JPS5921522Y2 - Lumped constant circulator - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a structure of a lumped constant circulator, particularly suitable for its integration.

Lumped constant circulators are widely used as small nonreciprocal circuit elements in the VHF band, UHF band, or microwave band.

On the other hand, in recent years, there has been an active movement toward integration in these frequency bands, and lumped constant circulators are no exception.

However, when integrating a lumped constant circulator, a mesh-like junction inductor including a large number of crossovers must be formed, and there are various problems in its fabrication.

For example, the structure of a conventional general triple-button lumped constant circulator is illustrated using a cross-sectional view (Figure 1) showing the most commonly used terminal, and a perspective view of its upper and lower substrates (Figure 2). explain.

A conventional triplate type lumped constant circulator has a network of junction inductors 11, 12, 13 that are symmetrically coupled to each other between ferrimagnetic substrates 1 and 1' and do not contact each other at their intersections. 21.22.2 and one end of each parallel capacitor for eigenvalue adjustment
3 to the terminals 31.32.33, and the other ends are all connected to the grounding conductor terminals 41.41', 42.42', 43.43' provided continuously to the grounding conductors 4, 4'. It is constructed by making it possible to apply a DC magnetic field of an appropriate magnitude perpendicularly to the ferrimagnetic substrates 1 and 1' by means of magnets 5 and 5' provided outside the ground conductor.

As can be seen from FIG. 2, the junction inductors 11, 12, and 13 are arranged in a net shape so that they do not touch each other at the intersections, so it is possible to integrate and manufacture a crossover structure with multiple intersections as easily as possible. is necessary.

Conventionally, such junction inductors have been integrated by forming them on one ferrimagnetic substrate using thin film integration techniques such as vapor deposition, sputtering, plating, or photoetching.

However, in that case, the crossover is first insulated between the upper and lower crossover conductors using a dielectric thin film;
Or secondly, an air crossover (or beam crossover) in which the upper cross conductor is suspended in the air and crossed over.
It was manufactured using methods such as

However, the first method using a dielectric thin film is not practical because it is easy to manufacture, has good insulation properties, and has a low dielectric constant that allows the film to be thick enough to reduce crossover capacitance. It was scarce.

On the other hand, the method of bridging the second cross conductor in the air is not only complicated to manufacture, but also lacks the reliability and stability of the cross-over part. In the case of a type circulator, the vertical symmetry with respect to the junction inductor is likely to be lost, and radiation loss is likely to occur.

The purpose of this invention is to eliminate the above-mentioned conventional drawbacks.
The object of the present invention is to provide an easy and stable integrated lumped constant circulator.

According to the present invention, in a lumped constant circulator composed of a bonded inductor, a ferrimagnetic substrate, and a grounded conductor plate that are sequentially arranged perpendicular to the magnetic field in a DC magnetic field, the mesh-shaped bonded inductor conductor is connected to two ferrimagnetic substrates. Conductors that intersect each other are formed on separate substrates, and these conductors are sandwiched between contact conductor pieces that have a certain thickness and are placed on the non-intersecting parts of the conductors. A lumped constant circulator is obtained in which the conductors on the side substrates are arranged to face each other so as to be in contact with each other, and the conductors on the side substrates intersect each other in a net shape, but do not come into contact with each other at the crossing points, thereby forming a junction inductor.

The present invention will be explained using an embodiment of the present invention shown in FIGS. 3 and 4.

FIG. 3 is a plan view showing the arrangement of bonded inductor conductors and the like formed on the surfaces of two ferrimagnetic substrates, and the two substrates are to be folded and faced with respect to line 00'.

FIG. 4 shows a cross section of the circulator constructed in such a manner that it is cut along a plane including line AA' in FIG. 3.

In FIG. 3, on the ferrimagnetic substrate 101 are symmetrical junction inductor conductor pieces 111a, 111111b,
111C, 112a, 112b, 112C, 11
3a, 113b, 113C are formed, and terminals 131.132.133 and grounding conductor pieces 141.3 are formed, respectively.
142.143 is also included.

