JPS6027215A - Electromagnetic delay line - Google Patents

Abstract

PURPOSE:To form an extremely small-sized and very high speed electromagnetic delay line by arranging regularly and repeatedly two tracks and positioning the other track on the 2nd virtual center line different from the 1st virtual center line passing the center line of one track. CONSTITUTION:On the main surface of an insulated substrate 7, a folding track 8 is formed and an inductance element 9 is also formed. The track 8 is formed by arranging the 1st track 10 and the 2nd track 11 thiner than the thickness of the track 10 alternately and folding these tracks like squares. In addition, respective tracks 10, 11 are arranged so as to intersect with the virtual axis of the element 9 at right angles. A band-like earth electrode 12 is formed so as to cross the end parts 10a, 11a of respective tracks 10, 11. A capacitor C' connected to the element 9 is formed by the substrate 7, the electrode 12 and the end parts 10a, 11a of the tracks 10, 11 and the concentrate constant type electromagnetic delay line having plural sections is constituted. In such a delay line, a disirable coupling factor between the sections in the element 11 is obtained and an extremely small-sized unit and a very high speed rise characteristic can be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an electromagnetic delay line that combines an inductance element and a capacitor, and particularly to an ultra-small and ultra-high speed electromagnetic delay line suitable for use at ultra-high frequencies.

[Prior art and its problems]

This type of electromagnetic delay line has the configuration shown in FIGS. 1 and 2.

That is, an inductance element 3 is formed by space-winding a conductive wire 2 around a flat rod-shaped pobbin 1 at a predetermined pitch P (referred to as 122 undergrowth P) to form an inductance element 3, and a ground electrode is attached to the main surface of an elongated dielectric plate 4. A capacitor element C is formed by providing a capacitive electrode 6 on the opposite main surface at the same distance as the conducting wire 2, and connecting the capacitive electrode 6 and the conducting wire 2 to form an electromagnetic type having multiple sections. It is.

In both figures, the symbol W is the distance between the centers of two conductors (hereinafter simply referred to as W) in which the current direction differs in the long side direction of the cross section of the bobbin 1, and the symbol T represents the distance between the centers of the conductor wires in which the current direction differs in the short side direction of the cross section. It shows the distance between the two centers (hereinafter simply referred to as T).

The electromagnetic delay line configured in this way has P and T with respect to W.
By reducing the dimensions of P and T and selecting relatively close dimensions, it is possible to obtain a desirable coupling coefficient between the sections in the inductance element 3, resulting in good delay characteristics. can get things.

However, in order to realize an ultra-small and ultra-high-speed electromagnetic delay line, it is necessary to increase the winding density of the conducting wire 2 to reduce the dimension P and also to decrease the dimension T.

However, in order to suppress the loss of the inductance element 3 and maintain ultra-high speed performance, it is not possible to reduce the cross-sectional area of the conductor 2, so in order to reduce the dimension of T, the thickness of the bobbin 1 must be made extremely thin. , there are limits to that as well.

Therefore, there is a limit to realizing an ultra-small and ultra-high speed electromagnetic delay line by reducing both the dimensions of P and T.

[Purpose of the invention]

The present invention was made under these circumstances, and it is possible to reduce both the dimensions corresponding to P and T mentioned in 11 in the inductance element, thereby making it possible to achieve ultra-miniaturization and ultra-high speed. , and aims to provide an electromagnetic delay line with a simple structure.

[Structure and effects of the invention]

In order to achieve this object, the present invention provides an electromagnetic delay line comprising an inductance element formed of a bent line and a capacitor connected between the bent line and the ground. A line that intersects with the virtual axis is a first line,
A second line having a thickness different from the thickness of the first line is regularly and repeatedly arranged.
The center of the second line is located on a second virtual center line that is different from the first virtual center line that passes through the center of the line.

According to such a configuration of the present invention, the inductance element, which is formed substantially planar without the bobbin, has center positions of the first line and the second line, which has a thickness different from that of the first line. Since the wires are shifted, it has the same effect as a structure in which a conductive wire is wound around a bobbin.

By appropriately selecting the distance between the virtual center lines passing through the centers of the first and second lines, it is possible to reduce the dimensions corresponding to P and T of the electromagnetic delay line in FIG. .

Therefore, it is extremely easy to ensure a desirable coupling coefficient of the inductance element and to achieve ultra-miniaturization and ultra-high speed of the electromagnetic delay line.

Furthermore, since the inductance element can be configured in a planar manner, highly accurate microfabrication is easy, the structure is simple, and mass productivity is good.

[Embodiments of the invention]

The present invention will be explained in detail below.

3 and 4 are a front view and a partially sectional view showing an embodiment of the present invention.

In both figures, a bent line 8 is formed on the whole surface (upper surface in the figures) of a flat and elongated insulating substrate 7 made of a dielectric material such as ceramic, and an inductance element 9 is formed.

