JPS6031000U - light irradiation furnace - Google Patents

light irradiation furnace

Info

Publication number
JPS6031000U
JPS6031000U JP12283783U JP12283783U JPS6031000U JP S6031000 U JPS6031000 U JP S6031000U JP 12283783 U JP12283783 U JP 12283783U JP 12283783 U JP12283783 U JP 12283783U JP S6031000 U JPS6031000 U JP S6031000U
Authority
JP
Japan
Prior art keywords
quartz glass
light irradiation
opening
irradiation furnace
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12283783U
Other languages
Japanese (ja)
Other versions
JPS6130154Y2 (en
Inventor
芳樹 三村
荒井　徹治
悟 福田
Original Assignee
ウシオ電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ウシオ電機株式会社 filed Critical ウシオ電機株式会社
Priority to JP12283783U priority Critical patent/JPS6031000U/en
Publication of JPS6031000U publication Critical patent/JPS6031000U/en
Application granted granted Critical
Publication of JPS6130154Y2 publication Critical patent/JPS6130154Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
  • Vertical, Hearth, Or Arc Furnaces (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図、第２図は本考案実施例の平面断面図、第３図は
同じく正面断面図、第４図は他の実施例の正面断面図で
ある。 １・・・・・・炉体、１ａ・・・・・・出入口、２・・
・・・・ランプ、３・・・・・・主反射部材、４・・・
・・・副反射部材、５・・・・・・加　　　′□熱空間
、６・・・・・・石英ガラス容器、６ａ・・・・・・開
口、７・・・・・・扉、９・・・・・・被処理物（シリ
マンウェハー）、１０・・・・・・石英ガラス板、ＩＩ
Ａ、ＩＩＢ・・・・・・シャッター。 第２図 第３図1 and 2 are plan sectional views of an embodiment of the present invention, FIG. 3 is a front sectional view of the same, and FIG. 4 is a front sectional view of another embodiment. 1...Furnace body, 1a...Entrance/exit, 2...
...Lamp, 3...Main reflecting member, 4...
... Sub-reflection member, 5 ... Heat space, 6 ... Quartz glass container, 6a ... Opening, 7 ... Door, 9 ...Processed object (Siliman wafer), 10... Quartz glass plate, II
A, IIB...Shutter. Figure 2 Figure 3

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ランプの光が照射される加熱空間内に配置される石英ガ
ラス容器の対開口を炉体に設げられた被処理物の出入口
の方向に設け、該出入口を開閉する扉の内面を鏡面とし
、その鏡面の上に石英ガラス板を重ね合せ、閉扉時にこ
の石英ガラス板が該石英ガラス容器の開口に近接するこ
とを特徴とする光照射炉。A counter opening of a quartz glass container disposed in a heating space irradiated with lamp light is provided in the direction of an entrance/exit of the object to be processed provided in the furnace body, and the inner surface of the door for opening/closing the entrance/exit is mirror-finished; A light irradiation furnace characterized in that a quartz glass plate is superimposed on the mirror surface, and the quartz glass plate comes close to the opening of the quartz glass container when the door is closed.
JP12283783U 1983-08-09 1983-08-09 light irradiation furnace Granted JPS6031000U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12283783U JPS6031000U (en) 1983-08-09 1983-08-09 light irradiation furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12283783U JPS6031000U (en) 1983-08-09 1983-08-09 light irradiation furnace

Publications (2)

Publication Number Publication Date
JPS6031000U true JPS6031000U (en) 1985-03-02
JPS6130154Y2 JPS6130154Y2 (en) 1986-09-04

Family

ID=30280624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12283783U Granted JPS6031000U (en) 1983-08-09 1983-08-09 light irradiation furnace

Country Status (1)

Country Link
JP (1) JPS6031000U (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6291433U (en) * 1985-11-28 1987-06-11
JPS63133844U (en) * 1987-02-17 1988-09-01
JPH09167742A (en) * 1995-12-14 1997-06-24 Shin Etsu Handotai Co Ltd Heating furnace
KR20030025146A (en) * 2001-09-19 2003-03-28 권영해 Heating apparatus of rapid thermal annealer and rapid thermal chemical vapor deposition for semiconductor device manufacturing
KR100446695B1 (en) * 2001-10-17 2004-09-04 김병주 crucible type electrical resistance furnace
WO2019131791A1 (en) * 2017-12-27 2019-07-04 株式会社米倉製作所 Infrared baking device and electronic component baking method using same
JP2019120487A (en) * 2018-12-25 2019-07-22 株式会社米倉製作所 Infrared firing device, and method for firing electronic component using the same

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6291433U (en) * 1985-11-28 1987-06-11
JPS63133844U (en) * 1987-02-17 1988-09-01
JPH0539798Y2 (en) * 1987-02-17 1993-10-08
JPH09167742A (en) * 1995-12-14 1997-06-24 Shin Etsu Handotai Co Ltd Heating furnace
KR20030025146A (en) * 2001-09-19 2003-03-28 권영해 Heating apparatus of rapid thermal annealer and rapid thermal chemical vapor deposition for semiconductor device manufacturing
KR100446695B1 (en) * 2001-10-17 2004-09-04 김병주 crucible type electrical resistance furnace
WO2019131791A1 (en) * 2017-12-27 2019-07-04 株式会社米倉製作所 Infrared baking device and electronic component baking method using same
TWI757166B (en) * 2017-12-27 2022-03-01 日商米倉製作所股份有限公司 Infrared baking device and baking method of electronic part using the same
JP2019120487A (en) * 2018-12-25 2019-07-22 株式会社米倉製作所 Infrared firing device, and method for firing electronic component using the same

Also Published As

Publication number Publication date
JPS6130154Y2 (en) 1986-09-04

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