JPS6046045A - ペレツトチヤツク - Google Patents

ペレツトチヤツク

Info

Publication number
JPS6046045A
JPS6046045A JP59152803A JP15280384A JPS6046045A JP S6046045 A JPS6046045 A JP S6046045A JP 59152803 A JP59152803 A JP 59152803A JP 15280384 A JP15280384 A JP 15280384A JP S6046045 A JPS6046045 A JP S6046045A
Authority
JP
Japan
Prior art keywords
pellet
chuck
notches
principle
bernoulli
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59152803A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0377664B2 (enExample
Inventor
Shuichi Ito
伊藤　秋一
Tsutomu Hanno
勉 半野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59152803A priority Critical patent/JPS6046045A/ja
Publication of JPS6046045A publication Critical patent/JPS6046045A/ja
Publication of JPH0377664B2 publication Critical patent/JPH0377664B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP59152803A 1984-07-25 1984-07-25 ペレツトチヤツク Granted JPS6046045A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59152803A JPS6046045A (ja) 1984-07-25 1984-07-25 ペレツトチヤツク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59152803A JPS6046045A (ja) 1984-07-25 1984-07-25 ペレツトチヤツク

Publications (2)

Publication Number Publication Date
JPS6046045A true JPS6046045A (ja) 1985-03-12
JPH0377664B2 JPH0377664B2 (enExample) 1991-12-11

Family

ID=15548494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59152803A Granted JPS6046045A (ja) 1984-07-25 1984-07-25 ペレツトチヤツク

Country Status (1)

Country Link
JP (1) JPS6046045A (enExample)

Also Published As

Publication number Publication date
JPH0377664B2 (enExample) 1991-12-11

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