JPS6035326A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS6035326A
JPS6035326A JP58144113A JP14411383A JPS6035326A JP S6035326 A JPS6035326 A JP S6035326A JP 58144113 A JP58144113 A JP 58144113A JP 14411383 A JP14411383 A JP 14411383A JP S6035326 A JPS6035326 A JP S6035326A
Authority
JP
Japan
Prior art keywords
magnetic layer
magnetic
recording medium
vapor deposition
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58144113A
Other languages
Japanese (ja)
Other versions
JPH0364929B2 (en
Inventor
Takeshi Sawada
武 沢田
Akira Shinmi
親見 晄
Hirotsugu Takagi
高木 博嗣
Kenji Suzuki
謙二 鈴木
Fumio Kishi
岸 文夫
Susumu Kozuki
上月 進
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tohoku Tokushuko KK
Tohoku Steel Co Ltd
Canon Inc
Original Assignee
Tohoku Tokushuko KK
Tohoku Steel Co Ltd
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tohoku Tokushuko KK, Tohoku Steel Co Ltd, Canon Inc filed Critical Tohoku Tokushuko KK
Priority to JP58144113A priority Critical patent/JPS6035326A/en
Priority to US06/635,234 priority patent/US4567116A/en
Publication of JPS6035326A publication Critical patent/JPS6035326A/en
Publication of JPH0364929B2 publication Critical patent/JPH0364929B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/64Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/65Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
    • G11B5/656Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing Co

Landscapes

  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To attain magnetic characteristics and corrosion resistance which are comparable to or higher than those of a Co-Ni alloy at a low cost by using Fe as the principal component of a magnetic layer to be formed by a thin film deposition method, and adding fixed percentages of Co, Ni and other specified substance to Fe. CONSTITUTION:A magnetic layer is formed by a thin film deposition method such as vapor deposition with electron beams, vapor deposition by induction heating, vapor deposition by resistance heating, sputtering, ion plating or plating using an Fe-base material contg. Co, Ni and at least one among Ti, Zr and Hf. The desirable composition of the magnetic layer is represented by a formula (Fe1-xCox)1-(a+b)NiaXb, wherein X is at least one among Ti, Zr and Hf, 0<x<=0.5, 0.05<=a<=0.25, and 0.01<=b<=0.12 (weight ratio). The especially desirable composition consists of, by weight, 2-8% in total of one or more among Ti, Zr and Hf, 8-20% Ni, 15-40% Co and the balance Fe.

Description

【発明の詳細な説明】 〔技術分野〕 本発明は薄膜堆積法によって磁性層が形成される磁気記
録媒体、特に耐蝕性の優れた磁気記録媒体に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a magnetic recording medium in which a magnetic layer is formed by a thin film deposition method, and particularly to a magnetic recording medium with excellent corrosion resistance.

〔従来技術〕[Prior art]

近年、真空蒸着法、スパッタリング法、メッキ法等の薄
膜堆積法により磁気記録媒体を製造する研究開発が活発
化している。これらの製法によって作られた磁気記録媒
体は■残留磁束密度が高い、■保磁力を大きくできる、
■磁性層を薄くできる等の、高密度記録化のための条件
を非常によく満足している。従来、この記録媒体の磁性
材料としては、COとNiを主成分とする合金が主に用
いられており、なかでもCo−20WtチNi 合金が
多く検討されている。その理由はこの合金が比較的耐蝕
性が良いこと、7Qwt% 以上のCOを含む合金はり
In recent years, research and development into manufacturing magnetic recording media using thin film deposition methods such as vacuum evaporation, sputtering, and plating has become more active. Magnetic recording media made using these manufacturing methods have ■high residual magnetic flux density, ■capable of increasing coercive force,
■It very well satisfies the conditions for high-density recording, such as the ability to make the magnetic layer thinner. Conventionally, alloys containing CO and Ni as main components have been mainly used as magnetic materials for this recording medium, and among them, a Co-20Wt-Ni alloy has been widely studied. The reason for this is that this alloy has relatively good corrosion resistance, and the alloy beam contains 7Qwt% or more of CO.

c 、 p、。構造をもち磁気異方性をコントロールし
やすく面内異方性を卓越させることが容易であるためと
いわれる。
c, p,. This is said to be because it has a structure that makes it easy to control magnetic anisotropy and to achieve excellent in-plane anisotropy.

