JPH053657B2 - - Google Patents
Info
- Publication number
- JPH053657B2 JPH053657B2 JP58144116A JP14411683A JPH053657B2 JP H053657 B2 JPH053657 B2 JP H053657B2 JP 58144116 A JP58144116 A JP 58144116A JP 14411683 A JP14411683 A JP 14411683A JP H053657 B2 JPH053657 B2 JP H053657B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- corrosion resistance
- magnetic layer
- tape
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 229910052748 manganese Inorganic materials 0.000 claims description 12
- 229910052804 chromium Inorganic materials 0.000 claims description 8
- 238000007736 thin film deposition technique Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 1
- 238000005260 corrosion Methods 0.000 description 16
- 230000007797 corrosion Effects 0.000 description 16
- 239000010408 film Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 7
- 229910020630 Co Ni Inorganic materials 0.000 description 5
- 229910002440 Co–Ni Inorganic materials 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/656—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing Co
Description
【発明の詳細な説明】
本発明は薄膜堆積法によつて形成される磁気記
録媒体、特に耐蝕性、磁性層の特性安定性に優れ
た磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic recording medium formed by a thin film deposition method, and particularly to a magnetic recording medium having excellent corrosion resistance and characteristic stability of a magnetic layer.
本発明は薄膜堆積法によつて形成される磁気記
録媒体、特に耐蝕性の優れた磁気記録媒体に関す
るものである。 The present invention relates to a magnetic recording medium formed by a thin film deposition method, and particularly to a magnetic recording medium with excellent corrosion resistance.
近年、真空蒸着法、スパツタリング法、メツキ
法等の薄膜堆積法により磁気記録媒体を製造する
研究開発が活発化している。これらの製法によつ
て作られた磁気記録媒体は、残留磁束密度が高
い、保磁力を大きくできる、磁性層を薄くで
きる等の高密度記録化のための条件を非常によく
満足している。従来、この記録媒体の磁性材料と
しては、CoとNiを主成分とする合金が主に用い
られており、なかでもCo−20％Ni合金が多く検
討されている。その理由はこの合金が比較的耐蝕
性が良いこと、70wt％以上のCoを含む合金はh.
c.p.構造をもち磁気異方性をコントロールしやす
く面内異方性を卓越させることが容易であるため
といわれる。しかしながら、この合金はCoを70
％以上通常は80％前後も含んでいるために極めて
高価であり、しかもCoは国際情勢の変化により
価格が大きく変動するという問題を有している。
また耐蝕性も厳しい環境条件に対しては不十分で
ある。 In recent years, research and development into manufacturing magnetic recording media using thin film deposition methods such as vacuum evaporation, sputtering, plating, etc. has become active. Magnetic recording media made by these manufacturing methods very well satisfy the conditions for high-density recording, such as high residual magnetic flux density, large coercive force, and thin magnetic layer. Conventionally, alloys containing Co and Ni as main components have been mainly used as magnetic materials for this recording medium, and among them, a Co-20% Ni alloy has been widely studied. The reason for this is that this alloy has relatively good corrosion resistance, and alloys containing 70wt% or more of Co are h.
This is said to be because it has a cp structure, which makes it easy to control magnetic anisotropy and make in-plane anisotropy dominant. However, this alloy contains 70 Co
% or more, usually around 80%, making it extremely expensive.Moreover, Co has the problem that its price fluctuates greatly due to changes in the international situation.
Corrosion resistance is also insufficient for severe environmental conditions.
而して本発明は上記欠点を改善すべくCoの含
有量を少なくし、安価で安定供給が可能な磁気記
録媒体を提供すると共に、その磁気特性及び耐蝕
性及び磁性層の特性安定性においても優れた性能
を有する磁気記録媒体を提供することを主たる目
的とする。 Therefore, in order to improve the above-mentioned drawbacks, the present invention reduces the Co content and provides a magnetic recording medium that is inexpensive and can be stably supplied, and also improves its magnetic properties, corrosion resistance, and property stability of the magnetic layer. The main objective is to provide a magnetic recording medium with excellent performance.
本発明は堆積法により形成される磁気記録媒体
において磁性層がFeを主成分とし、更にCoを20
〜30wt％、Niを７〜14wt％、Crを１〜6wt％、
Cu及びMnの少なくとも一方の元素を３〜12wt％
含み、かつCu及びMnの少なくとも一方の元素
と、Crとの合計が15wt％以下であることを特徴
とするものであり、誘導加熱蒸着法、抵抗加熱蒸
着法、電子ビーム蒸着法、スパツタリング法、イ
オンプレーテイング法、メツキ法等を利用して形
成できるものである。 The present invention provides a magnetic recording medium formed by a deposition method in which the magnetic layer mainly contains Fe and further contains 20% Co.
