JPH04244952A - Humidity sensor - Google Patents
Humidity sensorInfo
- Publication number
- JPH04244952A JPH04244952A JP2909691A JP2909691A JPH04244952A JP H04244952 A JPH04244952 A JP H04244952A JP 2909691 A JP2909691 A JP 2909691A JP 2909691 A JP2909691 A JP 2909691A JP H04244952 A JPH04244952 A JP H04244952A
- Authority
- JP
- Japan
- Prior art keywords
- thermistor
- humidity
- humidity sensor
- electrodes
- connector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 239000010409 thin film Substances 0.000 claims description 7
- 238000009423 ventilation Methods 0.000 claims description 4
- 239000010408 film Substances 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 3
- 239000012528 membrane Substances 0.000 abstract 1
- 238000005476 soldering Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、雰囲気の湿度を精度よ
く検出するための湿度センサに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a humidity sensor for accurately detecting atmospheric humidity.
【０００２】0002
【従来の技術】従来の湿度センサには、別途準備した感
湿素子と温度補償用サーミスタとコネクタとを配線基板
上にハンダ付け等により取り付けて組立て、感湿素子を
通気性ケース内に収容したものがあるが、部品点数やハ
ンダ付箇所が多いためにどうしても大型となり、また重
量が大きくなることは避けられなかった。[Prior Art] A conventional humidity sensor is assembled by attaching a separately prepared humidity sensing element, a temperature compensation thermistor, and a connector onto a wiring board by soldering, etc., and housing the humidity sensing element in a breathable case. However, due to the large number of parts and soldering points, it was inevitably large and heavy.
【０００３】これら問題点解決の一環として、温度補償
用サーミスタを配線基板上に直接印刷し焼付けて形成す
ることにより小型化を図る方法が試みられた（たとえば
特開昭６１−１１００４１など）。しかし、この方法で
はサーミスタの抵抗値がバラついて不良率が高く、また
耐熱性や耐湿性も充分でないため長期の安定性に不安が
あり、湿度センサとして実用するには不適当なものであ
った。As part of the solution to these problems, attempts have been made to reduce the size of the temperature-compensating thermistor by printing and baking it directly onto the wiring board (for example, Japanese Patent Laid-Open No. 110041/1983). However, with this method, the resistance value of the thermistor varied and the defect rate was high, and the heat resistance and humidity resistance were not sufficient, leading to concerns about long-term stability, making it unsuitable for practical use as a humidity sensor. .
【０００４】0004
【発明が解決しようとする課題】本発明は上述のような
従来技術の問題点を解決して、部品数が少くて容易に組
立てることができ、軽量小型で低コストのコネクタ一体
型湿度センサを提供することを目的としている。[Problems to be Solved by the Invention] The present invention solves the problems of the prior art as described above, and provides a connector-integrated humidity sensor that has a small number of parts, can be easily assembled, is lightweight, small, and low cost. is intended to provide.
【０００５】[0005]
【課題を解決するための手段】上記の目的を達成するた
め、本発明の湿度センサは絶縁基板面上に１対の薄層電
極を並設し更に該電極上に湿度に応じて電気抵抗が変化
する感湿薄膜を積層した板状の感湿素子と、該基板に固
着した３個のコネクタ端子と、温度補償用サーミスタと
を備え、該コネクタ端子の第１には該電極の一方を、ま
た該コネクタ端子の第２には該電極の他方と該サーミス
タの一方の端子とを、更に該コネクタ端子の第３には該
サーミスタの他方の端子をそれぞれ接続して構成されて
いる。[Means for Solving the Problems] In order to achieve the above object, the humidity sensor of the present invention has a pair of thin layer electrodes arranged side by side on the surface of an insulating substrate, and further has an electric resistance on the electrodes depending on the humidity. A plate-shaped humidity sensing element made of a laminated humidity sensitive thin film that changes, three connector terminals fixed to the substrate, and a temperature compensation thermistor, the first of the connector terminals having one of the electrodes, Further, the second of the connector terminals is connected to the other of the electrodes and one of the terminals of the thermistor, and the third of the connector terminals is connected to the other terminal of the thermistor.
【０００６】本発明の湿度センサにおいては、感湿素子
部を保護する手段として、透湿性の保護膜で感湿薄膜を
覆う方法を採用すると、厚さを殆ど変えずに耐久性を改
善することができる利点があり、また通気孔を設けたカ
バーを被着することにより一層安全性を高めることがで
きる。更に絶縁基板上の１対の薄層電極をそれぞれ櫛形
として互に歯と歯が噛み合うように配置することにより
、感湿素子部を一層小型化することが可能である。In the humidity sensor of the present invention, if a method of covering the moisture-sensitive thin film with a moisture-permeable protective film is adopted as a means for protecting the humidity-sensing element portion, durability can be improved with almost no change in thickness. This has the advantage of being able to provide ventilation, and safety can be further improved by attaching a cover with ventilation holes. Furthermore, by arranging the pair of thin layer electrodes on the insulating substrate in a comb shape so that their teeth mesh with each other, it is possible to further reduce the size of the moisture sensing element section.
