JPS6057302A - 埋め込み型光導波回路の製造方法 - Google Patents
埋め込み型光導波回路の製造方法Info
- Publication number
- JPS6057302A JPS6057302A JP58164228A JP16422883A JPS6057302A JP S6057302 A JPS6057302 A JP S6057302A JP 58164228 A JP58164228 A JP 58164228A JP 16422883 A JP16422883 A JP 16422883A JP S6057302 A JPS6057302 A JP S6057302A
- Authority
- JP
- Japan
- Prior art keywords
- refractive index
- substrate
- ion exchange
- glass
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000758 substrate Substances 0.000 claims abstract description 63
- 238000005342 ion exchange Methods 0.000 claims abstract description 46
- 239000011521 glass Substances 0.000 claims abstract description 42
- 150000002500 ions Chemical class 0.000 claims abstract description 37
- 230000005684 electric field Effects 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 26
- 230000000873 masking effect Effects 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 2
- 241000255789 Bombyx mori Species 0.000 claims 1
- 229910052801 chlorine Inorganic materials 0.000 claims 1
- 239000000460 chlorine Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 5
- 230000003405 preventing effect Effects 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 description 17
- 238000009826 distribution Methods 0.000 description 14
- 230000007423 decrease Effects 0.000 description 8
- 239000000835 fiber Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 239000013307 optical fiber Substances 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 4
- 239000003513 alkali Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 3
- 229910052939 potassium sulfate Inorganic materials 0.000 description 3
- 235000011151 potassium sulphates Nutrition 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- YTQVHRVITVLIRD-UHFFFAOYSA-L thallium sulfate Chemical compound [Tl+].[Tl+].[O-]S([O-])(=O)=O YTQVHRVITVLIRD-UHFFFAOYSA-L 0.000 description 3
- 229940119523 thallium sulfate Drugs 0.000 description 3
- 229910000374 thallium(I) sulfate Inorganic materials 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 239000006121 base glass Substances 0.000 description 2
- 239000004927 clay Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 235000010333 potassium nitrate Nutrition 0.000 description 2
- -1 thallium ion Chemical class 0.000 description 2
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 2
- 229960001763 zinc sulfate Drugs 0.000 description 2
- 229910000368 zinc sulfate Inorganic materials 0.000 description 2
- 101100023547 Magnetospirillum gryphiswaldense (strain DSM 6361 / JCM 21280 / NBRC 15271 / MSR-1) mm22 gene Proteins 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 210000004243 sweat Anatomy 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 150000003608 titanium Chemical class 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58164228A JPS6057302A (ja) | 1983-09-08 | 1983-09-08 | 埋め込み型光導波回路の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58164228A JPS6057302A (ja) | 1983-09-08 | 1983-09-08 | 埋め込み型光導波回路の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6057302A true JPS6057302A (ja) | 1985-04-03 |
| JPH0244041B2 JPH0244041B2 (enrdf_load_stackoverflow) | 1990-10-02 |
Family
ID=15789102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58164228A Granted JPS6057302A (ja) | 1983-09-08 | 1983-09-08 | 埋め込み型光導波回路の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6057302A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62119505A (ja) * | 1985-11-20 | 1987-05-30 | Fujitsu Ltd | 光導波路デイバイスの形成方法 |
| US6245239B1 (en) | 1998-10-09 | 2001-06-12 | Zenon Environmental Inc. | Cyclic aeration system for submerged membrane modules |
| US6550747B2 (en) | 1998-10-09 | 2003-04-22 | Zenon Environmental Inc. | Cyclic aeration system for submerged membrane modules |
| US6706189B2 (en) | 1998-10-09 | 2004-03-16 | Zenon Environmental Inc. | Cyclic aeration system for submerged membrane modules |
| US7014173B2 (en) | 1998-10-09 | 2006-03-21 | Zenon Environmental Inc. | Cyclic aeration system for submerged membrane modules |
| US7022236B2 (en) | 2002-12-05 | 2006-04-04 | Zenon Environmental Inc. | Membrane bioreactor, process and aerator |
-
1983
- 1983-09-08 JP JP58164228A patent/JPS6057302A/ja active Granted
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62119505A (ja) * | 1985-11-20 | 1987-05-30 | Fujitsu Ltd | 光導波路デイバイスの形成方法 |
| US7347942B2 (en) | 1998-10-09 | 2008-03-25 | Zenon Technology Partnership | Cyclic aeration system for submerged membrane modules |
| US6550747B2 (en) | 1998-10-09 | 2003-04-22 | Zenon Environmental Inc. | Cyclic aeration system for submerged membrane modules |
| US6706189B2 (en) | 1998-10-09 | 2004-03-16 | Zenon Environmental Inc. | Cyclic aeration system for submerged membrane modules |
| US6881343B2 (en) | 1998-10-09 | 2005-04-19 | Zenon Environmental Inc. | Cyclic aeration system for submerged membrane modules |
| US7014173B2 (en) | 1998-10-09 | 2006-03-21 | Zenon Environmental Inc. | Cyclic aeration system for submerged membrane modules |
| US7186343B2 (en) | 1998-10-09 | 2007-03-06 | Zenon Technology Partnership | Cyclic aeration system for submerged membrane modules |
| US7198721B2 (en) | 1998-10-09 | 2007-04-03 | Zenon Technology Partnership | Cyclic aeration system for submerged membrane modules |
| US6245239B1 (en) | 1998-10-09 | 2001-06-12 | Zenon Environmental Inc. | Cyclic aeration system for submerged membrane modules |
| US7625491B2 (en) | 1998-10-09 | 2009-12-01 | Zenon Technology Partnership | Cyclic aeration system for submerged membrane modules |
| US7820050B2 (en) | 1998-10-09 | 2010-10-26 | Zenon Technology Partnership | Cyclic aeration system for submerged membrane modules |
| US7922910B2 (en) | 1998-10-09 | 2011-04-12 | Zenon Technology Partnership | Cyclic aeration system for submerged membrane modules |
| US7022236B2 (en) | 2002-12-05 | 2006-04-04 | Zenon Environmental Inc. | Membrane bioreactor, process and aerator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0244041B2 (enrdf_load_stackoverflow) | 1990-10-02 |
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