~30wt%, Ni 7~14wt%, Cr 1~6wt%,
3 to 12 wt% of at least one of Cu and Mn
and the total of at least one element of Cu and Mn and Cr is 15 wt% or less, and is characterized by the following: induction heating evaporation method, resistance heating evaporation method, electron beam evaporation method, sputtering method, It can be formed using an ion plating method, a plating method, or the like.
磁性層材料としてCo元素とFe元素の和が50wt
％以上で、Feが主成分となるようにCo元素をFe
元素に置換することにより磁気的特性は従来の
Co−Ni合金と同等以上のものが得られることが
認められた。しかし、Co元素をFe元素で置換す
ることにより耐蝕性が劣化するが、Cr元素の添
加が耐蝕性向上に有効である。さらにCr元素と
同時に、MnまたはCuの少なくともどちらか一方
の元素を添加することにより耐蝕性の向上ととも
に磁気特性の安定性が改善されることが認められ
た。 The sum of Co element and Fe element is 50wt as magnetic layer material.
% or more, the Co element is replaced with Fe so that Fe becomes the main component.
By substituting elements, the magnetic properties change from the conventional
It was confirmed that a product equivalent to or better than Co-Ni alloy could be obtained. However, although replacing Co element with Fe element deteriorates corrosion resistance, addition of Cr element is effective in improving corrosion resistance. Furthermore, it was found that by adding at least one of Mn and Cu at the same time as the Cr element, corrosion resistance and stability of magnetic properties were improved.
本発明に用いる磁性材料において、Fe，Ni，
Cr，Mn，Cuの各元素は各々次の作用をする。
Fe元素は原子１個あたりの磁気モーメントを高
めBr（残留磁束密度）を増加させると同時に、展
延性を増し磁性層のワレ、ヒビの発生を防止す
る。一方前記した如くFe元素が増すと耐蝕性が
急激に悪くなると同時に、残留磁束密度Brを増
加させる効果はむしろ低下する。また、Niは耐
蝕性の効果及び展延性を向上させ、磁性層のワレ
やヒビの発生を防止する。またCrは耐蝕性の改
善に寄与する。またMnおよびCuは単独又は両方
同時に添加することにより、耐蝕性を一層向上さ
せる。また特にCrは蒸気圧がFe，CoおよびNiと
大きく異なるために磁性層の特性に変動を生じ易
いがCrをCu又はMnで一部置き換えることにより
磁気特性の安定化を図ることができる。ただし
Cr，Mn，Cuともに添加量が多すぎるとBrが減
少する等、磁性層の磁気特性を低下させる。 In the magnetic materials used in the present invention, Fe, Ni,
Each of the elements Cr, Mn, and Cu has the following effects.
Fe element increases the magnetic moment per atom and increases Br (residual magnetic flux density), and at the same time increases malleability and prevents the occurrence of cracks and cracks in the magnetic layer. On the other hand, as described above, as the Fe element increases, the corrosion resistance deteriorates rapidly, and at the same time, the effect of increasing the residual magnetic flux density Br actually decreases. In addition, Ni improves corrosion resistance and spreadability, and prevents cracks and cracks in the magnetic layer. Cr also contributes to improving corrosion resistance. Further, corrosion resistance is further improved by adding Mn and Cu alone or both at the same time. In particular, Cr tends to cause fluctuations in the properties of the magnetic layer because its vapor pressure is significantly different from that of Fe, Co, and Ni; however, by partially replacing Cr with Cu or Mn, the magnetic properties can be stabilized. however
If too large amounts of Cr, Mn, and Cu are added, Br decreases and the magnetic properties of the magnetic layer deteriorate.
以上の結果として良好な磁性層の組成は
（Fe1-xCox）1-(a+b+c)NiaCrbXc，Ｘ＝Mnおよ
び／またはCuでｘ，ａ，ｂおよびｃは重量組成
比で０＜ｘ0.5，0.05ａ0.20および0.01ｂ
0.15，0.005ｃ0.18の範囲ものものであり、
特にCuとMnが単独又は両方の合計で３〜12wt
％、Crが１〜6wt％およびCrとCuまたはMnの合
計が15wt％以下、Niが７〜14wt％、Coが20〜
30wt％、残りをFeとするものである。 As a result of the above, the composition of a good magnetic layer is (Fe 1-x Co x ) 1-(a+b+c) NiaCrbXc, where X = Mn and/or Cu, and x, a, b, and c are the weight composition ratios. 0<x0.5, 0.05a0.20 and 0.01b
It is in the range of 0.15, 0.005c0.18,
In particular, Cu and Mn are 3 to 12wt alone or both in total.
