JPS6030927B2 - electrochromic display device - Google Patents
electrochromic display deviceInfo
- Publication number
- JPS6030927B2 JPS6030927B2 JP50114281A JP11428175A JPS6030927B2 JP S6030927 B2 JPS6030927 B2 JP S6030927B2 JP 50114281 A JP50114281 A JP 50114281A JP 11428175 A JP11428175 A JP 11428175A JP S6030927 B2 JPS6030927 B2 JP S6030927B2
- Authority
- JP
- Japan
- Prior art keywords
- transparent conductive
- conductive film
- pattern
- display device
- patterned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
【発明の詳細な説明】
本発明は、透明ガラス基板上に積層をなす透明導電膜お
よびェレクトロクロミツク(以下ECと略す)物質のパ
ターン部の境界面とパターン部以外の絶縁膜の境界面と
が重複することなく、連続して形成されるように絶縁膜
を形成することを目的とする。DETAILED DESCRIPTION OF THE INVENTION The present invention is directed to a transparent conductive film laminated on a transparent glass substrate and an interface between a pattern portion of an electrochromic (hereinafter abbreviated as EC) material and an insulating film other than the pattern portion. The purpose is to form an insulating film so that the insulating films are formed continuously without overlapping.
従来技術では、第1図に示してあるように透明導電膜2
と図では省略してある電解液とが直接接するのを防ぐた
めにA,B,Cの3つの構造が考えられている。In the prior art, as shown in FIG.
Three structures A, B, and C have been considered to prevent direct contact between the capacitor and the electrolytic solution (not shown in the figure).
A図では、透明ガラス基板1にln203、SN02な
どの透明導電膜2をパターン化し、さらにその上にW0
3,MOO3などのEC物質3を透明導電膜2より一回
り大きめにパターン化してあり、B図では透明導電膜2
とEC物質3とが同一パターンに形成されている。さら
にC図ではEC物質3が透明導電膜2より一回り小さめ
にパターン化されている。次にこれら従来構造のもつ欠
点を第2図を用いて説明すると、D図のような構造の場
合確かに透明導電膜6を通してEC物質7に電圧を印加
することによって、EC物質7は可逆的な着色、消色を
行なうが、着色、消色を繰り返しているうちにEC物質
の透明導電膜よりはみ出した部分8が次第に着色された
状態でパターン外周部のふちどりとして残ってしまい、
印加電圧に従った可逆着色、消色現象を行なわないよう
になってしまうという欠点があった。In Figure A, a transparent conductive film 2 such as ln203 or SN02 is patterned on a transparent glass substrate 1, and W0
3. The EC substance 3 such as MOO3 is patterned to be one size larger than the transparent conductive film 2, and in figure B, the transparent conductive film 2
and EC material 3 are formed in the same pattern. Furthermore, in Figure C, the EC material 3 is patterned to be one size smaller than the transparent conductive film 2. Next, to explain the drawbacks of these conventional structures using FIG. 2, in the case of the structure shown in FIG. However, as the coloring and decoloring are repeated, the portion 8 of the EC material that protrudes from the transparent conductive film gradually remains in a colored state as a border around the outer periphery of the pattern.
There was a drawback in that reversible coloring and decoloring phenomena depending on the applied voltage did not occur.
さらにE図およびF図のような構造では、EC物質のう
ち絶縁膜10におおわれている部分11とおおわれてし
、ない部分9とで着色の際の色のつき方が変わってしま
い、パターン内部での着色ムラがおこるという欠点があ
った。本発明は、これら従来技術で問題とされていた着
色状態におけるEC物質の着色ムラをなくするために、
EC物質のパターン境界面とパターン外の絶縁膜の境界
面とが重複せずに、連続して形成されるような構造をも
つように絶縁膜を形成する方法を提供するものである。Furthermore, in the structures shown in Figures E and F, the coloring is different depending on the part 11 that is covered with the insulating film 10 and the part 9 that is not covered with the EC material, and the inside of the pattern is The disadvantage was that uneven coloring occurred. In order to eliminate the uneven coloring of EC substances in the colored state, which was a problem with these conventional techniques, the present invention
The present invention provides a method for forming an insulating film in such a manner that a pattern boundary surface of an EC material and a boundary surface of an insulating film outside the pattern are formed continuously without overlapping.
実施例 1
EC物質が透明導電膜より一回り小さめにパ夕ーン化さ
れている場合を第3図に示す。Example 1 FIG. 3 shows a case where the EC material is patterned to be one size smaller than the transparent conductive film.
まず、透明ガラス基板17上に透明導電膜18をエッチ
ング又はマスク蒸着法などによってパターン状に形成し
、その上にEC物質19を全面に形成する。First, a transparent conductive film 18 is formed in a pattern on a transparent glass substrate 17 by etching or mask vapor deposition, and an EC material 19 is formed on the entire surface.
その後、EC物質上に透明導電膜18より一回り小さな
パターン状にエッチングレジスト20を施し、EC物質
19をエッチングすることにより透明導電膜とEC物質
の積層を形成し、さらにエッチングレジストを残した状
態で実施例1と同様な操作によってパターン上の絶縁膜
21を除去する。実施例1の方法によれば、パターン部
のEC物質とパターン外の絶縁膜とは重複することなく
、連続的に形成され、従来技術で問題とされていたEC
物質境界部の着色ムラを完全に防止することが出来、加
えて透明導電膜と電解液間の電流リークも防止すること
が可能である。Thereafter, an etching resist 20 is applied on the EC material in a pattern one size smaller than the transparent conductive film 18, and the EC material 19 is etched to form a stack of the transparent conductive film and the EC material, with the etching resist remaining. Then, the insulating film 21 on the pattern is removed by the same operation as in Example 1. According to the method of Example 1, the EC material in the pattern part and the insulating film outside the pattern are formed continuously without overlapping, which eliminates the problem of EC material in the prior art.
