JPS6028137Y2 - 電子ビ−ム露光装置 - Google Patents

電子ビ−ム露光装置

Info

Publication number
JPS6028137Y2
JPS6028137Y2 JP14107576U JP14107576U JPS6028137Y2 JP S6028137 Y2 JPS6028137 Y2 JP S6028137Y2 JP 14107576 U JP14107576 U JP 14107576U JP 14107576 U JP14107576 U JP 14107576U JP S6028137 Y2 JPS6028137 Y2 JP S6028137Y2
Authority
JP
Japan
Prior art keywords
electron beam
slit
electron
electron gun
beam exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14107576U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5359374U (enExample
Inventor
守孝 中村
洋 安田
保隆 伴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14107576U priority Critical patent/JPS6028137Y2/ja
Publication of JPS5359374U publication Critical patent/JPS5359374U/ja
Application granted granted Critical
Publication of JPS6028137Y2 publication Critical patent/JPS6028137Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP14107576U 1976-10-20 1976-10-20 電子ビ−ム露光装置 Expired JPS6028137Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14107576U JPS6028137Y2 (ja) 1976-10-20 1976-10-20 電子ビ−ム露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14107576U JPS6028137Y2 (ja) 1976-10-20 1976-10-20 電子ビ−ム露光装置

Publications (2)

Publication Number Publication Date
JPS5359374U JPS5359374U (enExample) 1978-05-20
JPS6028137Y2 true JPS6028137Y2 (ja) 1985-08-26

Family

ID=28749853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14107576U Expired JPS6028137Y2 (ja) 1976-10-20 1976-10-20 電子ビ−ム露光装置

Country Status (1)

Country Link
JP (1) JPS6028137Y2 (enExample)

Also Published As

Publication number Publication date
JPS5359374U (enExample) 1978-05-20

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