JPH0576086B2 - - Google Patents
Info
- Publication number
- JPH0576086B2 JPH0576086B2 JP58216839A JP21683983A JPH0576086B2 JP H0576086 B2 JPH0576086 B2 JP H0576086B2 JP 58216839 A JP58216839 A JP 58216839A JP 21683983 A JP21683983 A JP 21683983A JP H0576086 B2 JPH0576086 B2 JP H0576086B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- corrosion resistance
- magnetic layer
- film
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007736 thin film deposition technique Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 1
- 238000005260 corrosion Methods 0.000 description 15
- 230000007797 corrosion Effects 0.000 description 15
- 239000010408 film Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 229910000990 Ni alloy Inorganic materials 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 229910020630 Co Ni Inorganic materials 0.000 description 2
- 229910002440 Co–Ni Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】
本発明は薄膜堆積法によつて形成される磁気記
録媒体、特に耐食性と耐摩耗性に優れた磁気記録
媒体に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic recording medium formed by a thin film deposition method, and particularly to a magnetic recording medium having excellent corrosion resistance and wear resistance.
近年、真空蒸着法、スパツタリング法、メツキ
法等の薄膜堆積法により磁気記録媒体を製造する
研究開発が活発化している。これらの製法によつ
て作られた磁気記録媒体は残留磁束密度が高い保
磁力を大きくできる。および磁性層を薄くできる
等の高密度記録化のための条件を非常によく満足
している。従来、この記録媒体の磁性材料として
は、CoとNiを主成分とする合金が主に用いられ
ており、なかでもCo−Ni合金が多く検討されて
いる。その理由はこの合金が比較的耐食性が良い
こと、70wt％以上のCoを含む合金はh.c.p.構造を
もち磁気異方性をコントロールしやすく面内異方
性を卓越させることが容易であるためといわれ
る。しかしながら、この合金はCoを70％以上通
常は80％前後も含んでいるために極めて高価であ
り、しかもCoは国際情勢の変化により、価格が
大きく変動するという問題を有している。また耐
蝕性も厳しい環境条件に対しては不十分である。 In recent years, research and development into manufacturing magnetic recording media using thin film deposition methods such as vacuum evaporation, sputtering, plating, etc. has become active. Magnetic recording media made by these manufacturing methods can have a high residual magnetic flux density and a large coercive force. It also satisfies the conditions for high-density recording, such as the ability to make the magnetic layer thinner. Conventionally, alloys containing Co and Ni as main components have been mainly used as magnetic materials for recording media, and among them, Co--Ni alloys have been widely studied. The reason for this is said to be that this alloy has relatively good corrosion resistance, and that alloys containing 70 wt% or more of Co have an hcp structure, making it easy to control magnetic anisotropy and to achieve excellent in-plane anisotropy. . However, this alloy is extremely expensive because it contains 70% or more of Co, usually around 80%, and Co has the problem that its price fluctuates greatly due to changes in the international situation. Corrosion resistance is also insufficient for severe environmental conditions.
またCo−Ni合金媒体は機械的強度が不十分で
長時間の磁気ヘツドの接触走行により出力の大巾
な減少を生ずる。 In addition, the Co--Ni alloy medium has insufficient mechanical strength, and long-term contact running of the magnetic head causes a significant decrease in output.
而して本発明は上記欠点を改善すべくCoの含
有量を少くし、安価で安定供給が可能な磁気記録
媒体を提供すると共に、その磁気特性、耐蝕性お
よび耐摩耗性においても優れた性能を有する磁気
記録媒体を提供することを主たる目的とする。 Therefore, in order to improve the above-mentioned drawbacks, the present invention reduces the content of Co, provides a magnetic recording medium that is inexpensive and can be stably supplied, and has excellent performance in terms of magnetic properties, corrosion resistance, and wear resistance. The main purpose is to provide a magnetic recording medium having the following characteristics.
本発明は薄膜堆積法により形成される磁気記録
媒体において磁性層がFeを主成分とし更にCoを
20〜30wt％を、Niを７〜14wt％、Crを１〜6wt
％、Sbを１〜8wt％含み、かつCrとSbとの合計
が３〜12wt％であることを特徴とするものであ
り、誘導加熱蒸着法、電子ビーム蒸着法、スパツ
タリング法、イオンプレーテイング法、メツキ法
等を利用して形成できるものである。 The present invention provides a magnetic recording medium formed by a thin film deposition method in which the magnetic layer is mainly composed of Fe and further contains Co.