The bent line 8 is formed by alternately arranging a first line 10 and a second line 11 thinner than the first line IO and folding them back into a rectangular shape. Each of the lines 10 and 11 of 2 is the virtual axis of the inductance element 9, that is, the horizontal direction in the figure (direction of arrow A)
is arranged perpendicular to the

The main surface (lower surface in the figure) opposite to the surface on which the bent line 8 is formed on the insulating substrate 7 has end portions 10a, l of the first and second lines 10.11 along the virtual axis line.
A band-shaped ground electrode 12 is formed so as to cross la.

A capacitor C' connected to the inductance element 9 is formed by the insulating substrate 7, the ground electrode 12, and the one end portions 10a and 11a of the line, thereby configuring a lumped constant type electromagnetic delay line having a plurality of sections. Therefore, line 1
One end portion 10a, lla of 0.11 mm functions as a capacitive electrode of a capacitor C'.

Note that the symbol P in FIG. 4 indicates, for example, the adjacent first line 10.
This corresponds to the pitch P of the electromagnetic delay line in FIG. 1 mentioned above.

Further, the first and second lines 10.11 having different thicknesses can be easily formed by electroforming, for example, as follows.

That is, a bent line having the same thickness as the second line 11 described above is formed on the upper surface of the insulating substrate 7 by spuckling. After that, the portion of the insulating substrate 7 where there is no bent line and the line 1 of the bent line middle box 2 are
A photoresist layer is formed on both of the conductors at the position corresponding to the first line 10 for masking, and then the thickness of the conductor at the position corresponding to the first line 10 is increased by electroforming to form the conductor to a predetermined thickness.

Note that when using the electroforming method, the insulating substrate 7
It is also possible to thicken a predetermined conductor portion by using only a bent line made of a simple conductive plate.

In the electromagnetic delay line configured in this way, as shown in FIG. A straight line RR can be drawn as a second virtual center line passing through each center of the second line 11 which is thinner than the thickness.

Then, a gap T occurs between the straight line Q-Q and the straight line R-R. This interval T is the T of the electromagnetic delay line shown in FIG.
The inductance element 9 can achieve the same effect as that obtained by winding the conducting wire 2 around the bobbin 1 in an isometric manner.

Moreover, T is not obtained through the bobbin 1 as shown in FIG. 1, but can be arbitrarily selected, especially finely, by appropriately selecting the thickness of the first and second lines 10 and 11. It is.

Therefore, it is possible to make the dimensions of P and T extremely small while ensuring the thickness of the first and second lines 10.11 to a certain extent, and it is possible to obtain a desirable coupling coefficient between the sections in the inductance element 9, as well as It is possible to obtain good delay characteristics, such as ultra-fast rise characteristics, with a small size.

5 and 6 show another embodiment of the electromagnetic delay line of the present invention.

A bent line-path 13 having the same thickness as the second line 11 described above is formed on the upper surface of the insulating substrate 7, and the conductive top 14 of the comb-shaped conductor 15 cantilever-supports the conductive top 14 in the same pinch. As shown in Figure 6, the bent track 1
3 and electrically connect the base of the conductive top 14 to S.
The supporting portions are separated by cutting at -S, and the thickness of the first line 1o is made thicker than the thickness of the second line 11.

Incidentally, since the capacitor C' is the same as that in the embodiment described above, its illustration is omitted.

FIGS. 7 and 8 further show other embodiments of the present invention.

In this embodiment, both ends of each conductive top 16 in the comb-shaped conductor 15 are bent to form a trapezoid shape, and the bent ends are used as a fifth conductive top 16 as an auxiliary line.
An inductance element 9 is formed by connecting to a conductor at a position corresponding to the first line 10 on a bent line 13 as shown in the figure, and stacking a conductive layer 16 on the conductor at intervals between both ends. An electromagnetic delay line is constructed using an inductance element 9. Note that the illustration of the capacitor C' is also omitted in this embodiment.

In the inductance element 9 having such a configuration, the center of the first line 10 is located at the center between the conductor of the bent line 13 and the conductive layer 16, and the first line 10 passing through each center
A straight line Q-Q as a virtual center line and a straight line R-R as a second virtual center line passing through the center of the second line 11 can be drawn. Then, as in the above embodiment, this straight line Q-Q
A distance T is formed between and the straight line RR.

In this way, in the present invention, the first line 10 of the inductance element 9 is made of conductive material so that the thickness of the conductor is substantially increased (not limited to the case where the auxiliary conductor is overlapped at intervals and is formed on equal sides). Even if the thickness is increased, the object of the present invention can be achieved.

In addition, in the present invention, it is possible to configure not only the rectangular bent line 8 but also a staggered bent line, and the first and second lines 10 intersecting with the virtual axis of the inductance element 9. .11 thickness may be made different.