%, Cr is 1-6wt%, the total of Cr and Cu or Mn is 15wt% or less, Ni is 7-14wt%, Co is 20-20wt%
30wt%, the rest being Fe.
以下実施例により本発明を説明する。 The present invention will be explained below with reference to Examples.
第１図は、磁気記録媒体の１つである蒸着テー
プの製造装置を示す。真空槽１内にフイルム巻出
し軸２、巻取り軸３、中間フリーローラ４、冷却
キヤン５、蒸着材料収納容器７、電子ビーム発生
源８が配置されている。幅100mm、厚さ15μｍの
ポリエチレンテレフタレートのフイルム９はフイ
ルム巻出軸２から中間フリーローラ４および冷却
キヤン５を経てフイルム巻取り軸３に送られる。
蒸着材料６は蒸着材料収納容器７内へ入れられ冷
却キヤン５と対向して配置され、電子ビーム発生
源８からの電子ビームによつて加熱される。加熱
された蒸着材料は蒸気流６′となり冷却キヤン５
上のフイルム９に付着して磁性層を形成するが、
防着板１１によりフイルム９上に蒸着される蒸気
流の入射角が60〜90゜に制限される。真空槽１内
は排気装置１０により成膜中の真空度が１×10-4
〜５×10-6Torrに保持した。フイルム送り速度
は毎分10ｍで、形成された磁性層の厚さはほぼ
1000Åである。 FIG. 1 shows an apparatus for manufacturing vapor-deposited tape, which is one of the magnetic recording media. A film unwinding shaft 2, a winding shaft 3, an intermediate free roller 4, a cooling can 5, a vapor deposition material storage container 7, and an electron beam generation source 8 are arranged in a vacuum chamber 1. A polyethylene terephthalate film 9 having a width of 100 mm and a thickness of 15 μm is sent from a film unwinding shaft 2 to a film winding shaft 3 via an intermediate free roller 4 and a cooling can 5.
The evaporation material 6 is put into a evaporation material storage container 7, placed opposite the cooling can 5, and heated by an electron beam from an electron beam generation source 8. The heated vapor deposition material becomes a vapor flow 6' and flows through the cooling can 5.
It adheres to the upper film 9 to form a magnetic layer,
The incidence angle of the vapor flow deposited on the film 9 is limited to 60 to 90 degrees by the deposition prevention plate 11. Inside the vacuum chamber 1, the degree of vacuum during film formation is maintained at 1×10 -4 by the exhaust device 10.
It was maintained at ~5×10 −6 Torr. The film feed speed was 10 m/min, and the thickness of the formed magnetic layer was approximately
It is 1000Å.
第２図に上記の方法により作製した蒸着テープ
の磁性層の組成と耐蝕性試験および特性安定性の
結果を示す。 FIG. 2 shows the composition of the magnetic layer of the vapor-deposited tape produced by the above method and the results of corrosion resistance tests and property stability.
耐蝕性試験は上記実施例に従つて作製したテー
プを60℃90％の恒温恒湿槽内に1000時間放置後の
残留磁束密度Brの変化を測定した。第２図中◎
はBrの低下が５％未満、〇は５〜10％、×は10％
以上を示す。また、磁性層の特性安定性の試験は
家庭用VTRデツキを用いて記録再生し、テープ
長さ100ｍ内で５％以上の出力変動を生ずる区間
の長さを測定した。第２図中◎は５％以上の出力
変動を生じた区間が全体の２％以下、Δは６〜10
％であることを示す。 In the corrosion resistance test, the tape produced according to the above example was left in a constant temperature and humidity chamber at 60°C and 90% for 1000 hours, and then the change in residual magnetic flux density Br was measured. ◎ in Figure 2
Br decrease is less than 5%, ○ is 5-10%, × is 10%
The above is shown. In addition, to test the characteristic stability of the magnetic layer, recording and reproduction were performed using a home VTR deck, and the length of the section in which the output fluctuation occurred by 5% or more within a tape length of 100 m was measured. In Figure 2, ◎ indicates that the section where output fluctuation of 5% or more occurred is less than 2% of the total, and Δ is 6 to 10.
%.
第３図に、家庭用VTRデツキを用い記録再生
した時の再生出力を示す。本発明のテープNo.４の
再生出力は曲線２０で、比較のため同一条件で作
製したCo−NiテープNo.９の再生出力が曲線２１
で示されている。本発明テープの再生出力は従来
テープNo.８に比べ、同等ないし2dB高い。第２図
中のNo.１，No.２，No.５〜No.８の組成のテープにつ
いてもCo−Niテープ同等以上の再生出力が得ら
れた。 Figure 3 shows the playback output when recording and playing back using a home VTR deck. The playback output of tape No. 4 of the present invention is curve 20, and the playback output of Co-Ni tape No. 9 produced under the same conditions for comparison is curve 21.
is shown. The reproduction output of the tape of the present invention is the same or 2 dB higher than that of conventional tape No. 8. The tapes having the compositions No. 1, No. 2, No. 5 to No. 8 in FIG. 2 also had reproduction outputs equal to or higher than that of the Co-Ni tape.