20-30wt%, Ni 7-14wt%, Cr 1-6wt%
%, contains 1 to 8 wt% of Sb, and the total of Cr and Sb is 3 to 12 wt%. It can be formed using the , plating method, etc.
磁性層材料としてCo元素とFe元素の和が60wt
％以上でFeが主成分となるようにCo元素をFe元
素に置換することにより磁気特性は従来のCo−
Ni合金と同等以上のものが得られることが認め
られた。Co元素をFe元素で置換することによる
耐蝕性の劣化に対してはCr元素の添加が耐蝕性
向上に寄与する。また耐摩耗性の向上に対しては
Sb元素の添加が有効であることが認められた。 The sum of Co element and Fe element as magnetic layer material is 60wt.
By replacing Co element with Fe element so that Fe becomes the main component at % or more, the magnetic properties are improved compared to conventional Co-
It was confirmed that a product equivalent to or better than Ni alloy could be obtained. Addition of Cr element contributes to improving corrosion resistance against the deterioration of corrosion resistance caused by replacing Co element with Fe element. In addition, for improving wear resistance
The addition of Sb element was found to be effective.
本発明に用いる磁性材料において、Fe、Ni、
CrおよびSbの各元素は各々次の作用をする。Fe
元素は原子１個あたりの磁気モーメントを高め
Br（残留磁束密度）を増加させると同時に、展延
性を増し磁性層のワレ、ヒビの発生を防止する。
一方前記した如くFe元素が増すと耐蝕性が急激
に悪くなると同時に、残留磁束密度Brを増加さ
せる効果はむしろ低下する。また、Niは耐蝕性
の効果及び展延性を向上させ、磁性層のワレやヒ
ビの発生を防止する。またCrは耐蝕性の改善に
寄与する。またSbは耐摩耗性を向上させる。た
だしCrおよびSbはともに添加量が多すぎるとBr
が減少する等、磁性層の磁気特性を低下させる。 In the magnetic material used in the present invention, Fe, Ni,
Each of the elements Cr and Sb has the following effects. Fe
Elements increase the magnetic moment per atom
At the same time as increasing Br (residual magnetic flux density), it also increases malleability and prevents the occurrence of cracks and cracks in the magnetic layer.
On the other hand, as described above, as the Fe element increases, the corrosion resistance deteriorates rapidly, and at the same time, the effect of increasing the residual magnetic flux density Br actually decreases. In addition, Ni improves corrosion resistance and spreadability, and prevents cracks and cracks in the magnetic layer. Cr also contributes to improving corrosion resistance. Sb also improves wear resistance. However, if the addition amount of both Cr and Sb is too large, Br
This decreases the magnetic properties of the magnetic layer.
従つて、好適な磁性層の組成は、
（Fe1-XCOoX）1-（ａ＋ｂ＋ｃ）NiaCrbSbcにお
いてｘ、ａ、ｂおよびｃが重量組成比で０≦ｘ≦
0.5、0.05≦ａ≦0.20、0.01≦ｂ≦0.15、および
0.001≦ｃ≦0.10で、かつｂ＋ｃ≦0.20の範囲のも
のである。特に、Crが１〜6wt％、Sbが１〜8wt
％であり、CrとSbの合計が３〜12wt％、Niが７
〜14wt％、Coが20〜30wt％残りがFeのものであ
る。 Therefore, the preferred composition of the magnetic layer is (Fe 1-X COoX) 1- (a+b+c) Ni a Cr b Sb c, where x, a, b, and c are in a weight composition ratio of 0≦x≦
0.5, 0.05≦a≦0.20, 0.01≦b≦0.15, and
The range is 0.001≦c≦0.10 and b+c≦0.20. In particular, Cr is 1 to 6 wt% and Sb is 1 to 8 wt%.
%, the total of Cr and Sb is 3 to 12wt%, and Ni is 7wt%.
~14wt%, 20~30wt% Co, and the rest Fe.
以下実施例により本発明を説明する。 The present invention will be explained below with reference to Examples.