Similarly, symmetrical junction inductor conductor pieces 111a', 1llb', 1 are also formed on other ferrimagnetic substrates 101'.
12a', 112 b', 113 a', 113
b' and a grounding conductor piece 141'.

142' and 143' are formed.

These two ferrimagnetic substrates are folded about the line 00', and the bonded inductor conductor pieces then come into contact with each other through the 24 contact conductors 106 shown on the conductor pieces of the ferrimagnetic substrate 101'. Three junction inductors are formed which intersect with each other in a net shape.

A part of such a state is shown in the cross-sectional view of FIG.

In the figure, for example, 111a and 112b', 111
a' and 113b, 111 b, 111 b and 11
2 b', 111 b' and 113a intersect without contacting each other, and moreover, the contact conductor piece 106 allows 111 ajllllll a', 11To, b,
111 b'.

All of the inductor conductor pieces of 111C are electrically connected to form one junction inductor.

Even if it lies on the remaining inductor conductor piece, 112 a, 1
12a', 112b, 112b'.

112C group and 113a, 113a', 113
b, 113b', and part of 113C are two separate junction inductors, and a three-terminal lumped constant circulator is constructed in which a total of three junction inductors intersect with each other in a net shape.

In FIG. 4, 108 indicates the direction of the DC magnetic field.

In addition, the grounding conductor pieces 141, 142, 143 and 141', 142', and 143' shown in FIG.
4' conducts.

Note that the eigenvalue adjustment capacitor is omitted in FIGS. 3 and 4.

For contact conductors and their connection methods, for example, face bonding technology, which is currently being developed as an integrated circuit technology, is applied to form a face-puntable metal block of gold, aluminum, etc. to a sufficient thickness on a part of the bonded inductor conductor. Alternatively, a thin solder layer may be formed on the surface of a bonded inductor conductor with a partially thickened layer to thermally connect the bonded inductor conductor.

In the present invention, since a dielectric film is not used in the crossover section, an integrated lumped constant circulator can be easily manufactured using only the current integration technology using conductive thin films, and unnecessary capacitance can be reduced.

In addition, in this invention, all the conductors are on the ferrimagnetic substrate, and the structure is not such that the conductors intersect with each other, partially floating in the air as in an air crossover, so the reliability of the characteristics and Extremely reproducible.

In addition, in the case of the embodiment shown in FIGS. 3 and 4, the patterns of the bonded inductor conductor pieces formed on the two ferrimagnetic substrates are different for the sake of explanation, By making the conductor piece itself a part of the contact conductor, it is also possible to have completely the same pattern.

In that case, wear a photo-etching mask.

Furthermore, the circulator itself is completely symmetrical on both sides of the junction inductor, reducing radiation loss.

In the embodiment of the present invention, the most common three-terminal triplate type lumped constant circulator is shown, but the present invention can also be used when the number of terminals is increased or when a microstrip type circulator is used that eliminates one ground conductor plate. It goes without saying that the principles of the invention can be applied as is.

FIG. 5 is a diagram showing a second embodiment of this invention, in which this invention is applied to a microstrip type three-terminal lumped constant circulator.

In FIG. 5, high-frequency input/output terminals 231, 232, and 233 are arranged on a ferrimagnetic substrate 201, forming three-fold rotational symmetry.

A part of a junction inductor is formed.

Since there is three-fold rotational symmetry, one set of the junction inductors connected to the input output terminal 231 are 211a and 211b.

The terminal end of this junction inductor is short-circuited through a through hole 209 to a ground conductor 208 formed on the entire back surface of the ferrimagnetic substrate 201.

On the other hand, on another ferrimagnetic substrate 201', another part of the junction inductor is also formed in a three-fold rotationally symmetrical form, and one set leading to the input output terminal 231 is connected to the inductor 211a.
', 211 b'.

The junction inductors on this ferrimagnetic substrate 201' are arranged in the same three-fold symmetrical shape as shown by the arrow, and one set is 2063.206a', 206b and 206b'.
A contact conductor piece having a sufficient thickness is sandwiched between the contact conductor pieces shown in FIG. .