しかしながら、この合金はCoを70%以上、通常は8
0%前後も含んでいるために極めて高価であり、しかも
COは国際情勢の変化により価格が大きく変動するとい
う問題がある。また耐蝕性も厳しい環境条件に対しては
不十分である。
However, this alloy contains more than 70% Co, typically 8
Since it contains around 0% CO, it is extremely expensive, and there is also the problem that the price of CO fluctuates greatly due to changes in the international situation. Corrosion resistance is also insufficient for severe environmental conditions.

〔目 的〕〔the purpose〕

而して本発明は上記欠点を改善すべ(Coの含有量を少
なくシ、安価で安定供給が可能な磁気記録媒体を提供す
ると共に、その磁気特性及び耐蝕性においても優れた性
能を有する磁気記録媒体を提供することを主たる目的と
する。
Therefore, the present invention aims to improve the above-mentioned drawbacks (to provide a magnetic recording medium with a low Co content, which can be inexpensively and stably supplied, and which also has excellent magnetic properties and corrosion resistance. The main purpose is to provide media.

〔発明の構成〕[Structure of the invention]

本発明は堆積法により磁性層が形成される磁気記録媒体
において、磁性層がFeを主成分としCoおよびNiを
含み、さらにTi 、 Zr 、Hfより選ばれる少く
とも一種類以上の元素を含むことな特徴とするものであ
り、電子ビーム蒸着法、誘導加熱蒸着法、抵抗加熱蒸着
法、スパッタリング法、イオンブレーティング法、メッ
キ法等を利用して形成できるものである。
The present invention provides a magnetic recording medium in which a magnetic layer is formed by a deposition method, in which the magnetic layer mainly contains Fe, contains Co and Ni, and further contains at least one element selected from Ti, Zr, and Hf. It can be formed using an electron beam evaporation method, an induction heating evaporation method, a resistance heating evaporation method, a sputtering method, an ion blating method, a plating method, etc.

磁性層材料としてCo元素とFe元素の和が6Qwt%
以上でFeが主成分となるように、Co元素をFe元素
に置換することにより磁気的特性は、従来のCo−Ni
 合金と同等以上のものが得られるととが認められた。
The sum of Co element and Fe element as magnetic layer material is 6Qwt%
By replacing Co element with Fe element so that Fe becomes the main component, the magnetic properties are improved compared to conventional Co-Ni.
It was recognized that a product equivalent to or better than the alloy could be obtained.

しかしながらCo元素で置換することにより耐蝕性が劣
化するが、Ti 、 Zr 、Hfより選はれる少くと
も一種類以上の元素を添加することにより、磁気特性を
損うことなく耐蝕性おいても、従来のCo −Ni 合
金と同等以上の改善を図ることができた。
However, the substitution with Co element deteriorates the corrosion resistance, but by adding at least one element selected from Ti, Zr, and Hf, the corrosion resistance can be improved without impairing the magnetic properties. It was possible to achieve an improvement equal to or greater than that of the conventional Co--Ni alloy.

本発明の磁気記録媒体につ〜・て、さらに詳細に説明す
る。本発明に用いる磁性層の材料において、Fe 元素
は原子−個あたりの磁気モーメントを高め、残留磁束密
度Brを増加させると同時に展延性を増し、磁性層のワ
レ、ヒビの発生を防止する。
The magnetic recording medium of the present invention will be explained in more detail. In the material for the magnetic layer used in the present invention, the Fe element increases the magnetic moment per atom, increases the residual magnetic flux density Br, and at the same time increases malleability, thereby preventing the occurrence of cracks and cracks in the magnetic layer.