以上のように、本発明は従来のCo−Niテープ
と比較して、高価なCoの含有量を減らしながら
耐蝕性、膜特性の安定性、再生出力のいずれにお
いても同等以上の性能を持つ磁気記録媒体を提供
し得るものである。 As described above, compared to conventional Co-Ni tapes, the present invention has developed a magnetic tape that has the same or better performance in terms of corrosion resistance, stability of film properties, and playback output while reducing the content of expensive Co. A recording medium can be provided.
第１図は本実施例で用いた蒸着テープの製造装
置の説明図である。第２図は、磁性層の組成と耐
蝕性及び膜特性の安定性のテストの結果を示す表
である。第３図は、第２図のNo.４のテープとCo
−NiテープNo.９の各周波数における再生出力の
比較を示すグラフである。
１…真空槽、２…フイルム巻出し軸、３…フイ
ルム巻り軸、４…中間フリーローラ、５…冷却キ
ヤン、６…蒸着材料、７…蒸着材料収納容器、８
…電子ビーム発生源、９…ポリエチレンテレフタ
レートフイルム、１０…排気装置、１１…防着
板、２０…本発明の実施例の再生出力曲線、２１
…Co−Niの再生出力曲線。
FIG. 1 is an explanatory diagram of a vapor deposition tape manufacturing apparatus used in this example. FIG. 2 is a table showing the composition of the magnetic layer and the results of tests on corrosion resistance and stability of film properties. Figure 3 shows the tape No. 4 in Figure 2 and Co
- It is a graph showing a comparison of reproduction output at each frequency of Ni tape No. 9. DESCRIPTION OF SYMBOLS 1... Vacuum chamber, 2... Film unwinding shaft, 3... Film winding shaft, 4... Intermediate free roller, 5... Cooling can, 6... Vapor deposition material, 7... Vapor deposition material storage container, 8
... Electron beam generation source, 9 ... Polyethylene terephthalate film, 10 ... Exhaust device, 11 ... Deposition prevention plate, 20 ... Reproduction output curve of the embodiment of the present invention, 21
...Co-Ni regeneration output curve.
Claims (1)
た磁性層を有する磁気記録媒体において、前記磁
性層がFeを主成分とし、更にCoを20〜30wt％、
Niを７〜14wt％、Crを１〜6wt％、Cu及びMn
の少なくとも一方の元素を３〜12wt％含み、か
つCu及びMnの少なくとも一方の元素と、Crとの
合計が15wt％以下であることを特徴とする磁気
記録媒体。1. A magnetic recording medium having a magnetic layer formed by a thin film deposition method on a non-magnetic substrate, wherein the magnetic layer contains Fe as a main component, and further contains 20 to 30 wt% of Co.
Ni 7-14wt%, Cr 1-6wt%, Cu and Mn
1. A magnetic recording medium comprising 3 to 12 wt% of at least one of Cu and Mn, and the total of at least one of Cu and Mn and Cr being 15 wt% or less.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58144116A JPS6035329A (en) | 1983-08-06 | 1983-08-06 | Magnetic recording medium |
| US06/637,279 US4835069A (en) | 1983-08-06 | 1984-08-03 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58144116A JPS6035329A (en) | 1983-08-06 | 1983-08-06 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6035329A JPS6035329A (en) | 1985-02-23 |
| JPH053657B2 true JPH053657B2 (en) | 1993-01-18 |
Family
ID=15354559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58144116A Granted JPS6035329A (en) | 1983-08-06 | 1983-08-06 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6035329A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5629A (en) * | 1979-06-15 | 1981-01-06 | Ulvac Corp | Vacuum-evaporated film type magnetic recording substance and its manufacture |
| JPS567231A (en) * | 1979-06-27 | 1981-01-24 | Ulvac Corp | Vapor deposition film type magnetic recording material and its production |
-
1983
- 1983-08-06 JP JP58144116A patent/JPS6035329A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5629A (en) * | 1979-06-15 | 1981-01-06 | Ulvac Corp | Vacuum-evaporated film type magnetic recording substance and its manufacture |
| JPS567231A (en) * | 1979-06-27 | 1981-01-24 | Ulvac Corp | Vapor deposition film type magnetic recording material and its production |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6035329A (en) | 1985-02-23 |
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