JPS6035325A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS6035325A
JPS6035325A JP58144112A JP14411283A JPS6035325A JP S6035325 A JPS6035325 A JP S6035325A JP 58144112 A JP58144112 A JP 58144112A JP 14411283 A JP14411283 A JP 14411283A JP S6035325 A JPS6035325 A JP S6035325A
Authority
JP
Japan
Prior art keywords
magnetic layer
magnetic
recording medium
vapor deposition
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58144112A
Other languages
Japanese (ja)
Other versions
JPH053654B2 (en
Inventor
Takeshi Sawada
武 沢田
Akira Shinmi
親見 晄
Hirotsugu Takagi
高木 博嗣
Kenji Suzuki
謙二 鈴木
Fumio Kishi
岸 文夫
Susumu Kozuki
上月 進
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tohoku Tokushuko KK
Tohoku Steel Co Ltd
Canon Inc
Original Assignee
Tohoku Tokushuko KK
Tohoku Steel Co Ltd
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tohoku Tokushuko KK, Tohoku Steel Co Ltd, Canon Inc filed Critical Tohoku Tokushuko KK
Priority to JP58144112A priority Critical patent/JPS6035325A/en
Priority to US06/635,234 priority patent/US4567116A/en
Publication of JPS6035325A publication Critical patent/JPS6035325A/en
Publication of JPH053654B2 publication Critical patent/JPH053654B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/64Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/65Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
    • G11B5/656Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing Co

Landscapes

  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To attain magnetic characteristics and corrosion resistance which are comparable to or higher than those of a Co-Ni alloy at a low cost by using Fe as the principal component of a magnetic layer to be formed by a thin film deposition method, and adding fixed percentages of Co, Ni and other specified substance to Fe. CONSTITUTION:A magnetic layer is formed by a thin film deposition method such as vapor deposition by induction heating, vapor deposition by resistance heating, vapor deposition with electron beams, sputtering, ion plating or plating using an Fe-base material contg. Co, Ni and at least one among V, Nb, Ta, Mo and W. The desirable composition of the magnetic layer is represented by a formula (Fe1-xCox)1-(a+b)NiaXb, wherein X is at least one among V, Nb, Ta, Mo and W, 0<x<=0.5, 0.05<=a<=0.25, and 0.005<=b<=0.12 (weight ratio). The especially desirable composition consists of, by weight, 2-10% in total of one or more among V, Nb, Ta, Mo and W, 8-20% Ni, 15-40% Co and the balance Fe.

Description

【発明の詳細な説明】 本発明は薄膜堆積法により形成される磁気記録媒体、特
に耐食性の優れた磁気記録媒体に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic recording medium formed by a thin film deposition method, particularly to a magnetic recording medium with excellent corrosion resistance.

近年、真柴蒸着法、スパッタリング法、メッキ法等の薄
膜堆積法により磁気記録媒体を製造する研究開発が活発
化している。これらの製法によって作られた磁気記録媒
体は、■残留磁束密度が高い、■保磁力を大きくできる
、■磁性層を薄くできる等の高密度記録化のための条件
を非常によく満足している。従来、この記録媒体の磁性
材料としては、COとN1を主成分とする合金が主に用
いられており、なかでもOo −20%N1合金が多く
検討されている。その理由はこの合金が比較的耐食性が
良いこと、70W′t%以上のCoを含む合金はり、 
c、 、p構造を持ち、磁気異方性をコントロールしや
すく、面内異方性を卓越させることが容易であるためと
いわれる。しかしながら、この合金はCOを70%以上
、通常は80%前後も含んでいるために極めて高価であ
り、しかもCOは国際情勢の変化により価格が大きく変
動するという問題を有している。また、耐食性も厳しい
環境条件に対しては不十分である。
In recent years, research and development into manufacturing magnetic recording media using thin film deposition methods such as Mashiba deposition, sputtering, and plating have become active. Magnetic recording media made using these manufacturing methods very well satisfy the conditions for high-density recording, such as ■high residual magnetic flux density, ■ability to increase coercive force, and ■ability to make the magnetic layer thinner. . Conventionally, alloys containing CO and N1 as main components have been mainly used as magnetic materials for this recording medium, and among them, an Oo -20% N1 alloy has been widely studied. The reason for this is that this alloy has relatively good corrosion resistance, and the alloy beam containing 70 W't% or more of Co.
This is said to be because it has a c, , p structure, makes it easy to control magnetic anisotropy, and makes it easy to achieve excellent in-plane anisotropy. However, since this alloy contains 70% or more, usually around 80%, of CO, it is extremely expensive, and CO has the problem that its price fluctuates greatly due to changes in the international situation. In addition, corrosion resistance is insufficient for severe environmental conditions.