一方、前記したようにFe元素が増すと耐蝕性が急激に
悪くなると同時に、残留磁束密度Brを増加させる効果
はむしろ低下する。またNiは耐蝕性の効果および展延
性を向」二させ、磁性層のワレ、ヒビの発生を防止する
。またTi、 、 Zr 、 Hfは、単独又は二種類
又は三種類全部を同時に添加することにより、耐蝕性を
向上させると共に磁性層の耐摩耗性に有効であり、さら
には磁性層と、磁性層の基材であるベースフィルム等と
の付着強度の増大にも寄与する。ただし添加量が多すぎ
ると、Brが減少する等、磁性層の磁気特性を低下させ
る。
On the other hand, as described above, as the Fe element increases, the corrosion resistance deteriorates rapidly, and at the same time, the effect of increasing the residual magnetic flux density Br actually decreases. Further, Ni improves corrosion resistance and ductility, and prevents cracks and cracks in the magnetic layer. In addition, Ti, Zr, and Hf, when added singly or in combination of two or all three, improve the corrosion resistance and are effective in improving the wear resistance of the magnetic layer. It also contributes to increasing the adhesive strength with the base film, etc., which is the base material. However, if the amount added is too large, the magnetic properties of the magnetic layer will be deteriorated, such as a decrease in Br.

以上の結果として良好な磁性層の組成は、(Fe1−x
CoX)t−(a+b)”aXb (XはTi 、 Z
r 、 Hfより選ばれる少くとも一種類以上の元素) で重量組成比がO<X<0.5 、0,05りa<0.
25 、および0.01<b<0.12 の範囲のもの
であり、特にTi 。
As a result of the above, a good magnetic layer composition is (Fe1-x
CoX)t-(a+b)”aXb (X is Ti, Z
r, at least one element selected from Hf), and the weight composition ratio is O<X<0.5, 0.05 and a<0.
25 and in the range 0.01<b<0.12, especially Ti.

Zr、Hfが単独又は二種又は三種全部の合計で2〜3
wtチ、Niが8〜2[)wtチ、Coが15〜4Qw
t%、残りがFeのものが好適である。さらに最適な組
成は、Ti、Zr、Hfの合計で3〜6wt%、Niが
10〜16wt1゜COが20〜3Qwt%、残りがF
eの範囲にある。
Zr, Hf alone or 2 to 3 in total of two or all three types
wt Chi, Ni 8~2[)wt Chi, Co 15~4Qw
t% and the rest is Fe. Furthermore, the optimal composition is a total of 3 to 6 wt% of Ti, Zr, and Hf, 10 to 16 wt% of Ni, 20 to 3 Qwt% of CO, and the balance is F.
It is in the range of e.

〔実施例〕〔Example〕

以下実施例により本発明を説明する。第1図は磁気記録
媒体の一つである蒸着テープの製造装置を示す。真空槽
1内にフィルム巻出し軸2、巻取軸6、中間フリーロー
ラ4、冷却キャン5、蒸着材料収納容器7、電子ビーム
発生源8が配置されて〜・る。幅100印、厚さ15μ
mのポリエチレンテレフタレートのフィルム9は、フィ
ルム巻出軸2から中間フリーローラ4および冷却キャン
5を経て、フィルム巻取り軸6に送られる。蒸着材料6
は蒸着材料収納容器7内に入れられ、冷却キャン5と対
向して配置され、電子ビーム発生源8からの電子ビーム
によって加熱される。加熱された蒸着材料は、蒸気流6
/となり冷却キャン5上のフィルム2に付着して磁性層
を形成するが、防着板11によりフィルム9上に蒸着さ
れる蒸気流の入射角が60°〜90°に制限される。真
空槽1内は排気装置10((より、成膜中の真空度を1
×10〜5×10−6’1.’ o r rに保持した
。フィルム送り速度は毎分IQmで、形成された磁性層
の厚さはほぼ1000Aである。
The present invention will be explained below with reference to Examples. FIG. 1 shows an apparatus for manufacturing vapor-deposited tape, which is one of the magnetic recording media. A film unwinding shaft 2, a winding shaft 6, an intermediate free roller 4, a cooling can 5, a vapor deposition material storage container 7, and an electron beam generation source 8 are arranged in the vacuum chamber 1. Width 100 marks, thickness 15μ
A film 9 of polyethylene terephthalate 9 is sent from a film unwinding shaft 2 to a film winding shaft 6 via an intermediate free roller 4 and a cooling can 5. Vapor deposition material 6
is placed in a vapor deposition material storage container 7, placed opposite the cooling can 5, and heated by an electron beam from an electron beam generation source 8. The heated vapor deposition material flows into a vapor stream 6
/ and adheres to the film 2 on the cooling can 5 to form a magnetic layer, but the incidence angle of the vapor flow deposited on the film 9 is limited to 60° to 90° by the adhesion prevention plate 11. The inside of the vacuum chamber 1 is equipped with an exhaust device 10 ((by which the degree of vacuum during film formation is
×10~5×10-6'1. ' o r r held. The film feeding speed was IQm per minute, and the thickness of the formed magnetic layer was approximately 1000A.

