JPS60500502A - Method for manufacturing optical components and optical components - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] The present invention relates to a method of manufacturing an optical component and an optical component. optical components and It is known that synthetic plastic materials are used, and these plastics The materials are characterized by their heat resistance, mechanical impact resistance, low production costs, light weight, and design flexibility. superior to traditional glasses and crystalline materials. However, the plastic material are susceptible to surface damage due to abrasion, scratching, and other degrading conditions.

Dip-coating a scratch-resistant transparent layer as a protective layer on the surface of such plastic materials, purple It is also known to coat by external polymerization, varnishing, etc. However, this The formation of a protective layer not only increases the number of steps, but also increases the thickness non-uniformity in the final product. This results in uneven adhesion to the gel material of the plastic support during curing, and furthermore, New problems arise, such as the generally high cost of achieving industrially producible efficiencies. . In addition, the protective layer is limited to specific plastics and is directly attached to the metal mirror finish coating layer. As it is attached, many problems arise.

When used as optical materials, many of them have abrasion resistance on plastic supports. It is necessary to apply a mirror finish coating layer.

The method of forming such a wear-resistant mirror finish coating is to use chrome or nickel. A hard reflective metal such as a transparent or opaque plastic material Fl (usually acryloni electrochemical vapor deposition method on the front surface of There are several other methods. The above methods are very costly and have drawbacks in productivity. A mirror-like product with lower reflective power than conventional silver or aluminum reflective surfaces. Even when using a manufactured base material, when multiple metal layers are formed by electroplating. The formed mirror surface may undergo electrolytic corrosion depending on the environment. As yet another method, A protective layer with a certain degree of abrasion resistance can be pre-prepared using costly wet chemical processing methods. Separately coat the transparent plastic substrate with Another method is to thermally evaporate aluminum. Products manufactured using this method are typically flat plates. The above-mentioned coating method is limited by the size and configuration of the plastic substrate, and multi-stage manufacturing Because it involves a manufacturing process, it is very costly.

Metal vacuum (vacuum) vapor deposition on untreated plastic material followed by wet chemical coating A method of imparting wear resistance is also known, but it is still expensive and requires optical defects. The points are raw.

It is an object of the invention to overcome the above-mentioned problems and disadvantages.

One of the objects of the present invention is an optical structure made of plastic material with specular properties. The method of manufacturing parts consists of hard glass or a substance with properties similar to hard glass. The process of applying a surface layer to the plastic material and then forming a chain surface layer of reflective material. and adhering to the surface layer.

The above plastic material may be degreased prior to the process of applying the surface layer. is preferable. This degreasing process involves cleaning the plastic material in a fluorocarbon solvent. This is done by vapor degreasing and subsequent transfer into an ultrahigh frequency vibration solution of the same solvent.

Preferably, after the above degreasing operation, further molecular cleaning is performed in a vacuum container. Cleaning). After that, the material used as the constituent material of the mirror layer is The surface layer is formed by applying a subbing layer consisting of an oxide of the material to be used. Ru. The subbing layer was placed in a vacuum chamber with an oxygen and argon atmosphere at a pressure of 2 x 10-'' mbar. It is deposited by magnetron sputtering in a container.

Immediately after molecular cleaning, the vacuum vessel was depressurized to 1 x 10-' mbar and argon gas was injected. to bring the pressure to 5X10-' mbar, then add oxygen to bring the pressure to 2X1 mbar. Increase to 0-” mbar.

The undercoat layer is created using magnetron sputtering, targeting the metal to be adhered to. Deposited quickly. The thickness of this subbing layer is preferably 0.5 to 1.0 microns. Let's turn it on.

Thereafter, the mirror layer is applied directly to the undercoat layer, and this application process is performed using DCC magnetron sputtering. -Do it from

As an example of the constituent material of the mirror layer, chromium is used, and in this case the undercoat layer has a thickness of 0. ．． A chromium oxide layer of 5 to 1.0 microns is preferred.

In another embodiment, the mirror layer is comprised of aluminum, in which case the subbing layer has a thickness of 0. ．． A 5-1.0 micron aluminum oxide layer is preferred. The aluminum The specular layer of Ni is composed of a roughly dielectric oxide with a thickness of 0.5 to 5.0 microns. A high abrasion resistant top coat may be applied.

