JPS60116231U - photo reactor - Google Patents
photo reactorInfo
- Publication number
- JPS60116231U JPS60116231U JP346884U JP346884U JPS60116231U JP S60116231 U JPS60116231 U JP S60116231U JP 346884 U JP346884 U JP 346884U JP 346884 U JP346884 U JP 346884U JP S60116231 U JPS60116231 U JP S60116231U
- Authority
- JP
- Japan
- Prior art keywords
- lamp
- semiconductor substrate
- shaped
- photoreaction device
- photo reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の光反応装置を示す正面図、第２図Ａは本
考案光反応装置の一実施例を示す正面図、Ｂに同じく、
その要部斜視図、第３図は本考案光反応装置の他の実施
例を示す正面図である。
２１・・・棒状ランプ、２２・・・反射鏡、２３・・・
楕円反射鏡、２４・・・反応室、２５・・・透明石英窓
、２６・・・スリット状焦点、２７・・・半導体基板、
２８，２９・・・移動機構。FIG. 1 is a front view showing a conventional photoreaction device, FIG. 2A is a front view showing an embodiment of the photoreaction device of the present invention, and FIG.
FIG. 3 is a front view showing another embodiment of the photoreaction device of the present invention. 21... Rod-shaped lamp, 22... Reflector, 23...
Elliptical reflecting mirror, 24... Reaction chamber, 25... Transparent quartz window, 26... Slit-shaped focal point, 27... Semiconductor substrate,
28, 29...Movement mechanism.
Claims (1)
部に楕円反射鏡を設けて半導体基板上にスリット状の焦
点を結ぶようにすると゛共に、ランプと照射される半導
体基板間に相対的移動を可能どする駆動機構を設けたこ
とを特徴とする光反応装置。In a photoreaction device that uses a rod-shaped lamp, an elliptical reflector is provided in the lamp light source to form a slit-shaped focal point on the semiconductor substrate, while also allowing relative movement between the lamp and the semiconductor substrate to be irradiated. 1. A photoreaction device characterized by being provided with a drive mechanism for controlling the temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP346884U JPS60116231U (en) | 1984-01-17 | 1984-01-17 | photo reactor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP346884U JPS60116231U (en) | 1984-01-17 | 1984-01-17 | photo reactor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60116231U true JPS60116231U (en) | 1985-08-06 |
Family
ID=30478123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP346884U Pending JPS60116231U (en) | 1984-01-17 | 1984-01-17 | photo reactor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60116231U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379323A (en) * | 1986-09-24 | 1988-04-09 | Hitachi Ltd | Treatment equipment |
| JP2014239181A (en) * | 2013-06-10 | 2014-12-18 | ウシオ電機株式会社 | Ashing apparatus |
-
1984
- 1984-01-17 JP JP346884U patent/JPS60116231U/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379323A (en) * | 1986-09-24 | 1988-04-09 | Hitachi Ltd | Treatment equipment |
| JP2014239181A (en) * | 2013-06-10 | 2014-12-18 | ウシオ電機株式会社 | Ashing apparatus |
| WO2014199808A1 (en) * | 2013-06-10 | 2014-12-18 | ウシオ電機株式会社 | Ashing apparatus |
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