第2図に上記の方法で作製した蒸着テープの磁性層の組
成と耐蝕性試験の結果を示す。耐蝕性試験は)上記実施
例に従って作製されたテープを、60℃湿度90%の恒
温恒湿槽の中に1000時間放置した後、テープの残留
磁束密度Brの変化を測定した。第2図において、◎は
Brの低下が6%未満、○は3〜5チ、Δは5〜10%
、×は10チ以上を示す。
FIG. 2 shows the composition of the magnetic layer of the vapor-deposited tape produced by the above method and the results of the corrosion resistance test. Corrosion resistance test) The tape produced according to the above example was left in a constant temperature and humidity bath at 60° C. and 90% humidity for 1000 hours, and then the change in the residual magnetic flux density Br of the tape was measured. In Figure 2, ◎ means the decrease in Br is less than 6%, ○ means 3-5%, and Δ means 5-10%.
, × indicates 10 inches or more.

第6図に1家庭用VTRデツキを用い記録再生した時の
再生出力を示す。本発明のテープ池4の再生出力は曲線
20で、比較のため同一条件で作製したCo−Niテー
プの再生出力が曲線21で示されている。本発明のテー
プの再生出力は従来のCo−Niテープに比べ同等ない
し2dB高い。他のテープについてもCo−Niテープ
以上の再生出力が得られた。
FIG. 6 shows the playback output when recording and playing back using one home VTR deck. Curve 20 shows the playback output of the tape pond 4 of the present invention, and curve 21 shows the playback output of a Co-Ni tape produced under the same conditions for comparison. The reproduction output of the tape of the present invention is the same or 2 dB higher than that of the conventional Co-Ni tape. For the other tapes as well, playback outputs greater than those for the Co-Ni tape were obtained.

以上述べたように、本発明の磁気記録媒体はFeを主成
分とするために、従来のCOが主成分のCo −N1 
合金系記録媒体に比べ、非常に安価になるばかりでなく
〜Ti 、 Zr 、 Hf元素を添加することにより
、Feが主成分の媒体の欠点である耐蝕性の悪さを大幅
に改善し、Co−Ni系合金と同等あるいはそれ以上の
再生出力、耐蝕性を有するものである。
As described above, since the magnetic recording medium of the present invention has Fe as its main component, the conventional Co-N1
Not only is it much cheaper than alloy-based recording media, but by adding Ti, Zr, and Hf elements, the poor corrosion resistance, which is a drawback of Fe-based media, can be greatly improved, and Co- It has reproduction output and corrosion resistance equal to or greater than that of Ni-based alloys.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本実施例で用いた蒸着テープの製造装置の説明
図である。 第2図は、磁性層の組成と耐蝕性試験の結果を示す表で
ある。 第6図は、第2図のNo 4のテープと、Co−Niテ
ープの名局波数における再生出力の比較を示すグラフで
ある。 1:真空槽、2:フイルム巻出し軸、6:フイルム巻取
り軸、4:中間フリーローラ、5二冷却キヤン、6:蒸
着材料、7:蒸着材料収納容器、8:電子ビーム発生源
、9:ポリエチレンテレフタレートフィルム、10:排
気装置、11:防着板、20:本発明実施例の再生出力
曲線、21:Co−Niテープの再生出力曲線 出願人 キャノン株式会社 手続補正書(方式) 特許庁長官 若杉和 夫 殿 1 事件の表示 昭和58年 特許層 第 144115 号2 発明の
名称 磁気記録媒体 3 補正をする者 事件との関係 特許出願人 件 所 東京都大田区下丸子3−30−2居 所 田1
46東京都大[+]区下丸子3−30−2キャノノ株式
会社内(電話758−2111)氏名 (6987)弁
理士丸め(fi(支)隷S、補正命令の日付 昭和58年11月29日(発送日付) 6、補正の対象 明細書 7、補正の内容 明細書の浄書(内容に変更なし)。
FIG. 1 is an explanatory diagram of a vapor deposition tape manufacturing apparatus used in this example. FIG. 2 is a table showing the composition of the magnetic layer and the results of the corrosion resistance test. FIG. 6 is a graph showing a comparison of reproduction outputs of the No. 4 tape in FIG. 2 and the Co-Ni tape at popular wave numbers. 1: Vacuum chamber, 2: Film unwinding shaft, 6: Film winding shaft, 4: Intermediate free roller, 5 Two cooling cans, 6: Vapor deposition material, 7: Vapor deposition material storage container, 8: Electron beam source, 9 : Polyethylene terephthalate film, 10: Exhaust device, 11: Anti-adhesion plate, 20: Reproduction output curve of the embodiment of the present invention, 21: Reproduction output curve of Co-Ni tape Applicant: Canon Co., Ltd. Procedural amendment (method) Patent Office Director Kazuo Wakasugi 1 Indication of the case 1982 Patent layer No. 144115 2 Name of the invention Magnetic recording medium 3 Relationship with the person making the amendment Case Patent applicant Location 3-30-2 Shimomaruko, Ota-ku, Tokyo 1
46 Tokyo Metropolitan University [+] Ward, Shimomaruko 3-30-2 Canono Co., Ltd. (Telephone 758-2111) Name (6987) Patent Attorney Maru (fi (branch) slave S, date of amendment order November 29, 1982) (Delivery date) 6. Amendment subject specification 7. Engraving of the amendment content statement (no change in content).

