である。また、仮焼結体1の焼結後の収縮率が
約2%であることを考え、モリブデン製丸棒の外径は、
仮焼結体1の内壁との間に約0.4mmの隙間ができるよう
に設定しておく。
The coefficient of thermal expansion during sintering of the molybdenum round bar 2 is about 1.
The coefficient of thermal expansion during sintering of the pre-sintered body 1 is about 1.1% at 2000 ° C. Also, considering that the shrinkage rate of the pre-sintered body 1 after sintering is about 2%, the outer diameter of the molybdenum round bar is
It is set so as to have a gap of about 0.4 mm between the inner wall of the temporary sintered body 1.

焼結中は、仮焼結体1の内壁がモリブデン製丸棒2の
外周に密着することによって、上下で収縮差が生じた
り、真円度が悪くなることは全くなくなる。
During sintering, the inner wall of the pre-sintered body 1 comes into close contact with the outer periphery of the round bar 2 made of molybdenum, so that there is no difference in shrinkage between the upper and lower portions and the roundness is not deteriorated at all.

焼結体に比べモリブデンの熱膨張率が大きいために、
冷却後には円筒状の焼結体の中空内壁とモリブデン製丸
棒2の表面との間に約0.05mmの隙間が生じ、焼結体を丸
棒2から容易に取り外すことができる。
Because the coefficient of thermal expansion of molybdenum is larger than that of a sintered body,
After cooling, a gap of about 0.05 mm is formed between the hollow inner wall of the cylindrical sintered body and the surface of the round bar 2 made of molybdenum, and the sintered body can be easily removed from the round bar 2.

本焼結後に電子放射性物質を含浸させる場合は、タン
グステン粉末のみをプレス加工して成形し、仮焼結、機
械加工、本焼結した後、酸化バリウムを主成分とする酸
化物の混合物を塗布し、水素炉において約1500℃で融解
させて含浸させる。この際、焼結体の表面に付着した余
剰の電子放射性物質は、冷却後除去する。
When impregnating with an electron-emitting substance after the main sintering, press-forming only tungsten powder, molding, pre-sintering, machining, and main-sintering, then applying a mixture of oxides mainly composed of barium oxide Then, it is melted and impregnated at about 1500 ° C. in a hydrogen furnace. At this time, surplus electron-emitting material adhering to the surface of the sintered body is removed after cooling.

なお、外径約8mm、内径約5mm、高さ約8mmの円筒状に
機械加工した仮焼結体1の場合、モリブデン製丸棒2の
外径を、仮焼結体1の内壁との間に約0.2mmの隙間がで
きる寸法にすると、良結果が得られた。
In the case of the temporary sintered body 1 machined into a cylindrical shape having an outer diameter of about 8 mm, an inner diameter of about 5 mm, and a height of about 8 mm, the outer diameter of the molybdenum round bar 2 is set between the inner wall of the temporary sintered body 1 Good results were obtained when the gap was about 0.2 mm.

第2図は本発明の方法による陰極の一例の真円度と内
径寸法の基準値からの差の実測値を、第3図は従来の方
法による陰極の対応する実測値を示す。
FIG. 2 shows the measured values of the difference between the roundness and the inner diameter of the example of the cathode according to the method of the present invention from the reference value, and FIG. 3 shows the corresponding measured values of the cathode according to the conventional method.

従来の方法によるものでは、炉のステージ4に接触す
る下部で真円度が特に悪く、また、上下において内径寸
法の差が大きいが、本発明の方法によるものでは、上記
欠点は殆んど改善されていることがわかる。
According to the conventional method, the roundness is particularly poor in the lower part in contact with the stage 4 of the furnace, and there is a large difference in the inner diameter between the upper and lower parts. You can see that it is done.

〔発明の効果〕〔The invention's effect〕

以上説明したように、本発明によれば、全ての部分で
真円度が良好で、全ての部分で寸法が均一な円筒状陰極
が得られ、電子管の特性向上に寄与する効果が大であ
る。
As described above, according to the present invention, it is possible to obtain a cylindrical cathode having good circularity in all portions and uniform dimensions in all portions, and has a large effect of contributing to the improvement of the characteristics of the electron tube. .