It is possible to completely prevent uneven coloring at material boundaries, and in addition, it is also possible to prevent current leakage between the transparent conductive film and the electrolyte.
このように本発明によれば、透明導電膜と電解液間の分
離は保証され、さらに着色時のEC物質上の着色ムラを
完全に解決出来、その上に最初にパターン化したエッチ
ングレジストを絶縁膜被膜時のマスクと・して使用出来
るので、マスク蒸着などは比較にならないような精度で
絶縁膜を形成することが可能となる。As described above, according to the present invention, the separation between the transparent conductive film and the electrolyte is guaranteed, and the uneven coloring on the EC material at the time of coloring can be completely solved, and the etching resist that is first patterned on top of it can be insulated. Since it can be used as a mask during film coating, it becomes possible to form an insulating film with a precision that is incomparable to mask vapor deposition.
第1図A,B,Cは夫々従来構造を示す構成図、第2図
は従来構造の詳細を説明する説明図。
第3図は本発明の構造による実施例図。17……透明ガ
ラス基板、18……透明導電膜、19・・・・・・EC
物質、20・・・・・・エッチングレジスト、21・・
・・・・絶縁膜。
才”函
米2図
矛3図FIGS. 1A, B, and C are configuration diagrams showing conventional structures, respectively, and FIG. 2 is an explanatory diagram illustrating details of the conventional structure. FIG. 3 is a diagram showing an embodiment according to the structure of the present invention. 17...Transparent glass substrate, 18...Transparent conductive film, 19...EC
Substance, 20...Etching resist, 21...
...Insulating film. Sai” box rice 2 illustrations spear 3 illustrations
Claims (1)
いる透明導電膜と、該透明導電膜の表面に形成されパタ
ーン化されているエレクトロクロミツク物質と、該エレ
クトロクロミツク物質のパターンを除く全面に形成され
ている絶縁膜とを有するエレクトロクロミツク表示装置
において、前記エレクトロクロミツク物質は、前記透明
導電膜よりも一回り小さくパターン化されており、前記
絶縁膜は前記エレクトロクロミツク物質との重なりを生
ずることなくかつ前記透明導電膜を露出させないように
形成されていることを特徴とするエレクトロクロミツク
表示装置。1. A transparent conductive film formed and patterned on the surface of a transparent glass substrate, an electrochromic material formed and patterned on the surface of the transparent conductive film, and the entire surface excluding the pattern of the electrochromic material. In an electrochromic display device having an insulating film formed thereon, the electrochromic material is patterned to be one size smaller than the transparent conductive film, and the insulating film overlaps with the electrochromic material. An electrochromic display device characterized in that the transparent conductive film is formed so as not to cause the transparent conductive film to be exposed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50114281A JPS6030927B2 (en) | 1975-09-23 | 1975-09-23 | electrochromic display device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50114281A JPS6030927B2 (en) | 1975-09-23 | 1975-09-23 | electrochromic display device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5238947A JPS5238947A (en) | 1977-03-25 |
JPS6030927B2 true JPS6030927B2 (en) | 1985-07-19 |
Family
ID=14633894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50114281A Expired JPS6030927B2 (en) | 1975-09-23 | 1975-09-23 | electrochromic display device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6030927B2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5728165Y2 (en) * | 1977-09-28 | 1982-06-19 | ||
JPS5456082A (en) * | 1977-10-12 | 1979-05-04 | Nitto Electric Ind Co Ltd | Washing method for membrane separator |
JPS6033257B2 (en) * | 1978-05-16 | 1985-08-01 | 株式会社東芝 | display cell |
US4488781A (en) * | 1982-01-25 | 1984-12-18 | American Cyanamid Company | Method for manufacturing an electrochromic display device and device produced thereby |
FR2655642B1 (en) * | 1989-12-11 | 1992-02-28 | Anjou Rech | WATER TREATMENT PLANT BY A TANGENTIAL FILTER LOOP. |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5210747A (en) * | 1975-07-16 | 1977-01-27 | Citizen Watch Co Ltd | Electro-chromic display unit |
JPS5216197A (en) * | 1975-07-29 | 1977-02-07 | Citizen Watch Co Ltd | Electro chromic indicator and a clock with it |
JPS5228293A (en) * | 1975-08-27 | 1977-03-03 | Sharp Corp | Electric colour display unit |
-
1975
- 1975-09-23 JP JP50114281A patent/JPS6030927B2/en not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5210747A (en) * | 1975-07-16 | 1977-01-27 | Citizen Watch Co Ltd | Electro-chromic display unit |
JPS5216197A (en) * | 1975-07-29 | 1977-02-07 | Citizen Watch Co Ltd | Electro chromic indicator and a clock with it |
JPS5228293A (en) * | 1975-08-27 | 1977-03-03 | Sharp Corp | Electric colour display unit |
Also Published As
Publication number | Publication date |
---|---|
JPS5238947A (en) | 1977-03-25 |
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