JPS6041571A - 被加工物表面への固体薄膜製造方法 - Google Patents
被加工物表面への固体薄膜製造方法Info
- Publication number
- JPS6041571A JPS6041571A JP59066211A JP6621184A JPS6041571A JP S6041571 A JPS6041571 A JP S6041571A JP 59066211 A JP59066211 A JP 59066211A JP 6621184 A JP6621184 A JP 6621184A JP S6041571 A JPS6041571 A JP S6041571A
- Authority
- JP
- Japan
- Prior art keywords
- particles
- powder particles
- thin film
- electric field
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007787 solid Substances 0.000 title claims abstract description 21
- 239000010409 thin film Substances 0.000 title claims abstract description 17
- 239000002245 particle Substances 0.000 claims abstract description 86
- 239000000843 powder Substances 0.000 claims abstract description 43
- 230000005684 electric field Effects 0.000 claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 230000009471 action Effects 0.000 claims description 4
- 239000010408 film Substances 0.000 abstract description 32
- 238000000034 method Methods 0.000 abstract description 21
- 230000000694 effects Effects 0.000 abstract description 3
- 230000003116 impacting effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 15
- 230000015572 biosynthetic process Effects 0.000 description 14
- 229910052799 carbon Inorganic materials 0.000 description 11
- 230000001133 acceleration Effects 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 239000012528 membrane Substances 0.000 description 6
- 150000001721 carbon Chemical class 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000011343 solid material Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 150000002500 ions Chemical group 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000005678 Seebeck effect Effects 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59066211A JPS6041571A (ja) | 1984-04-02 | 1984-04-02 | 被加工物表面への固体薄膜製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59066211A JPS6041571A (ja) | 1984-04-02 | 1984-04-02 | 被加工物表面への固体薄膜製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56177561A Division JPS5933670B2 (ja) | 1981-11-04 | 1981-11-04 | 被加工物表面への固体薄膜製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6041571A true JPS6041571A (ja) | 1985-03-05 |
| JPS6320187B2 JPS6320187B2 (enrdf_load_stackoverflow) | 1988-04-26 |
Family
ID=13309261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59066211A Granted JPS6041571A (ja) | 1984-04-02 | 1984-04-02 | 被加工物表面への固体薄膜製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6041571A (enrdf_load_stackoverflow) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06158350A (ja) * | 1992-11-18 | 1994-06-07 | Isao Sugai | 基体の被覆方法 |
| JP2002134136A (ja) * | 2000-10-30 | 2002-05-10 | Nippon Steel Corp | 不働態金属の対カーボン低接触抵抗化表面処理法および対カーボン低接触抵抗性固体高分子型燃料電池用金属部材 |
| KR100425600B1 (ko) * | 1999-12-14 | 2004-04-03 | 주식회사 포스코 | 정전기력을 이용한 아연분말의 부분 유동 제어방법 |
| JP2008137122A (ja) * | 2006-12-04 | 2008-06-19 | Tatsuo Shiyouji | 微粒子のコーティング方法 |
| DE102007029142A1 (de) * | 2007-06-25 | 2009-01-02 | 3D-Micromac Ag | Schichtauftragsvorrichtung zum elektrostatischen Schichtauftrag eines pulverförmigen Werkstoffes sowie Vorrichtung und Verfahren zum Herstellen eines dreidimensionalen Objektes |
| WO2010150772A1 (ja) * | 2009-06-24 | 2010-12-29 | 則竹 ひとみ | 微粒子コーティング装置及び微粒子コーティング方法 |
| EP2361705A1 (de) * | 2010-02-23 | 2011-08-31 | Robert Bosch GmbH | Verfahren und Vorrichtung zum Verbinden von Partikeln mit einem Substrat |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0333780U (enrdf_load_stackoverflow) * | 1989-08-07 | 1991-04-03 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5225837A (en) * | 1975-08-20 | 1977-02-26 | Matsushita Electric Ind Co Ltd | Process and an apparatus for powder coating |
| JPS52105945A (en) * | 1976-03-02 | 1977-09-06 | Ise Electronics Corp | Method of coating fluorescent substance |
-
1984
- 1984-04-02 JP JP59066211A patent/JPS6041571A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5225837A (en) * | 1975-08-20 | 1977-02-26 | Matsushita Electric Ind Co Ltd | Process and an apparatus for powder coating |
| JPS52105945A (en) * | 1976-03-02 | 1977-09-06 | Ise Electronics Corp | Method of coating fluorescent substance |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06158350A (ja) * | 1992-11-18 | 1994-06-07 | Isao Sugai | 基体の被覆方法 |
| KR100425600B1 (ko) * | 1999-12-14 | 2004-04-03 | 주식회사 포스코 | 정전기력을 이용한 아연분말의 부분 유동 제어방법 |
| JP2002134136A (ja) * | 2000-10-30 | 2002-05-10 | Nippon Steel Corp | 不働態金属の対カーボン低接触抵抗化表面処理法および対カーボン低接触抵抗性固体高分子型燃料電池用金属部材 |
| JP2008137122A (ja) * | 2006-12-04 | 2008-06-19 | Tatsuo Shiyouji | 微粒子のコーティング方法 |
| DE102007029142A1 (de) * | 2007-06-25 | 2009-01-02 | 3D-Micromac Ag | Schichtauftragsvorrichtung zum elektrostatischen Schichtauftrag eines pulverförmigen Werkstoffes sowie Vorrichtung und Verfahren zum Herstellen eines dreidimensionalen Objektes |
| US8124192B2 (en) | 2007-06-25 | 2012-02-28 | Eos Gmbh Electro Optical Systems | Layer application device for an electrostatic layer application of a building material in powder form and device and method for manufacturing a three-dimensional object |
| WO2010150772A1 (ja) * | 2009-06-24 | 2010-12-29 | 則竹 ひとみ | 微粒子コーティング装置及び微粒子コーティング方法 |
| JP2011005379A (ja) * | 2009-06-24 | 2011-01-13 | Tatsuo Shoji | 微粒子コーティング装置及び微粒子コーティング方法 |
| EP2361705A1 (de) * | 2010-02-23 | 2011-08-31 | Robert Bosch GmbH | Verfahren und Vorrichtung zum Verbinden von Partikeln mit einem Substrat |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6320187B2 (enrdf_load_stackoverflow) | 1988-04-26 |
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