第１図は、磁気記録媒体の１つである蒸着テー
プの製造装置を示す。真空槽１内にフイルム巻出
し軸２、巻取り軸３、中間フリーローラ４、冷却
キヤン５、蒸着材料収納容器７、電子ビーム発生
源８が配置されている。幅100mm、厚さ15μｍの
ポリエチレンテレフタレートのフイルム９はフイ
ルム巻出軸２から中間フリーローラ４及び冷却キ
ヤン５を経てフイルム巻取り軸３に送られる。蒸
着材料６は蒸着材料収納容器７内へ入れられ冷却
キヤン５と対向して配置され、電子ビーム発生源
８からの電子ビームによつて加熱される。加熱さ
れた蒸着材料は蒸気流６′となり冷却キヤン５上
のフイルム９に付着して磁性層を形成するが、防
着板１１によりフイルム９上に蒸着される蒸気流
の入射角が60〜90°に制限される。真空槽１内は
排気装置１０により成膜中の真空度を１×10-4〜
５×10-6torrに保持した。フイルム送り速度は毎
分10ｍで、形成された磁性槽厚みはほぼ1000Åで
ある。 FIG. 1 shows an apparatus for manufacturing vapor-deposited tape, which is one of the magnetic recording media. A film unwinding shaft 2, a winding shaft 3, an intermediate free roller 4, a cooling can 5, a vapor deposition material storage container 7, and an electron beam generation source 8 are arranged in a vacuum chamber 1. A polyethylene terephthalate film 9 having a width of 100 mm and a thickness of 15 μm is sent from a film unwinding shaft 2 to a film winding shaft 3 via an intermediate free roller 4 and a cooling can 5. The vapor deposition material 6 is put into a vapor deposition material storage container 7 and placed opposite the cooling can 5, and is heated by an electron beam from an electron beam generation source 8. The heated vapor deposition material forms a vapor flow 6' and adheres to the film 9 on the cooling can 5 to form a magnetic layer. limited to °. Inside the vacuum chamber 1, the degree of vacuum during film formation is maintained at 1×10 -4 ~ by the exhaust device 10.
The pressure was maintained at 5×10 −6 torr. The film feeding speed was 10 m/min, and the thickness of the formed magnetic tank was approximately 1000 Å.
上記の方法により第２図に示す試料１〜の組成
の磁気テープを作製した。これらの磁気テープの
磁気特性、耐蝕試験結果を第２図、耐摩耗性試験
結果を第３図に示す。耐蝕性試験は上記実施例に
従つて作製したテープを60℃、湿度90％の恒温恒
湿槽内に250時間放置した後、テープの残留磁束
密度Brの変化を測定した。第２図において◎は
Brの低下が５％未満、○は５〜10％、×は10％以
上を表す。 Magnetic tapes having the compositions of samples 1 to 1 shown in FIG. 2 were prepared by the above method. The magnetic properties and corrosion resistance test results of these magnetic tapes are shown in FIG. 2, and the abrasion resistance test results are shown in FIG. In the corrosion resistance test, the tape produced according to the above example was left in a constant temperature and humidity chamber at 60° C. and 90% humidity for 250 hours, and then the change in the residual magnetic flux density Br of the tape was measured. In Figure 2, ◎ is
The decrease in Br is less than 5%, ◯ indicates 5 to 10%, and × indicates 10% or more.
CrおよびSbを含む試料は、耐蝕性においては
優れることが認められる。 It is recognized that samples containing Cr and Sb have excellent corrosion resistance.
第２図における試料４から試料７のテープにつ
いて実施した耐摩耗性結果を第３図に示す。耐摩
耗試験は家庭用VTRデツキを用い、3.4MHzの単
一周波数を記録しスチルモード再生した時の出力
値の時間変化を測定した。 FIG. 3 shows the abrasion resistance results obtained for the tapes of samples 4 to 7 in FIG. 2. In the wear resistance test, a home VTR deck was used to record a single frequency of 3.4MHz and measure the change in output value over time when playing back in still mode.