For example, in one junction inductor leading to the inlet/output terminal 231, a conductor connected to 211a-206a'-211b' and a conductor connected to 211a'-206b'-21lb form two conductors in ten rows. are connected at both ends by conductor pieces 206a and 206b to form one junction inductor.

By using such a face-down punching type structure, a microstrip type lumped constant circulator can be easily fabricated and is operated by an applied magnetic field perpendicular to the substrate.

In some cases, parallel capacitors for adjusting rotary excitation eigenvalues are used at the introduction/output terminal points, but are omitted here.

Generally, the band characteristics of a lumped constant circulator are proportional to the inductance of its junction and the irreversible filling factor.

Generally, a microstrip type circulator has the advantage of having a larger inductance than a triplate type circulator, but has the disadvantage of having a smaller irreversible filling factor.

However, in the microstrip type circulator according to the second embodiment, since there is no ground conductor on the top surface of the ferrimagnetic substrate, there is no effect of canceling the inductance due to the current flowing on the ground conductor, so the inductance is equal to that of a normal micro-circulator. The same size as the strip type can be obtained.

In addition, since the irreversible filling factor is equipped with a ferrimagnetic material, which is not found in ordinary microstrip types, characteristics equivalent to those of the triplate type can be obtained.

That is, the second embodiment takes advantage of the respective advantages of the microstrip type and the triplate type, and has the features of being easy to manufacture and having good band characteristics.

Furthermore, if the band characteristics are not particularly important, one of the ferrimagnetic materials 201 and 201' may be replaced with a dielectric material.

In this case, there is an advantage that materials are easier to obtain.

In addition, if a transparent dielectric material is used in that case, alignment during overlapping becomes easier.

[Brief explanation of the drawing]

FIGS. 1 and 2 are a schematic cross-sectional view of a conventional integrated three-terminal lumped constant circulator and a perspective view of the conventional integrated three-terminal lumped constant circulator exploded into two substrates. In the figures, the same symbols are used to represent the same parts. 1, 1' are phenomagnetic substrates, 4, 4' are ground conductors, 4
1.41', 42°42', 43.43' are ground conductor terminals connected to the ground conductor, 5.5' is a magnet, 11.1
2.13 is a junction inductor, 31°32, 33 are terminals,
21, 22, and 23 indicate parallel capacitances for eigenvalue adjustment. FIGS. 3 and 4 show an embodiment of the present invention, a plan view exploded into two substrates, and a partial sectional view of a lumped constant circulator. In the figures, common symbols are used for identical parts. 101.101' is a ferrimagnetic substrate, 104.104
' is a ground conductor, 106 is a conductor piece, 111a to 113a,
111b-113b, 111C-113C, 11
1111a' to 113a', 111b' to 11
3b'. 111C' to 113C' are junction inductor conductors, 131
．． 132°133 is a terminal, 141.142.143.1
41', 142', 143' are ground conductor pieces, 108
indicates the direction of the magnetic field. FIG. 5 is an exploded perspective view showing a second embodiment of the present invention.
01.201' is a ferrimagnetic substrate, 231.232.
233 is a high frequency input/output terminal, 211 a, 211
b, 211a', 211b' are the parts 206a, 206b, 20 of one junction inductor, respectively.
6a' and 206b' are contact conductor pieces, 209 is a through hole, and 208 is a ground conductor.

Claims (1)

[Scope of utility model registration request] The intersecting conductor portions constituting the mesh-like bonded inductor conductor are formed separately on separate ferrimagnetic substrates, and a contact conductor piece is attached to the non-intersecting conductor portions on the two ferrimagnetic substrates. the other ferrimagnetic substrate through the conductor piece so that the conductor portions provided on the substrate are in contact with each other, and the conductors on the two ferrimagnetic substrates intersect in a net shape. 1. A lumped constant circulator, characterized in that the circulators are arranged so that the respective points of intersection do not come into contact with each other, and constitute a junction inductor.