JPS6046455A - Humidity element - Google Patents

Humidity element

Info

Publication number
JPS6046455A
JPS6046455A JP15525083A JP15525083A JPS6046455A JP S6046455 A JPS6046455 A JP S6046455A JP 15525083 A JP15525083 A JP 15525083A JP 15525083 A JP15525083 A JP 15525083A JP S6046455 A JPS6046455 A JP S6046455A
Authority
JP
Japan
Prior art keywords
film
electrode
permeable
humidity
sensitive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15525083A
Other languages
Japanese (ja)
Inventor
Takao Kariya
苅谷　嵩夫
Kenichi Yamane
山根　賢一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Works Ltd filed Critical Chino Works Ltd
Priority to JP15525083A priority Critical patent/JPS6046455A/en
Publication of JPS6046455A publication Critical patent/JPS6046455A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/048—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance for determining moisture content of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To prevent a humidity element from being disconnected and broken and obtain dustproof effect by forming a vapor-permeable electrode film on both surfaces of a humidity sensitive film, and forming a protective film for the humidity sensitive film and electrodes. CONSTITUTION:Electrodes 2a and 2b are formed of vapor-permeable (water- permeable) metallic thin film, etc., on both surfaces of the humidity sensitive film 1; one electrode 2a is extended and connected to a pin 4a of a base part 7, and the other electrode 2b is connected to a pin 4b through conductive rubber 5. Then, a resistance 8 for adjustment is connected to the base part 7 between the pins 4a and 4c. Protective films 9a and 9b of vaporpermeable (water-permeable) resin, etc., are formed on external surfaces of the humidity sensitive film 1 and electrodes 2a and 2b and the humidity sensitive film 1, etc., are clamped and held between a couple of upper and lower holders 3 with the protective films 9a and 9b between; and the holders 3 are hold by the base part 7.

Description

【発明の詳細な説明】 （１）発明の分野 この発明は、感湿膜を用いた湿度素子に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION (1) Field of the Invention The present invention relates to a humidity element using a moisture-sensitive film.

（２）従来技術 従来２例えば、４ｉ図に示すように、湿度に対して容量
値が変化する感湿膜１の両面に水蒸気透過性（透水性）
の電極２ａ　、　２ｂを形成し、感湿膜１を樹脂材等の
保持体３で挾持し、一方の電極２ａは直接ピン４に接続
し、他方の電極２ｂは導電ゴム５゜ピン（図示せず）に
接続されている。そして感湿膜１を含む保持体３はフィ
ルタ部６ａ、５ｂを有する金属ケース６に密閉され、こ
の金属ケース６は基部７により挾持されでいる。(2) Prior Art Conventional 2 For example, as shown in Figure 4i, both sides of the moisture-sensitive membrane 1 whose capacitance changes with humidity have water vapor permeability (water permeability).
The moisture sensitive membrane 1 is held between a holder 3 made of resin or the like, one electrode 2a is directly connected to the pin 4, and the other electrode 2b is connected to a conductive rubber 5° pin (not shown). ). The holding body 3 containing the moisture sensitive membrane 1 is hermetically sealed in a metal case 6 having filter parts 6a and 5b, and this metal case 6 is held between base parts 7.

このような従来の湿度素子では、金属ケース６のために
堅固であるが、高価で、熱容量が大きく。Although such a conventional humidity element is robust due to the metal case 6, it is expensive and has a large heat capacity.

熱応答性が遅く、正確な湿度測定を行うのに長時間を要
していた。また、直接感湿膜１．電極５ａ。Thermal response was slow, and it took a long time to accurately measure humidity. In addition, direct moisture sensitive membrane 1. Electrode 5a.

６ｂを保持体３で保持していたので、感湿膜１等を破損
することが多く、製造工数も多く要するものだった。6b was held by the holder 3, the moisture sensitive membrane 1 etc. were often damaged, and a large number of manufacturing steps were required.

（３）発明の目的 この発明の目的は１以上の点に鑑み、いっそう信頼性を
向上させた湿度素子を提供することである。(3) Purpose of the Invention The purpose of the present invention is to provide a humidity element with further improved reliability in view of one or more points.

（４）発明の実施例 第２図は、この発明の一実施例を示す断面説明図、第３
図は平面説明図で、第１図と同一符号は同一構成要素を
示す。(4) Embodiment of the invention FIG. 2 is a cross-sectional explanatory diagram showing an embodiment of the invention, and FIG.
The figure is an explanatory plan view, and the same reference numerals as in FIG. 1 indicate the same components.

図において、感湿膜１の両面に水蒸気透過性（透水性）
の金薄膜等の電極２ａ　、　２ｂを形成し、一方の電極
２ａは延出して基部７のピン４ａに接続し。In the figure, both sides of the moisture-sensitive membrane 1 have water vapor permeability (water permeability).
Electrodes 2a and 2b made of a thin gold film or the like are formed, and one electrode 2a extends and connects to the pin 4a of the base 7.

他方の電極２ｂは導電性ゴム５を介してピン４ｂに接続
し、ピン４ａ、４ｃ間に調整用の抵抗８が基部７におい
て接続されている。感湿膜１．電極２ａ、２ｂの外面に
は水蒸気透過性（透水性）の樹脂等の保護膜され、保持
体３は基部７によって保持されている。なお、保持体３
の上下の接合部は熱溶着して一体とされている。The other electrode 2b is connected to a pin 4b via a conductive rubber 5, and an adjustment resistor 8 is connected at the base 7 between the pins 4a and 4c. Moisture sensitive membrane 1. The outer surfaces of the electrodes 2a and 2b are coated with a protective film such as a water vapor permeable (water permeable) resin, and the holder 3 is held by a base 7. Note that the holding body 3
The upper and lower joints are heat welded and integrated.