而して本発明は上記欠点を改善すぺ<、COの含有鼠を
少<シ、安価で安定供給が可能な磁気記録媒体を提供す
るとともに、その磁気特性及び耐食性においても優れた
性能を有する磁気記録媒体の提供を主たる目的とする。
Therefore, the present invention aims to improve the above-mentioned drawbacks, reduce CO content, provide a magnetic recording medium that can be stably supplied at low cost, and has excellent performance in terms of magnetic properties and corrosion resistance. Its main purpose is to provide magnetic recording media.

本発明において、堆積法により形成される磁気記録媒体
は、その磁性層がFeを主成分とし、co及びN1を含
み、さらにV 、 Nb、 Ta、 Mo 、 Wの少
くとも一種を含むことを特徴とするものであり一%誘導
加熱蒸着法、抵抗加熱蒸着法、電子ビーム蒸着法、スパ
ッタリング法、イオンブレーティング法、メッキ法等の
薄膜堆積法を利用して形成できるものである。
In the present invention, a magnetic recording medium formed by a deposition method is characterized in that its magnetic layer mainly contains Fe, contains Co and N1, and further contains at least one of V, Nb, Ta, Mo, and W. It can be formed using a thin film deposition method such as a 1% induction heating evaporation method, a resistance heating evaporation method, an electron beam evaporation method, a sputtering method, an ion blasting method, or a plating method.

磁性層材料として、co元素とFe元素の和が60vr
t%以上でIreが主成分となるようにOo元素をFe
元素に置換することにより磁気的特性は、従来のOo 
−M1合金と同等以上のものが得られることが認められ
た。しかしながら、oo元素をFe元素で置換すること
により耐食性が劣化するが、V、 Nt)、 Ta、 
Mo。
As the magnetic layer material, the sum of Co element and Fe element is 60vr.
Oo element is replaced with Fe so that Ire becomes the main component at t% or more.
By substituting elements, the magnetic properties can be changed from the conventional Oo
-It was recognized that an equivalent or better quality than the M1 alloy could be obtained. However, the corrosion resistance deteriorates by replacing the oo element with the Fe element, but V, Nt), Ta,
Mo.

W元素を単独もしくは適当な比率で混合し添加すること
により磁気特性を損うことなく耐食性においても、従来
のOo−M1合金と同等以上の改善を図ることができた
By adding the W element alone or in a mixture at an appropriate ratio, it was possible to achieve an improvement equal to or higher than that of the conventional Oo-M1 alloy in terms of corrosion resistance without impairing the magnetic properties.

本発明の磁気記録媒体についてさらに詳細に説明する。The magnetic recording medium of the present invention will be explained in more detail.

本発明に用いる磁性材料においてFe元素は原子1個あ
たりの磁気モーメントを高め、Br(残留磁束密度)を
増加させると同時に、展延性ご増し磁性層のワレ、ヒビ
の発生を防止する。一方、前記した如く、Fe元素が増
すと耐食性が急激に悪くなると同時に、残留磁束密度B
rを増加させる効果はむしろ低下する。またN1は耐食
性の改善、及び展延性の向上効果を有し磁性層のワレ、
ヒビの発生を防止する。またV、 N′b 、 Ta、
 Mo、 Wは単独または混合し添加することにより、
耐食性の向上が紹められるとともに磁性層の耐摩耗性改
善にも有効である。ただし添加量が多すぎるとBrが減
少する等磁性層の磁気特性を低下させる。
In the magnetic material used in the present invention, the Fe element increases the magnetic moment per atom, increases Br (residual magnetic flux density), and at the same time increases malleability and prevents the occurrence of cracks and cracks in the magnetic layer. On the other hand, as mentioned above, as the Fe element increases, the corrosion resistance deteriorates rapidly, and at the same time, the residual magnetic flux density B
The effect of increasing r is rather reduced. In addition, N1 has the effect of improving corrosion resistance and spreading property, and prevents cracking of the magnetic layer.
Prevents cracks from forming. Also, V, N'b, Ta,
By adding Mo and W alone or in a mixture,
In addition to improving corrosion resistance, it is also effective in improving the wear resistance of the magnetic layer. However, if the amount added is too large, the magnetic properties of the equimagnetic layer in which Br is reduced will be deteriorated.