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明における本焼結時の仮焼結体の保持方法
の一例を示す説明図、第2図は本発明の方法による陰極
の一例の真円度と内径寸法の基準値からの差の実測値を
示すグラフ、第3図は従来の方法による陰極の第2図の
実測値に対応する実測値を示すグラフ、第4図は従来の
方法における本焼結時の仮焼結体の保持方法の一例を示
す説明図である。 1…仮焼結体、2…モリブデン製丸棒、3…モリブデン
製台、4…炉のステージ、 なお図中同一符号は同一または相当する部分を示す。
FIG. 1 is an explanatory view showing an example of a method of holding a pre-sintered body at the time of main sintering in the present invention, and FIG. FIG. 3 is a graph showing actual measured values of the difference, FIG. 3 is a graph showing actual measured values corresponding to the actual measured values of FIG. 2 of the cathode according to the conventional method, and FIG. FIG. 4 is an explanatory diagram showing an example of a holding method of FIG. DESCRIPTION OF SYMBOLS 1 ... Temporary sinter, 2 ... Molybdenum round bar, 3 ... Molybdenum base, 4 ... Furnace stage In the figure, the same code | symbol shows the same or corresponding part.

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】高融点金属粉末と電子放射性物質を混合し
てプレス成形し、プレス成形した成形体を還元性雰囲気
もしくは真空中において本焼結温度より低い温度で機械
加工に耐える硬度に仮焼結し、該仮焼結体を所望の円筒
状に機械加工し、還元性雰囲気もしくは真空中において
本焼結する陰極の製造方法において、 前記円筒状の仮焼結体の中空に、本焼結の際、前記仮焼
結体の収縮した内径より、熱膨張した外径がわずかに大
きくなる高融点金属製の丸棒を挿入し、 前記仮焼結体が本焼結を行う炉のステージに直接接触し
ないように、前記丸棒を配置して本焼結を行うことを特
徴とする陰極の製造方法。
1. A high-melting metal powder and an electron-emitting substance are mixed and press-molded, and the pressed body is calcined in a reducing atmosphere or vacuum to a hardness that can withstand machining at a temperature lower than the main sintering temperature. In the method for manufacturing a cathode, the pre-sintered body is machined into a desired cylindrical shape and then main-sintered in a reducing atmosphere or in a vacuum. At this time, insert a round bar made of a high melting point metal whose outer diameter is slightly larger than the contracted inner diameter of the pre-sintered body, and the pre-sintered body is subjected to main sintering. A method for producing a cathode, comprising arranging the round bar so as not to make direct contact and performing main sintering.
【請求項2】高融点金属粉末をプレス形成し、プレス成
形した成型体を還元性雰囲気もしくは真空中において本
焼結温度より低い温度で機械加工に耐える硬度に仮焼結
し、該仮焼結体を所望の円筒状に機械加工し、還元性雰
囲気もしくは真空中において本焼結し、該本焼結体に電
子放射性物質を含浸させる陰極の製造方法において、 前記円筒状の仮焼結体の中空に、本焼結の際、前記仮焼
結体の収縮した内径より、熱膨張した外径がわずかに大
きくなる高融点金属製の丸棒を挿入し、 前記仮焼結体が本焼結を行う炉のステージに直接接触し
ないように、前記丸棒を配置して本焼結を行うことを特
徴とする陰極の製造方法。
2. A high-melting metal powder is press-formed, and the press-formed body is pre-sintered in a reducing atmosphere or vacuum at a temperature lower than the main sintering temperature to a hardness that can withstand machining. The body is machined into a desired cylindrical shape, main-sintered in a reducing atmosphere or vacuum, and a method for producing a cathode in which the main sintered body is impregnated with an electron-emitting substance. At the time of the main sintering, a round bar made of a high melting point metal having a thermally expanded outer diameter slightly larger than the contracted inner diameter of the temporary sintered body is inserted into the hollow. A method for producing a cathode, comprising arranging the round bar so as not to directly contact a stage of a furnace for performing the sintering.
JP63119350A 1988-05-18 1988-05-18 Manufacturing method of cathode Expired - Lifetime JP2775261B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63119350A JP2775261B2 (en) 1988-05-18 1988-05-18 Manufacturing method of cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63119350A JP2775261B2 (en) 1988-05-18 1988-05-18 Manufacturing method of cathode

Publications (2)

Publication Number Publication Date
JPH01292730A JPH01292730A (en) 1989-11-27
JP2775261B2 true JP2775261B2 (en) 1998-07-16

Family

ID=14759314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63119350A Expired - Lifetime JP2775261B2 (en) 1988-05-18 1988-05-18 Manufacturing method of cathode

Country Status (1)

Country Link
JP (1) JP2775261B2 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6353618A (en) * 1986-08-22 1988-03-07 Mitsubishi Heavy Ind Ltd Joy stick lever device

Also Published As

Publication number Publication date
JPH01292730A (en) 1989-11-27

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