Further examples include calcium carbonate, sodium carbonate, silicon oxide, etc. In-situ ( The surface layer may also be formed by in-situ glass manufacturing. In addition, the above Chemical substances become reactive when bombarded with high-energy electron beams.

The invention also provides an optical component manufactured by the method described above.

Another object of the present invention is to provide an optical component having mirror surface properties made of hard glass. Plastics coated with a surface layer consisting of glass or a material with properties similar to hard glass. a reflective material and a mirror layer made of a reflective material deposited on the surface layer. ing.

Although there are several ways to implement the invention, only one embodiment will be described below.

In this example, the plastic base material mainly consists of bisphenol and phosgene. or manufactured by General Electric Company in the United States under the trademark name “1exan” Seen in the example of the reaction with diphenyl carbonate, a commercially available polycarbonate. , a polycondensation polymer prepared by the reaction of a polyhydroxy compound and a carbonic acid derivative Consists of. Traditional thermoplastic injection molding is used to obtain suitable shapes and dimensions. Simply cut the extruded sheet into the desired shape using a shaping method or precision manufactured extrusion sheet. .

The plastic base material is a fluorocarbon material such as 'Δrklon　''P (ICI>). Steam degreasing for 3 minutes in carbon solvent followed by ultrasonic vibration in the same solvent Transfer to the solution and clean for an additional 3 minutes. Then steam degreasing for another 3 minutes may be done. The plastic substrate is then transferred to a fixed jig in a vacuum container, The next step is carried out under extremely clean conditions.

The vacuum vessel is sealed and the pressure reduced to 1 x 10' mbar. then argon The pressure was increased to 1×10-’ mbar and then the plastic was injected in a vacuum container. An AC voltage of 1.5 kilovolts is applied to the electrodes placed close to the surface of the base material. Start glow discharge. This glow discharge is performed for a maximum of 20 minutes, during which time the The surface of the stick base material is ``molecular clean''. g) is carried out. Due to this cleaning action, the substrate receives the adhesion layer described below. It becomes easier to After molecular cleaning, an oxidation reaction is carried out as follows to deposit the undercoat layer. I will do it especially. The pressure in the vacuum vessel was reduced again to 1 x 10-' mbar and replaced with argon gas. Oxygen is injected to bring the pressure to 5 x 10-' mbar, then oxygen is added to bring the pressure to 2 xio-” increase to mbar.

Then, magnetron tube sputtering is started in a vacuum container with chromium as the target, and it is charged. An undercoating layer made of chromium oxide is applied to polycarbonate by the interaction of chromium atoms and oxygen. evaporated onto the base material. The undercoat layer (deposited layer) thus formed contains one or more types of It consists of chromium oxide and also contains a small amount of chromium itself, and the thickness of this layer is preferably 0. , 5 to 1.0 microns.

Afterwards, the oxygen injection is discontinued and the chromium is treated with conventional DC magnetron sputtering. While gradually increasing the target power density from 4W/cm2 to 12W/cm2 Let's do it. By gradually depositing chromium on the chromium oxide undercoat layer in this way, A coating without residual stress can be applied. Thin films of chromium are susceptible to compressive stress and tensile stress. It is known that it is susceptible to force, so care must be taken at this stage. mirror layer The thickness is typically 0.5-5.0 microns.

As an example of the present invention, a chromium oxide and a multilayer chromium structure have been described. The invention is not limited to the above embodiments.

Other examples include aluminum oxide and a small amount of aluminum as well as the chromium layer. An aluminum undercoat layer consisting of aluminum is formed by sputtering, and this undercoat layer is coated with By coating aluminum, we can manufacture an aluminum mirror surface with even higher reflectivity. can do. When using soft metal as in this example, silicon oxide A hard, wear-resistant finish coat made of a dielectric oxide such as a dielectric compound is applied to a known RF field. It may also be formed by a sputtering method or an electron beam evaporation method. of the finishing coat layer The thickness is typically 0.5-5.0 microns.

In another embodiment, calcium carbonate, sodium carbonate, silicon oxide, etc. In situ ( Glass or glass-like products made by various methods such as in 5 itu) glass manufacturing methods Forms a finishing coat consisting of texture. This method eliminates the traditional calcium/sodium A glass of silica/silicone composition may be applied to the surface of the plastic material. Also, a A glass film and a lead glass film having a lumi/silicon composition may be similarly formed. glass Other methods of depositing the quality layer include using an electron beam to induce evaporation or using a conventional electric heater. There is also a method of vacuum-depositing an already formed glass material such as borosilicate glass.