Claims (2)

【特許請求の範囲】[Claims] (1)非磁性体基体上に薄膜堆積法により形成された磁
性層を有する磁気記録媒体において、磁性層がFeを主
成分とし、CoおよびNiを含み、さらにTi、Zrお
よびHfより選ばれる少くとも一種類以上の元素を含む
ことを特徴とする磁気記録媒体。
(1) In a magnetic recording medium having a magnetic layer formed by a thin film deposition method on a non-magnetic substrate, the magnetic layer mainly contains Fe, contains Co and Ni, and further contains a small amount selected from Ti, Zr and Hf. A magnetic recording medium characterized by containing one or more types of elements.
(2)磁性層の組成が (Fe1−xCo)C) 1−(a+b) Nt aX
b (XはTi 、 Zr 、およびHfより選ばれる
少くとも一種類以上の元素。)で重量組成比が0<X<
0.5 、0.05<a<0.25 オヨび0.01<
b<0.12 である特許請求の範囲第1項記載の磁気
記録媒体。
(2) The composition of the magnetic layer is (Fe1-xCo)C) 1-(a+b)Nt aX
b (X is at least one element selected from Ti, Zr, and Hf) and the weight composition ratio is 0<X<
0.5, 0.05<a<0.25, 0.01<
The magnetic recording medium according to claim 1, wherein b<0.12.
JP58144113A 1983-08-06 1983-08-06 Magnetic recording medium Granted JPS6035326A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58144113A JPS6035326A (en) 1983-08-06 1983-08-06 Magnetic recording medium
US06/635,234 US4567116A (en) 1983-08-06 1984-07-27 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58144113A JPS6035326A (en) 1983-08-06 1983-08-06 Magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS6035326A true JPS6035326A (en) 1985-02-23
JPH0364929B2 JPH0364929B2 (en) 1991-10-09

Family

ID=15354484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58144113A Granted JPS6035326A (en) 1983-08-06 1983-08-06 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS6035326A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63234407A (en) * 1987-03-23 1988-09-29 Hitachi Ltd Magnetic recording medium

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629A (en) * 1979-06-15 1981-01-06 Ulvac Corp Vacuum-evaporated film type magnetic recording substance and its manufacture
JPS567231A (en) * 1979-06-27 1981-01-24 Ulvac Corp Vapor deposition film type magnetic recording material and its production

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629A (en) * 1979-06-15 1981-01-06 Ulvac Corp Vacuum-evaporated film type magnetic recording substance and its manufacture
JPS567231A (en) * 1979-06-27 1981-01-24 Ulvac Corp Vapor deposition film type magnetic recording material and its production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63234407A (en) * 1987-03-23 1988-09-29 Hitachi Ltd Magnetic recording medium

Also Published As

Publication number Publication date
JPH0364929B2 (en) 1991-10-09

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