つまり、この湿度素子の感湿膜１へ、保持体３の穴部３
ａ　、　３ｂ　、保Ｍ膜９ａ　、　９ｂ　、電極２ａ、
２ｂを介して。In other words, the hole 3 of the holder 3 is connected to the humidity sensitive membrane 1 of this humidity element.
a, 3b, M retention film 9a, 9b, electrode 2a,
Via 2b.

水蒸気が到達し、水蒸気量に応じて感湿膜１を挾む電極
’ｌａ　、　２ｂ間の容量値が変化し、この容量値変化
の信号は電極２ａ　、　２ｂ　、ピン４ａ、４ｂ、４ｃ
を介して外部に取り出され、容量測定値から湿度測定値
が得られる。When water vapor arrives, the capacitance value between the electrodes 'la and 2b that sandwich the moisture sensitive membrane 1 changes depending on the amount of water vapor, and the signal of this capacitance value change is sent to the electrodes 2a, 2b, pins 4a, 4b, and 4c.
The humidity measurement value is obtained from the capacitance measurement value.

このように金属ケースを用いないため熱容量が小さく、
熱応答性が良好で、保護膜９ａ、９ｂは感湿膜１．電極
２ａ　、　２ｂ全体を保護しているので切断。Since no metal case is used in this way, the heat capacity is small,
The protective films 9a and 9b have good thermal response, and the moisture sensitive films 1. Cut the electrodes 2a and 2b as they are protecting the entirety.

破損のおそれが少なく、保護膜９α、９ｂにより防塵も
行っている。There is little risk of damage, and the protective films 9α and 9b are dust-proof.

（５）発明の要約 以上述べたように、この発明は、感湿膜の両面に水蒸気
透過性の電極膜を形成し、更に感湿膜。(5) Summary of the Invention As described above, the present invention provides a moisture-sensitive membrane in which water vapor permeable electrode films are formed on both sides of the moisture-sensitive membrane.

電極に保護膜を形、成し、この保護膜を介して感湿膜を
保持体に保持させた湿度素子である。This is a humidity element in which a protective film is formed on the electrode, and a humidity sensitive film is held by a holder through the protective film.

（６）発明の効果 フィルタを有する金属ケースを用いていないので、熱応
答性が速く、保護膜を介して感湿膜等を保持体に保持し
ているので、切断、破損のおそれはなく、保護膜により
防塵作用もあり、小型、軽量で、高信頼性であり９作業
性にもすぐれる。(6) Effects of the invention Since a metal case with a filter is not used, the thermal response is fast, and the moisture-sensitive film is held on the holder via a protective film, so there is no risk of cutting or damage. The protective film has a dustproof effect, and it is small, lightweight, highly reliable, and has excellent workability.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、従来例を示す構成説明図、第２図。 第３図は、この発明の一実施例を示す構成説明図である
。 １・−・感湿膜、加、２ｂ・・・電極、３・・・保持体
、４，４ａ４ｂ　、　４ｃ・・・ピン、５・・・導電ゴ
ム、７・・・基’ＦＪ　＋　９”＋９ｂ・・・保護膜 特許出願人　株式会社　千野製作所FIG. 1 is a configuration explanatory diagram showing a conventional example, and FIG. FIG. 3 is a configuration explanatory diagram showing an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1--Moisture-sensitive film, addition, 2b...electrode, 3...holding body, 4,4a4b, 4c...pin, 5...conductive rubber, 7...group 'FJ+9'' +9b...Protective film patent applicant Chino Seisakusho Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] １、　両面に水蒸気透過性の電極膜が形成された感湿膜
と、前記感湿膜または電極膜の少なくとも一方に形成さ
れた水蒸気透過性の保護膜と、この保護膜を介して前記
感湿膜を保持する保持体とを備えたことを特徴とする湿
度素子。1. A moisture-sensitive membrane having water vapor-permeable electrode films formed on both sides, a water-vapor-permeable protective film formed on at least one of the moisture-sensitive film or the electrode film, and the moisture-sensitive film formed on both sides of the moisture-sensitive film. A humidity element comprising a holder for holding a membrane.
JP15525083A 1983-08-25 1983-08-25 Humidity element Pending JPS6046455A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15525083A JPS6046455A (en) 1983-08-25 1983-08-25 Humidity element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15525083A JPS6046455A (en) 1983-08-25 1983-08-25 Humidity element

Publications (1)

Publication Number Publication Date
JPS6046455A true JPS6046455A (en) 1985-03-13

Family

ID=15601813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15525083A Pending JPS6046455A (en) 1983-08-25 1983-08-25 Humidity element

Country Status (1)

Country Link
JP (1) JPS6046455A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5756746A (en) * 1980-09-24 1982-04-05 Hitachi Ltd Humidity sensitive semiconductor element
JPS5782760A (en) * 1980-07-09 1982-05-24 Commissariat Energie Atomique Capacitive hyglometer and making thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5782760A (en) * 1980-07-09 1982-05-24 Commissariat Energie Atomique Capacitive hyglometer and making thereof
JPS5756746A (en) * 1980-09-24 1982-04-05 Hitachi Ltd Humidity sensitive semiconductor element

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