以上の結果として良好な磁性層の組成は、(Fez −
x 00x ) l−(a+b) Nia XbXwV
、 IJb、 Ta、 Mo、およびW(7)少くトモ
一種で、重敞組成比が0 < x <0.5 、0.0
5<、 a<o、 25゜およびo、oos<b<o、
12の範囲のものであり、特にV、Wb、’f&、Mo
、Wが単独または合計で2〜1Dwt%。
As a result of the above, a good magnetic layer composition is (Fez −
x 00x ) l-(a+b) Nia XbXwV
, IJb, Ta, Mo, and W (7) are a kind of ash, and the Chongchang composition ratio is 0 < x < 0.5, 0.0
5<, a<o, 25° and o, oos<b<o,
12 ranges, especially V, Wb, 'f&, Mo
, W alone or in total is 2 to 1 Dwt%.

Niが8〜20 wt% 、Ooが1シ(Owt% 、
残りがFeのものが好適である。さらに最適な組成は、
V 、 Wb 。
Ni is 8 to 20 wt%, Oo is 1 shi (Owt%,
It is preferable that the remainder be Fe. Furthermore, the optimal composition is
V, Wb.

Ta、Mo、Wが非独または合計で2〜9 wt%、N
iが10−16wt%、coが20−60wt%残りが
Pg(7)範囲ニアル。
Ta, Mo, and W are non-German or 2 to 9 wt% in total, N
i is 10-16 wt%, co is 20-60 wt%, and the rest is in the Pg(7) range.

以下実施例により本発明を説明する。第1図は磁気記録
媒体の1つである蒸着テープの製造装置を示す。真空槽
1内にフィルム巻出し軸2、巻取り軸6、中間7リーロ
ーラ4、冷却キャン5、蒸着材料収納容器7、電子ビー
ム発生源8が配置されている、Ml 100 mm 、
厚さ15μmのポリエチレンテレフタレートのフィルム
9はフィルム巻出し軸2から中間フリーローラ4及び冷
却キャン5を経てフィルム巻取り軸乙に送られる。蒸着
材料6は蒸着材料収納容器7内に入れられ、冷却キャン
5と対向して配置され、電子ビーム発生源8がらの電子
ビームにより加熱される。加熱された蒸着材料は蒸気流
6′となり冷却キャン5上のフィルム9に付着して磁性
層を形成するが、防着板11によりソU′に制外される
。真空槽1内は排気装置1oにより成膜中の真空度を1
.X10〜5 X 10 Torrに保持した。フィル
ム送り速度は毎分10mで、形成された磁性層の厚さは
ほぼ1000Aである。
The present invention will be explained below with reference to Examples. FIG. 1 shows an apparatus for manufacturing vapor-deposited tape, which is one of the magnetic recording media. A film unwinding shaft 2, a winding shaft 6, an intermediate reel roller 4, a cooling can 5, a vapor deposition material storage container 7, and an electron beam generation source 8 are arranged in a vacuum chamber 1, Ml 100 mm,
A polyethylene terephthalate film 9 having a thickness of 15 μm is sent from the film unwinding shaft 2 to the film winding shaft B via an intermediate free roller 4 and a cooling can 5. The vapor deposition material 6 is placed in a vapor deposition material storage container 7, placed opposite the cooling can 5, and heated by an electron beam from an electron beam generation source 8. The heated vapor deposition material becomes a vapor flow 6' and adheres to the film 9 on the cooling can 5 to form a magnetic layer, but is prevented by the deposition prevention plate 11 from forming the magnetic layer. Inside the vacuum chamber 1, the degree of vacuum during film formation is maintained at 1 by an exhaust device 1o.
.. The pressure was maintained at X10 to 5 X10 Torr. The film feeding speed was 10 m/min, and the thickness of the formed magnetic layer was approximately 1000A.