【０００７】また、本発明の湿度センサにおいて用いら
れる温度補償用サーミスタとしてはリード型サーミスタ
やチップ型サーミスタなど適宜の形状のものを選択する
ことができるが、特性が揃った小型のものであればどの
ような形態のものであっても構わない。Further, as the temperature compensating thermistor used in the humidity sensor of the present invention, a thermistor of an appropriate shape such as a lead type thermistor or a chip type thermistor can be selected, but any small type with uniform characteristics can be selected. It does not matter what form it takes.
【０００８】[0008]
【作用】本発明の湿度センサは、雰囲気中の湿度変化に
対応して水分を吸収または放出し、それに伴って電気抵
抗が変化する感湿素子と、別途に製造された温度補償用
サーミスタとを結合して構成してあるので、湿度に対応
した安定な出力が得られ、精度の高い相対湿度測定値を
得ることができる。又小型であって感湿素子とサーミス
タが近接して設けられており、局部的な湿度を精度よく
測ることもできる。[Operation] The humidity sensor of the present invention includes a humidity sensing element that absorbs or releases moisture in response to changes in humidity in the atmosphere, and whose electrical resistance changes accordingly, and a separately manufactured temperature compensation thermistor. Since they are combined, a stable output corresponding to humidity can be obtained, and a highly accurate relative humidity measurement value can be obtained. In addition, it is small, and the humidity sensing element and thermistor are placed close to each other, making it possible to accurately measure local humidity.
【０００９】[0009]
【実施例】本発明の実施例について図面を参照して説明
する。第１図において１はアルミナ基板であり、これに
櫛形の電極２ａ，２ｂとハンダ付用電極接続部４ａ，４
ｂ，４ｃがプリントして形成され、電極２ａは電極接続
部４ａと、また電極２ｂは電極接続部４ｂと電気的に接
続してある。該電極接続部４ａと４ｃとの間隔は温度補
償用リード型サーミスタ５の両端子間距離と略同等の長
さとしてあり、電極接続部４ａ，４ｃにそれぞれサーミ
スタ端子リード線５ａ，５ｂがハンダ付してある。又該
電極接続部４ａ，４ｂ，４ｃにはそれぞれ基板１に設け
たコネクタ嵌着孔に通ずる貫通孔が設けてあって、コネ
クタ端子６ａ，６ｂ，６ｃをこれに嵌着したうえハンダ
付してある。前記サーミスタ端子リード線５ａのハンダ
付部とコネクタ端子６ａのハンダ付部の貫通孔とは同じ
電極接続部４ａにあって近接して設けられており、ハン
ダ付作業は同時に１回ですませることが可能になってい
る。このことは反対側の電極接続部４ｃでも同様になっ
ている。Embodiments Examples of the present invention will be described with reference to the drawings. In FIG. 1, 1 is an alumina substrate, on which comb-shaped electrodes 2a, 2b and electrode connection parts 4a, 4 for soldering are attached.
b and 4c are formed by printing, and the electrode 2a is electrically connected to the electrode connection part 4a, and the electrode 2b is electrically connected to the electrode connection part 4b. The distance between the electrode connecting parts 4a and 4c is approximately the same length as the distance between both terminals of the temperature compensation lead type thermistor 5, and thermistor terminal lead wires 5a and 5b are soldered to the electrode connecting parts 4a and 4c, respectively. It has been done. The electrode connecting portions 4a, 4b, and 4c are each provided with a through hole that communicates with a connector fitting hole provided in the substrate 1, and the connector terminals 6a, 6b, and 6c are fitted into these holes and soldered. be. The soldering part of the thermistor terminal lead wire 5a and the through hole of the soldering part of the connector terminal 6a are located in the same electrode connection part 4a and are provided close to each other, so that the soldering work can be done only once at the same time. It is now possible. This also applies to the electrode connection portion 4c on the opposite side.
【００１０】上記の如く組立てたのち、絶縁基板１上の
櫛形電極２ａ，２ｂの上面を覆うように感湿高分子塗料
を塗布して感湿薄膜３を形成し、更に該感湿薄膜３を被
覆する保護膜７を設けて、本発明の湿度センサが得られ
る。更に、これに通気孔を設けたカバー８を被着して第
２図に示すような製品となる。又本発明の湿度センサの
回路図を第３図に示す。After assembling as described above, a moisture-sensitive polymer paint is applied to cover the upper surfaces of the comb-shaped electrodes 2a and 2b on the insulating substrate 1 to form a moisture-sensitive thin film 3. By providing the covering protective film 7, the humidity sensor of the present invention is obtained. Furthermore, a cover 8 provided with ventilation holes is attached to this, resulting in a product as shown in FIG. 2. Further, a circuit diagram of the humidity sensor of the present invention is shown in FIG.