曲線２１は試料４、曲線２２は試料５、曲線２
３は試料６および、曲線２４は比較のため同一条
件で作製した試料７のCo−NiテープNo.７の測定
結果である。Sbを含む試料４および５のテープ
は、Sbを含まないNo.６の試料６のテープおよび
試料７のCo−Niテープに比べ優れた耐摩耗性を
示すことが認められる。なお、試料１，２および
３についても試料４と同様の優れた耐蝕性が認め
られた。 Curve 21 is sample 4, curve 22 is sample 5, curve 2
3 is the measurement result of sample 6, and curve 24 is the measurement result of sample 7, Co-Ni tape No. 7, prepared under the same conditions for comparison. It is observed that the tapes of Samples 4 and 5 containing Sb exhibit superior abrasion resistance compared to the tape of Sample 6 (No. 6) which does not contain Sb and the Co-Ni tape of Sample 7. Note that excellent corrosion resistance similar to that of sample 4 was also observed for samples 1, 2, and 3.
以上説明したように、本発明の磁気記録媒体は
Feを主成分とするために従来のCoが主成分のCo
−Ni合金系記録媒体に比べ非常に安価になるば
かりでなくCrおよびSb元素を添加することによ
り耐蝕性、耐摩耗性を大巾に改善するものであ
る。 As explained above, the magnetic recording medium of the present invention
Since Fe is the main component, conventional Co is the main component.
-It is not only much cheaper than Ni alloy-based recording media, but also has greatly improved corrosion resistance and wear resistance by adding Cr and Sb elements.
第１図は本実施例に用いた蒸着テープ作製装置
の説明図である。第２図は磁性層の組成と磁気特
性、耐蝕性試験の結果の対比を示す図表である。
第３図は耐摩耗試験の結果を示すグラフである。
１……真空槽、２……フイルム巻出し軸、３…
…フイルム巻取り軸、４……中間フリーローラ、
５……冷却キヤン、６……蒸着材料、７……蒸着
材料収納容器、８……電子ビーム発生源、９……
ポリエチレンテレフタレートフイルム、１０……
排気装置、１１……防着板。
FIG. 1 is an explanatory diagram of the vapor deposition tape manufacturing apparatus used in this example. FIG. 2 is a chart showing a comparison of the composition of the magnetic layer, the magnetic properties, and the results of the corrosion resistance test.
FIG. 3 is a graph showing the results of the wear resistance test. 1...Vacuum chamber, 2...Film unwinding shaft, 3...
...Film winding shaft, 4...Intermediate free roller,
5... Cooling can, 6... Vapor deposition material, 7... Vapor deposition material storage container, 8... Electron beam source, 9...
Polyethylene terephthalate film, 10...
Exhaust system, 11... Anti-adhesion plate.
Claims (1)
磁性層を有する磁気記録媒体において、磁性層が
Feを主成分とし、更にCoを20〜30wt％、Niを７
〜14wt％、Crを１〜6wt％、Sbを１〜8wt％含
み、かつCrとSbとの合計が３〜12wt％であるこ
とを特徴とする磁気記録媒体。1. In a magnetic recording medium having a magnetic layer formed by a thin film deposition method on a non-magnetic substrate, the magnetic layer is
Fe is the main component, Co is 20~30wt%, and Ni is 7%.
14 wt%, 1 to 6 wt% Cr, 1 to 8 wt% Sb, and the total of Cr and Sb is 3 to 12 wt%.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21683983A JPS60109023A (en) | 1983-11-17 | 1983-11-17 | Magnetic recording medium |
| US06/637,279 US4835069A (en) | 1983-08-06 | 1984-08-03 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21683983A JPS60109023A (en) | 1983-11-17 | 1983-11-17 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60109023A JPS60109023A (en) | 1985-06-14 |
| JPH0576086B2 true JPH0576086B2 (en) | 1993-10-21 |
Family
ID=16694705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21683983A Granted JPS60109023A (en) | 1983-08-06 | 1983-11-17 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60109023A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS524805A (en) * | 1975-07-01 | 1977-01-14 | Fuji Photo Film Co Ltd | Production method of magnetic recording media |
-
1983
- 1983-11-17 JP JP21683983A patent/JPS60109023A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS524805A (en) * | 1975-07-01 | 1977-01-14 | Fuji Photo Film Co Ltd | Production method of magnetic recording media |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60109023A (en) | 1985-06-14 |
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