第2図に、上記方法により作製した蒸着テープの磁性層
の組成と耐食性試験の結果を示す。耐食性試験は上記テ
ープを6ffC,湿度90%の恒温恒湿槽内に100D
時間放置したのち、テープの残留磁束密度11rの変化
を測定することにより行なった。第2図において、◎は
Brの低下が5%未満、0番よ5〜10%、×は10%
以上を表す。
FIG. 2 shows the composition of the magnetic layer of the vapor-deposited tape produced by the above method and the results of the corrosion resistance test. Corrosion resistance test was performed by placing the above tape in a constant temperature and humidity chamber at 6ffC and 90% humidity for 100D.
After allowing the tape to stand for a period of time, the change in residual magnetic flux density 11r of the tape was measured. In Figure 2, ◎ means the decrease in Br is less than 5%, No. 0 means 5-10%, and × means 10%.
represents the above.

第、6図に家庭用VTRデツキを用い記録再生した時の
再生出力を示す。本発明のテープA乙の再生出力を曲線
20で、比較のため同一条件で作製したOo −Niテ
ープA5の再生出力を曲線21で示した。本発明テープ
の再生出力は従来テープA5に比べ同等ないし略2dB
高い。A6テーブのをより)、第2図中の&7、A11
、煮14、A17、A19の組成テープについても良好
な耐食性と同時にGo −Niテープ以上の再生出力が
得られた。
Figure 6 shows the playback output when recording and playing back using a home VTR deck. Curve 20 shows the playback output of tape AB of the present invention, and curve 21 shows the playback output of Oo-Ni tape A5 produced under the same conditions for comparison. The playback output of the tape of the present invention is equivalent to or approximately 2 dB compared to the conventional tape A5.
expensive. (from A6 table), &7, A11 in Figure 2
, Ni-14, A17, and A19 composition tapes also had good corrosion resistance and at the same time, a reproduction output higher than that of the Go-Ni tape was obtained.

以上述べたように、本発明の磁気記録媒体番よFθを主
成分とするために従来のCOを主成分とするQo −N
i合金系記録媒体と比べ、非常に安価になるばかりでな
く、V 、 IJb、 Ta、 Mo、 Wの少(とも
一種を添加することにより、Fθが主成分の磁気記録媒
体の欠点である腐食性を大幅に改善し、0o−Ni系合
金と同等あるいはそれ以上の再生出力、耐食性を有する
ものである。
As mentioned above, since the magnetic recording medium number of the present invention has Fθ as its main component, the conventional magnetic recording medium number Qo −N has CO as its main component.
In addition to being much cheaper than i-alloy recording media, the addition of a small amount of V, IJb, Ta, Mo, and W reduces corrosion, which is a drawback of magnetic recording media whose main component is Fθ. It has a reproduction output and corrosion resistance that are equal to or higher than Oo-Ni alloys.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本実施例に用いた蒸着テープ作製装置の説明
図である。第2図は、磁性層の組成と耐食性テストの結
果の対比を示す表である。第6図は、第2図のA6のテ
ープと、Co−Niテープの再生出力の各周波数におけ
る比較を表わしたグラフである。 1・・・真空槽、2・・・フィルム巻出し軸、6・・・
フィルム看取り軸、4es脅中間7リー四−ラ、5・・
・冷却キャン、6・・・蒸着材料、7・・・蒸着材料収
納容器、80・電子ビーム発生& 、9 ossポリエ
チレンテレフタレートフィルム、10−・排気装置、1
1・・φ防着板、20・・・本発明の実施例の再生出力
曲線、21・拳・Co −Niの再生出力曲線。 才119 手続補正書(方式) ■ 事件の表示 昭和58年 特許願 第 144112 号2 発明の
名称 磁気配録媒体 3 補正をする者 丁イ4Iとの1■係 特許出願人 (lJlli 東京都人III II)f”ド丸子3−
30−21.1) 所 b:++46東全部火t、l(
区Yζ丸f−3−30−2キ十ツノ株式会社内(電話7
5B−2111)5、補正命令の日付 昭和58年11月290 (発送日付)6、補正の対象 明細書 マ、補正の内容 明細書の浄書(内容に変更なし)。
FIG. 1 is an explanatory diagram of the vapor deposition tape manufacturing apparatus used in this example. FIG. 2 is a table showing a comparison between the composition of the magnetic layer and the results of the corrosion resistance test. FIG. 6 is a graph showing a comparison of reproduction outputs of the A6 tape in FIG. 2 and the Co-Ni tape at each frequency. 1... Vacuum chamber, 2... Film unwinding shaft, 6...
Film end-of-life axis, 4es threat middle 7 Lee 4-ra, 5...
・Cooling can, 6... Vapor deposition material, 7... Vapor deposition material storage container, 80・Electron beam generation &, 9 oss polyethylene terephthalate film, 10-・Exhaust device, 1
1..φ adhesion prevention plate, 20.. Reproduction output curve of an example of the present invention, 21. Reproduction output curve of fist.Co-Ni. 119 Procedural amendment (method) ■ Indication of the case 1982 Patent application No. 144112 2 Name of the invention Magnetic recording medium 3 Person making the amendment 1 ■ Person with Ding I 4I Patent applicant (l Jlli Tokyo resident III II) f” Do Maruko 3-
30-21.1) Location b: ++46 East All Tue t, l (
Ward Yζmaru f-3-30-2 Kijutsuno Co., Ltd. (Telephone 7
5B-2111) 5. Date of amendment order: November 290, 1982 (shipment date) 6. Specification subject to amendment, engraving of detailed statement of contents of amendment (no change in content).

