JPS6032762Y2 - 拡散キヤリヤガス導入管 - Google Patents

拡散キヤリヤガス導入管

Info

Publication number
JPS6032762Y2
JPS6032762Y2 JP1980025238U JP2523880U JPS6032762Y2 JP S6032762 Y2 JPS6032762 Y2 JP S6032762Y2 JP 1980025238 U JP1980025238 U JP 1980025238U JP 2523880 U JP2523880 U JP 2523880U JP S6032762 Y2 JPS6032762 Y2 JP S6032762Y2
Authority
JP
Japan
Prior art keywords
carrier gas
diffusion
pipe
gas introduction
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980025238U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56129737U (enExample
Inventor
和男 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP1980025238U priority Critical patent/JPS6032762Y2/ja
Publication of JPS56129737U publication Critical patent/JPS56129737U/ja
Application granted granted Critical
Publication of JPS6032762Y2 publication Critical patent/JPS6032762Y2/ja
Expired legal-status Critical Current

Links

JP1980025238U 1980-02-28 1980-02-28 拡散キヤリヤガス導入管 Expired JPS6032762Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980025238U JPS6032762Y2 (ja) 1980-02-28 1980-02-28 拡散キヤリヤガス導入管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980025238U JPS6032762Y2 (ja) 1980-02-28 1980-02-28 拡散キヤリヤガス導入管

Publications (2)

Publication Number Publication Date
JPS56129737U JPS56129737U (enExample) 1981-10-02
JPS6032762Y2 true JPS6032762Y2 (ja) 1985-09-30

Family

ID=29621294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980025238U Expired JPS6032762Y2 (ja) 1980-02-28 1980-02-28 拡散キヤリヤガス導入管

Country Status (1)

Country Link
JP (1) JPS6032762Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59196225U (ja) * 1983-06-15 1984-12-27 オ−ジ−技研株式会社 対向噴流用ノズルを備えた医療浴槽

Also Published As

Publication number Publication date
JPS56129737U (enExample) 1981-10-02

Similar Documents

Publication Publication Date Title
CN209199965U (zh) 一种晶硅太阳能电池生产用负压湿氧扩散装置
GB1329223A (en) Phosphorus diffusion
SE8006214L (sv) Forfarande for diffusionsbeleggning av den inre ytan av ett arbetsstycke
DE602004029049D1 (de) Einrichtung zur leistungsabgabe und hybride kraftstoff-verdampfungseinrichtung hierzu
JPS52149524A (en) Air fuel ratio control device for internal combustion engine
JP2554161B2 (ja) 排ガス処理装置
JPS5246762A (en) Method of boron diffusion of silicon
JPH01108722A (ja) 不純物拡散装置とその使用方法
JPS574235A (en) Catalytic device
JPH0543094Y2 (enExample)
GB995835A (en) Treating exhaust gases of internal combustion engines
JPS5340120A (en) Air supply unit for thermal reactor
JPS5244323A (en) Exhaust gas purification device
JPS60227415A (ja) 気相成長装置
JPS5452341A (en) Liquid fuel combustion device
JPS5628628A (en) Reducing agent injecting device
JPS5615832A (en) Gas mixer
JPS54102864A (en) Diffusion method for impurity
JP2513179Y2 (ja) 縦型cvd装置
JPS51129519A (en) A carburetor
EVANS et al. Dynamics of nutrient concentrations in the Illinois River
JPS54144889A (en) Manufacture for semiconductor device
JPS5268628A (en) Evaporization acceleration device for air inlet pipe
JPS54158860A (en) Thermal processor for semiconductor wafer
JPH047105B2 (enExample)