JPS6032762Y2 - 拡散キヤリヤガス導入管 - Google Patents
拡散キヤリヤガス導入管Info
- Publication number
- JPS6032762Y2 JPS6032762Y2 JP2523880U JP2523880U JPS6032762Y2 JP S6032762 Y2 JPS6032762 Y2 JP S6032762Y2 JP 2523880 U JP2523880 U JP 2523880U JP 2523880 U JP2523880 U JP 2523880U JP S6032762 Y2 JPS6032762 Y2 JP S6032762Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier gas
- diffusion
- pipe
- gas introduction
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2523880U JPS6032762Y2 (ja) | 1980-02-28 | 1980-02-28 | 拡散キヤリヤガス導入管 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2523880U JPS6032762Y2 (ja) | 1980-02-28 | 1980-02-28 | 拡散キヤリヤガス導入管 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56129737U JPS56129737U (cs) | 1981-10-02 |
| JPS6032762Y2 true JPS6032762Y2 (ja) | 1985-09-30 |
Family
ID=29621294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2523880U Expired JPS6032762Y2 (ja) | 1980-02-28 | 1980-02-28 | 拡散キヤリヤガス導入管 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6032762Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59196225U (ja) * | 1983-06-15 | 1984-12-27 | オ−ジ−技研株式会社 | 対向噴流用ノズルを備えた医療浴槽 |
-
1980
- 1980-02-28 JP JP2523880U patent/JPS6032762Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56129737U (cs) | 1981-10-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209199965U (zh) | 一种晶硅太阳能电池生产用负压湿氧扩散装置 | |
| JPS6032762Y2 (ja) | 拡散キヤリヤガス導入管 | |
| JPS6387519A (ja) | 半導体製造装置の排ガス燃焼方法 | |
| GB1329223A (en) | Phosphorus diffusion | |
| JPH0766130A (ja) | 化学的気相成長(cvd)装置 | |
| JPS528974A (en) | Ammonia feeding apparatus | |
| DE602004029049D1 (de) | Einrichtung zur leistungsabgabe und hybride kraftstoff-verdampfungseinrichtung hierzu | |
| JPH0745954Y2 (ja) | 石英炉芯管装置 | |
| JPH01108722A (ja) | 不純物拡散装置とその使用方法 | |
| JPS574235A (en) | Catalytic device | |
| GB995835A (en) | Treating exhaust gases of internal combustion engines | |
| JPS5340120A (en) | Air supply unit for thermal reactor | |
| CN114381807A (zh) | 扩散炉 | |
| JPS626685Y2 (cs) | ||
| CN103225111A (zh) | 一种连续式扩散炉及其通气方法 | |
| JPH06104183A (ja) | Cvd用反応槽 | |
| JPS5244323A (en) | Exhaust gas purification device | |
| JPS5661123A (en) | Diffusion of boron | |
| JPH0324595Y2 (cs) | ||
| JPS57211728A (en) | Manufacture of semiconductor device | |
| JPH02205017A (ja) | 半導体装置の製造装置 | |
| JPS5452341A (en) | Liquid fuel combustion device | |
| JPS57105605A (en) | Catalytic combustion device | |
| JPS5628628A (en) | Reducing agent injecting device | |
| JPS5615832A (en) | Gas mixer |