In addition, so-called glass filled with glass, talc and chalk, or polypropylene materials, etc. Filled plastic materials may also be used. These fillings mainly cost It is used for the purpose of reducing carbon dioxide and improving properties, and co-reacts with other substances in a vacuum, resulting in gas formation. It can improve the bonding strength of the lath undercoat layer.

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Claims (1)

[Claims] (1) Method for manufacturing optical components with specular reflection properties from plastic materials and the plastic material is hard glass or a substance with properties similar to glass. applying a surface layer consisting of a mirror-reflecting material to the surface layer; and applying a layer consisting of a specular reflective material to the surface layer. A method consisting of the steps of: [2] Prior to the step of applying the surface layer, the plastic material is degreased. A method according to claim 1, characterized in that: [3] The degreasing of the plastic material is carried out in a fluorocarbon solvent. This is done by vapor degreasing and then the plastic material is treated with the same fluorocarbon. Claim 2, characterized in that the method is transferred into an ultrahigh frequency vibration solution of a carbon solvent. How to put it on. [4] Performing a molecular cleaning operation on the plastic material after the degreasing operation. The method according to claim 2 or 3, characterized in that: [5] From the oxide of the material used for forming the specular reflective material after the molecular cleaning operation forming the surface layer by applying a subbing layer consisting of the plastic material to the plastic material; The method according to claim 4. [6] The undercoat layer is coated with oxygen and aluminum at a pressure of 2 x 10-' mbar in a vacuum vessel. It is characterized by being deposited by magnetron sputtering method in a Rougon atmosphere. The method according to claim 5. ’ (7) Immediately after the molecular cleaning process, reduce the pressure in the vacuum container to 1 x 101 mbar. At the same time, argon gas was injected to increase the pressure to 5 x 10-4 mbar, and then acid Claims characterized in that the pressure is increased to 2xio-' millibar by adding The method described in section 6. [8] The undercoat layer uses a metal serving as the undercoat layer forming material as a target. Claim 6 or 6, characterized in that the material is deposited by a magnetron sputtering method. is the method described in Section 7. [9] A claim characterized in that the thickness of the undercoat layer is 0.5-i, 0 micron. The method according to item 8. [10] The layer made of the specular reflective material is applied to the undercoat layer. 10. A method according to claim 8 or 9, characterized in that the coating is applied directly. [11] The specular reflective material is deposited by DCC type detonator sputtering method. 11. The method of claim 10, characterized in that: [12] Claim characterized in that the layer made of the specular reflective material is chromium. The method according to item 10 or 11. [13] The undercoat layer is a thin layer made of oxide with a thickness of 0.5 to 1.0 microns. 12. The method according to claim 10 or 11, characterized in that: [14] A claim characterized in that the layer made of the specular reflective material is aluminum. The method according to claim 10 or 11. [15] The undercoat layer is made of aluminum oxide with a thickness of 0.5 to 1.0 microns. 15. A method according to claim 14, characterized in that the layer is thin. [16] A hard wear-resistant finish coating layer is applied to the specularly reflective material layer made of aluminum. 16. A method according to claim 15, characterized in that the method comprises depositing. (17) Abrasion resistance: Is the overcoat layer a dielectric oxide with a thickness of 0.5 to 5.0 microns? 17. The method according to claim 16, characterized in that the method comprises: [18] The surface layer is made of calcium carbonate, sodium carbonate, silicon oxide, etc. In-situ glass co-reacting of key glass manufacturing chemicals under plasma-activated conditions Among claims 1 to 17, the product is formed by a manufacturing method. The method described in any one of the above. [19] The above-mentioned “undercoat layer” has already been prepared using an electron beam or an electric heater to induce evaporation. of the claim characterized in that it is formed directly by vacuum evaporation of the composition glass material. The method according to any one of the ranges 1 to 17. [20] Any of claims 1 to 19 can be obtained by the method described in claim 1. Formed optical components. [21] Optical material with specular reflection properties, including glass or glass-like properties a plastic material having a surface layer made of a substance having a shape; and a plastic material adhered to the surface layer. an optical component consisting of a mirror layer of reflective material;