JPS6031000U - 光照射炉 - Google Patents

光照射炉

Info

Publication number
JPS6031000U
JPS6031000U JP12283783U JP12283783U JPS6031000U JP S6031000 U JPS6031000 U JP S6031000U JP 12283783 U JP12283783 U JP 12283783U JP 12283783 U JP12283783 U JP 12283783U JP S6031000 U JPS6031000 U JP S6031000U
Authority
JP
Japan
Prior art keywords
quartz glass
light irradiation
opening
irradiation furnace
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12283783U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6130154Y2 (enrdf_load_stackoverflow
Inventor
芳樹 三村
荒井　徹治
悟 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP12283783U priority Critical patent/JPS6031000U/ja
Publication of JPS6031000U publication Critical patent/JPS6031000U/ja
Application granted granted Critical
Publication of JPS6130154Y2 publication Critical patent/JPS6130154Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vertical, Hearth, Or Arc Furnaces (AREA)
  • Furnace Details (AREA)
JP12283783U 1983-08-09 1983-08-09 光照射炉 Granted JPS6031000U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12283783U JPS6031000U (ja) 1983-08-09 1983-08-09 光照射炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12283783U JPS6031000U (ja) 1983-08-09 1983-08-09 光照射炉

Publications (2)

Publication Number Publication Date
JPS6031000U true JPS6031000U (ja) 1985-03-02
JPS6130154Y2 JPS6130154Y2 (enrdf_load_stackoverflow) 1986-09-04

Family

ID=30280624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12283783U Granted JPS6031000U (ja) 1983-08-09 1983-08-09 光照射炉

Country Status (1)

Country Link
JP (1) JPS6031000U (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6291433U (enrdf_load_stackoverflow) * 1985-11-28 1987-06-11
JPS63133844U (enrdf_load_stackoverflow) * 1987-02-17 1988-09-01
JPH09167742A (ja) * 1995-12-14 1997-06-24 Shin Etsu Handotai Co Ltd 加熱炉
KR20030025146A (ko) * 2001-09-19 2003-03-28 권영해 반도체소자 제조용 급속 열처리 설비 및 급속 열처리 화학증착 설비의 가열장치.
KR100446695B1 (ko) * 2001-10-17 2004-09-04 김병주 도가니형 저항전기로
WO2019131791A1 (ja) * 2017-12-27 2019-07-04 株式会社米倉製作所 赤外線焼成装置及びこれを用いた電子部品の焼成方法
JP2019120487A (ja) * 2018-12-25 2019-07-22 株式会社米倉製作所 赤外線焼成装置及びこれを用いた電子部品の焼成方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6291433U (enrdf_load_stackoverflow) * 1985-11-28 1987-06-11
JPS63133844U (enrdf_load_stackoverflow) * 1987-02-17 1988-09-01
JPH09167742A (ja) * 1995-12-14 1997-06-24 Shin Etsu Handotai Co Ltd 加熱炉
KR20030025146A (ko) * 2001-09-19 2003-03-28 권영해 반도체소자 제조용 급속 열처리 설비 및 급속 열처리 화학증착 설비의 가열장치.
KR100446695B1 (ko) * 2001-10-17 2004-09-04 김병주 도가니형 저항전기로
WO2019131791A1 (ja) * 2017-12-27 2019-07-04 株式会社米倉製作所 赤外線焼成装置及びこれを用いた電子部品の焼成方法
TWI757166B (zh) * 2017-12-27 2022-03-01 日商米倉製作所股份有限公司 紅外線燒製裝置及使用此裝置之電子部件燒製方法
JP2019120487A (ja) * 2018-12-25 2019-07-22 株式会社米倉製作所 赤外線焼成装置及びこれを用いた電子部品の焼成方法

Also Published As

Publication number Publication date
JPS6130154Y2 (enrdf_load_stackoverflow) 1986-09-04

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