Furthermore, the present invention is not limited to the example in which the simple single-layer solenoid-shaped inductance element 3 shown in FIG. 1 is configured in a planar manner as in the above-described embodiments, but can be implemented in various configurations.

For example, as shown in FIGS. 9 and 10, an inductance element in which a conductive wire 2 is space-wound in a single-layer solenoid shape such that the opposing surfaces between adjacent sections are alternately widened in opposite directions and face each other. According to the invention, it is also possible to configure the bobbin 3 in a planar manner without using the bobbin 1.

That is, the inductance element 1 constituting the electromagnetic delay line
7, as shown in FIGS. 11 and 12, two first and second lines 18 and 19 are arranged alternately in succession on the upper surface of the insulating substrate 7 in the direction of the virtual axis of the inductance element 17. , and is formed by bending the first and second lines 18 and 19 so as to connect them in series alternately.

In other words, a second line 19 is bent and formed following the first line 18 toward the right from the center of both figures, and a second line 19 is formed by bending to the left following this second line 19. The first line 18 is bent back and then the second line 19 is bent rightward at a distance S+G, and these steps are repeated.

Note that the portion where the first and second lines 18 and 19 intersect is electrically isolated by an insulator N20. Further, one bent portion of each of the first and second lines 18 and 19 becomes capacitive electrodes 18a and 19a of equal capacity, forming a capacitor C' facing the ground electrode 12, and forming an electromagnetic delay line. has been done.

An electromagnetic delay line having this configuration can be easily formed by the electroforming method described above. However, in the part where the first and second lines 18.19 intersect, one of the first or second lines 18.19 is cut and separated in the middle, and the other line 18.19 passes between them. After forming an insulating layer on this intersection by sputtering,
This is completed by connecting the cut and separated lines 18 and 19 in the process of increasing the thickness of the first line 18 by electroforming.

By the way, in the conventional inductance element consisting of a bent line with a uniform thickness, the inductance value tends to be small compared to the length of the conductor part, but the inductance element 9 used in the present invention, that is, the first The inductance value can be increased by configuring the inductance element with a bent line that is a combination of a line 10 and a second line 11 having a thickness different from that of the first line 10.

As explained above, the electromagnetic delay line of the present invention both has the following features:
Since the center of the second line is located on a second imaginary center line that is different from the first imaginary center line that passes through the center of the first line, the bobbin is omitted and the first and second line are disconnected. It is possible to make both P and T extremely small while keeping the area large.

Therefore, it is possible to achieve ultra-miniaturization and ultra-high speed, improve precision microfabrication and mass productivity, and simplify the structure.

[Brief explanation of drawings]

1 and 2 are a front view (partially shown in cross section) and a side view of an electromagnetic delay line that serves as a reference for the present invention, and FIGS. 3 and 4 are an embodiment of the electromagnetic delay line of the present invention. 5 and 6 are perspective views showing an example of the method for manufacturing an electromagnetic delay line according to the present invention, and FIGS. 7 and 8 show other embodiments of the present invention. FIGS. 9 and 10 are a front view and a plan view showing another electromagnetic delay line that is a reference for the present invention, and FIGS. FIG. 7 is a front view and a partially sectional view showing still another embodiment of the invention. 1...Bobbin 2...Conductor (conductor wire) 3.9.17...Inductance element 4.7...Insulating substrate (dielectric plate) 5.12...・
- Earth electrode 6.10a', Ila, 18a, 19a... Capacitive electrode 8.13... Bent line 10.18... First line 11.19... Second line 14.16 ...Conductivity technique 15...Comb-shaped conductor 20...Insulating layer CXC'...Capacitor patent applicant Elmec Corporation 7171 Reverse O 2 Field O 3 A +0 10a 11a No. 4 Figure 7 C12 O 5 Lower I-6th A'7 Reverse O 8 Field (10)

Claims (4)

[Claims] (1) In an electromagnetic delay line comprising an inductance element formed of a bent line and a capacitor connected between the bent line and the ground, a line of the bent line that intersects with the virtual axis of the inductance element is a A first line and a second line having a thickness different from that of the first line are regularly and repeatedly arranged, and the line is different from a first virtual center line passing through the center of the first line. An electromagnetic delay line characterized in that the center of the second line is located on a second virtual center line. (2) The electromagnetic delay line according to claim 1, wherein the first and second lines are alternately formed. (3) The electromagnetic delay line according to claim 1, wherein a plurality of first and second lines are each formed in succession. (4) The first line is formed by superimposing an auxiliary line at intervals on a line that intersects with the virtual axis of the inductance element, and connecting both ends of the auxiliary line to the line, and isometrically forming the first line. The electromagnetic delay line according to any one of claims 1 to 3, wherein the thickness of the second line is greater than that of the second line.