【００１１】[0011]
【発明の効果】本発明の湿度センサは絶縁基板上に薄層
電極と感湿薄膜とを積層して形成した感湿素子に対し、
該基板に温度補償用サーミスタとコネクタ端子とを直接
とりつけた構造となっているため、部品点数が少なく材
料、組立工数共に節約できるばかりでなく、信頼性が高
く小型軽量とすることができる。[Effects of the Invention] The humidity sensor of the present invention has a humidity sensing element formed by laminating a thin layer electrode and a humidity sensitive thin film on an insulating substrate.
Since the temperature compensating thermistor and the connector terminal are directly attached to the board, the number of parts is small, which not only saves on materials and assembly man-hours, but also makes it highly reliable, small and lightweight.
【００１２】又感湿部と温度補償用サーミスタとが近接
して存在するため湿度変化の大きな気体中でも精度のよ
い測定値をうることができる。Furthermore, since the humidity sensing section and the temperature compensating thermistor are located close to each other, highly accurate measurement values can be obtained even in gases with large humidity changes.
【図１】本発明の湿度センサのカバーを外した状態の正
面図である。FIG. 1 is a front view of a humidity sensor of the present invention with a cover removed.
【図２】本発明の湿度センサのカバーを装着した状態の
外観図であって、（ａ）は正面図、（ｂ）は側面図であ
る。FIG. 2 is an external view of the humidity sensor of the present invention with a cover attached, where (a) is a front view and (b) is a side view.
【図３】本発明の湿度センサの回路図である。FIG. 3 is a circuit diagram of a humidity sensor of the present invention.
１ 絶縁基板２ａ
，２ｂ 薄層電極３
感湿薄膜４ａ，４ｂ，４ｃ
電極接続部1 Insulating substrate 2a
, 2b thin layer electrode 3
Moisture sensitive thin film 4a, 4b, 4c
Electrode connection
Claims (4)
し更に該電極上に湿度に応じて電気抵抗が変化する感湿
薄膜を積層した板状の感湿素子と、該基板に固着した３
個のコネクタ端子と、温度補償用サーミスタとを備え、
該コネクタ端子の第１には該電極の一方を、また該コネ
クタ端子の第２には該電極の他方と該サーミスタの一方
の端子とを、更に該コネクタ端子の第３には該サーミス
タの他方の端子を、それぞれ接続してなることを特徴と
する湿度センサ。1. A plate-shaped humidity sensing element comprising a pair of thin layer electrodes arranged side by side on the surface of an insulating substrate, and further laminated on the electrodes a moisture sensitive thin film whose electrical resistance changes depending on humidity, and the substrate. 3 stuck to
Equipped with several connector terminals and a temperature compensation thermistor,
The first of the connector terminals has one of the electrodes, the second of the connector terminal has the other of the electrodes and one terminal of the thermistor, and the third of the connector terminal has the other of the thermistor. A humidity sensor characterized in that the terminals of the above are connected to each other.
る請求項１記載の湿度センサ。2. The humidity sensor according to claim 1, further comprising a moisture-permeable protective film provided on the moisture-sensitive thin film.
噛み合うように配設されてなる請求項１又は２記載の湿
度センサ。3. The humidity sensor according to claim 1, wherein the thin layer electrodes are comb-shaped and arranged so that their teeth mesh with each other.
請求項１ないし３のいづれかに記載の湿度センサ。4. The humidity sensor according to claim 1, further comprising a cover provided with ventilation holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3029096A JP3002276B2 (en) | 1991-01-31 | 1991-01-31 | Humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3029096A JP3002276B2 (en) | 1991-01-31 | 1991-01-31 | Humidity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04244952A true JPH04244952A (en) | 1992-09-01 |
| JP3002276B2 JP3002276B2 (en) | 2000-01-24 |
Family
ID=12266828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3029096A Expired - Fee Related JP3002276B2 (en) | 1991-01-31 | 1991-01-31 | Humidity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3002276B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1273909A1 (en) * | 2001-07-06 | 2003-01-08 | Moletherm Holding AG | Sensor |
| CN100451635C (en) * | 2004-09-08 | 2009-01-14 | 株式会社日本自动车部品综合研究所 | Physical quantity sensor and method for manufacturing the same |
| CN112313507A (en) * | 2018-07-04 | 2021-02-02 | 株式会社村田制作所 | Composite sensor |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20070119756A (en) | 2005-04-15 | 2007-12-20 | 캐논 가부시끼가이샤 | Black toner |
-
1991
- 1991-01-31 JP JP3029096A patent/JP3002276B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1273909A1 (en) * | 2001-07-06 | 2003-01-08 | Moletherm Holding AG | Sensor |
| WO2003004976A3 (en) * | 2001-07-06 | 2004-04-22 | Moletherm Holding Ag | Sensor |
| CN100451635C (en) * | 2004-09-08 | 2009-01-14 | 株式会社日本自动车部品综合研究所 | Physical quantity sensor and method for manufacturing the same |
| CN112313507A (en) * | 2018-07-04 | 2021-02-02 | 株式会社村田制作所 | Composite sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3002276B2 (en) | 2000-01-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19991012 |
|
| LAPS | Cancellation because of no payment of annual fees |