JPS6046044A - Semiconductor sorting device - Google Patents

Abstract

PURPOSE:To obtain a product having high quality and reliability by setting a good product discriminating range from the distributed state of the measured result of a measuring unit, thereby sorting by a standard based on the characteristic distribution at every product lot in addition to the product standard. CONSTITUTION:The measurement of the characteristic of a semiconductor device 5 of a sample number (n) is performed in a characteristic measuring unit 2, characteristic mean and standard deviation are calculated by a statistic calculation by a calculator 4 as a characteristic standard II. The characteristic standard value I programmed at first and the characteristic standard value III is set by adding characteristic standard value II, and the sorting work of semiconductor devices of the same lot as the sample is started. The measured result in the measuring unit 2 is compared and discriminated by a calculator 4 with the value III, and sorted to proper and improper products by a sorting mechanism 3.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a characteristic selection device for semiconductor devices such as transistors and integrated circuits.

Conventional characteristic sorting equipment measures the characteristics of semiconductor devices based on standards stipulated in catalogs, etc., and products with characteristics that deviate from the standards may have some kind of defect even if they fall within the standards. There is a tendency for it to deteriorate under actual use conditions. For example, the thermal resistance characteristics of a transistor are determined by the material loft of the chip, and the thermal resistance characteristics of transistors measured on chips made of the same material are normally distributed in a narrower range than the standard. Transistors with thermal resistance characteristics that deviate from the distribution within the same lot often deteriorate during actual use due to defects in the assembly process (chip mounting process). Therefore, it was necessary to first calculate the thermal resistance characteristic distribution for each loft by measuring a sample, and then set the results as a judgment standard in the characteristic selection device.

As the quality reliability requirements of the market become stricter, it has become important to control variations in characteristic values for the reasons mentioned above, and it is no longer sufficient to judge good and defective products based only on conventional product standards. It's coming.

An object of the present invention is to easily select semiconductor devices based on specifications based on characteristic distribution for each product lot in addition to product specifications, and to obtain products with high quality and reliability.

According to the present invention, there is obtained a semiconductor device sorting device that includes a semiconductor device measuring section and a measured value aggregating section, and the measured value aggregating section sets a non-defective judgment range from the distribution state of the measurement results based on the measurement results of the measuring section. .

Hereinafter, the present invention will be explained using the drawings.

FIG. 1 shows the configuration of a sorting device according to an embodiment of the present invention. The electrical characteristics of the semiconductor device 5 inserted into the semiconductor device insertion section 1 are measured by the characteristic measurement section 2, and based on the measurement results, the classification mechanism section 3 classifies the semiconductor device into good and defective products. On the other hand, a computer section 4 determines whether the product is good or bad based on the measurement results obtained by the characteristic measuring section 2, and this computer section 4 instructs the operation of the classification mechanism section 3. Furthermore, the computer section 4 has a function of summing up the l-characteristic measurement results obtained by the characteristic measuring section 2, performing distribution calculation processing, and setting a determination standard on its own based on the results. That is, even if the characteristics are within a predetermined range, semiconductor devices 5 whose characteristics are far from the distribution within the same lot are determined to be defective.

An example of the sorting operation of this sorting device will be described below in accordance with the operating procedure with reference to FIG. 2.

1゜The multiple of the standard deviation required when feeding back the number of charges n (pieces) and the statistical calculation processing results as the standard value ■ [for example, 3 (
v))). Next, measurement of sample n(@ starts. The semiconductor device 5, which is an individual sample, undergoes characteristic measurement in the characteristic measuring section 2, and the value is stored in the computer section 4 and subjected to statistical calculation processing, and the characteristic value is Calculate the value of mean + xt, standard deviation (Vl).

The value is fed back as the characteristic standard value ■ inside the computer section 4, and the characteristic standard value of the semiconductor device is the characteristic obtained by adding the characteristic standard value I programmed at the beginning and the characteristic standard value ■ obtained from the sample measurement result. It is set as standard value I.

After that, we will begin the process of sorting semiconductor devices from the same lot as the sample. A semiconductor device 1 5 is fed from the insertion section 1 of the sorting device and measured by the characteristic measurement section 2 . The measurement results are compared with characteristic standard values (■) in the computer section 4, and classified into good and defective products by the classification mechanism section 3.

FIG. 3 is a diagram showing how to set characteristic standard values in the present invention. ■ represents the range of non-defective products based on catalogs, etc. (characteristic standard values ■). (2) is an example of the distribution standard (characteristic standard value (2)) obtained for each lot of Lot A, Lot B, and Lot C1 obtained by measuring n (pieces) of samples. ■ is Lot A obtained by adding the above two characteristic specification values.

It represents the final sorting standard (characteristic standard value l) of lot B and lot C. As described above, according to the sorting device of the present invention, even if the products are within the catalog standard, products with different characteristics based on the distribution within the loft are judged as defective products, so the reliability of the selected good products is high. It is something.

Furthermore, this sorting device can be used only for distribution sorting (characteristic standard ■) and can also be applied to various parts including electronic parts other than semiconductor devices.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing the configuration of a semiconductor sorting device according to the present invention. 1...Product insertion part, 2...Measurement part, 3
...Classification mechanism section, 4...Computer section. FIG. 2 is a flowchart of the calculation processing system. FIG. 3 is an explanatory diagram showing how to set characteristic standard values. ■・・・Characteristics standard value■(Product standard),■・・・・
・・Characteristic standard value ■ (distribution standard), seal ・・Characteristic standard value It (selection standard). Figure 1 Figure 3 Figure 2 90

Claims (1)

[Claims] There is a characteristic measuring section of a semiconductor device, a calculating section that calculates the characteristic distribution from the measurement results obtained by the characteristic measuring section, and sets standards by itself based on the results, and a device that determines pass/fail based on the standards from the calculating section. A semiconductor sorting device comprising: a classification section that makes a determination and classifies the semiconductor devices.