Claims (1)

【特許請求の範囲】[Claims] (1)非磁性基板上に薄膜堆積法により形成された磁性
層を有する磁気記録媒体において、磁性層がFθを主成
分とし、coおよびN1を含み、さらにV 、 Nb 
、 Ta、 Mo 、もしくはWの少くとも一種を含む
ことを特徴とする磁気記録媒体。 ■磁性層の組成が (Fθx −x aox) 1−(a+b) Nia 
xbX−V、 Nb、 Ta、 Mo、およびWの少く
とも一種において、重量組成比がO<Xく0.5゜0、
05< a <0.25.および0.005 <b<0
.12テある特許請求の範囲第1項記載の磁気記録媒体
(1) In a magnetic recording medium having a magnetic layer formed by a thin film deposition method on a nonmagnetic substrate, the magnetic layer mainly contains Fθ, contains co and N1, and further contains V and Nb.
, Ta, Mo, or W. ■The composition of the magnetic layer is (Fθx −x aox) 1−(a+b) Nia
xbX-V, at least one of Nb, Ta, Mo, and W, the weight composition ratio is O<
05<a<0.25. and 0.005 <b<0
.. 12. A magnetic recording medium according to claim 1.
JP58144112A 1983-08-06 1983-08-06 Magnetic recording medium Granted JPS6035325A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58144112A JPS6035325A (en) 1983-08-06 1983-08-06 Magnetic recording medium
US06/635,234 US4567116A (en) 1983-08-06 1984-07-27 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58144112A JPS6035325A (en) 1983-08-06 1983-08-06 Magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS6035325A true JPS6035325A (en) 1985-02-23
JPH053654B2 JPH053654B2 (en) 1993-01-18

Family

ID=15354460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58144112A Granted JPS6035325A (en) 1983-08-06 1983-08-06 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS6035325A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS524805A (en) * 1975-07-01 1977-01-14 Fuji Photo Film Co Ltd Production method of magnetic recording media
JPS5629A (en) * 1979-06-15 1981-01-06 Ulvac Corp Vacuum-evaporated film type magnetic recording substance and its manufacture
JPS567231A (en) * 1979-06-27 1981-01-24 Ulvac Corp Vapor deposition film type magnetic recording material and its production

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS524805A (en) * 1975-07-01 1977-01-14 Fuji Photo Film Co Ltd Production method of magnetic recording media
JPS5629A (en) * 1979-06-15 1981-01-06 Ulvac Corp Vacuum-evaporated film type magnetic recording substance and its manufacture
JPS567231A (en) * 1979-06-27 1981-01-24 Ulvac Corp Vapor deposition film type magnetic recording material and its production

Also Published As

Publication number Publication date
JPH053654B2 (en) 1993-01-18

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