JPS60260393A - 微細パターンの光加工方法 - Google Patents
微細パターンの光加工方法Info
- Publication number
- JPS60260393A JPS60260393A JP59117539A JP11753984A JPS60260393A JP S60260393 A JPS60260393 A JP S60260393A JP 59117539 A JP59117539 A JP 59117539A JP 11753984 A JP11753984 A JP 11753984A JP S60260393 A JPS60260393 A JP S60260393A
- Authority
- JP
- Japan
- Prior art keywords
- light
- conductive film
- wavelength
- optical processing
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims description 10
- 239000000758 substrate Substances 0.000 claims abstract description 9
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910001887 tin oxide Inorganic materials 0.000 claims abstract description 6
- 229910003437 indium oxide Inorganic materials 0.000 claims abstract description 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 230000001678 irradiating effect Effects 0.000 claims abstract description 3
- 239000011347 resin Substances 0.000 claims abstract description 3
- 229920005989 resin Polymers 0.000 claims abstract description 3
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 3
- 229910052751 metal Inorganic materials 0.000 claims abstract 2
- 239000002184 metal Substances 0.000 claims abstract 2
- 238000003672 processing method Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 abstract description 5
- 239000010453 quartz Substances 0.000 abstract description 3
- 239000000470 constituent Substances 0.000 abstract 1
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/24—Ablative recording, e.g. by burning marks; Spark recording
Landscapes
- Liquid Crystal (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59117539A JPS60260393A (ja) | 1984-06-08 | 1984-06-08 | 微細パターンの光加工方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59117539A JPS60260393A (ja) | 1984-06-08 | 1984-06-08 | 微細パターンの光加工方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4193006A Division JPH05196949A (ja) | 1992-06-26 | 1992-06-26 | 微細パターンの光加工方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60260393A true JPS60260393A (ja) | 1985-12-23 |
| JPH0356557B2 JPH0356557B2 (enrdf_load_stackoverflow) | 1991-08-28 |
Family
ID=14714295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59117539A Granted JPS60260393A (ja) | 1984-06-08 | 1984-06-08 | 微細パターンの光加工方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60260393A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05196949A (ja) * | 1992-06-26 | 1993-08-06 | Semiconductor Energy Lab Co Ltd | 微細パターンの光加工方法 |
| WO1997011589A1 (de) * | 1995-09-21 | 1997-03-27 | Fa. Lpkf Cad/Cam Systeme Gmbh | Beschichtung zur strukturierten erzeugung von leiterbahnen auf der oberfläche von elektrisch isolierenden substraten |
| US6149988A (en) * | 1986-09-26 | 2000-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Method and system of laser processing |
| US6261856B1 (en) | 1987-09-16 | 2001-07-17 | Semiconductor Energy Laboratory Co., Ltd. | Method and system of laser processing |
| US6404476B1 (en) | 1989-09-01 | 2002-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Device having an improved connective structure between two electrodes |
| JP2015004840A (ja) * | 2013-06-21 | 2015-01-08 | スタンレー電気株式会社 | 透明電極を有する電気装置とその製造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55113141A (en) * | 1979-02-24 | 1980-09-01 | Fujitsu Ltd | Photo recording medium |
| JPS5670984A (en) * | 1979-11-15 | 1981-06-13 | Toppan Printing Co Ltd | Laser engraving method and mask sheet used therefor |
| JPS5672445A (en) * | 1979-11-19 | 1981-06-16 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Production of photomask |
| JPS5763291A (en) * | 1980-10-03 | 1982-04-16 | Tdk Corp | Optical recording medium |
-
1984
- 1984-06-08 JP JP59117539A patent/JPS60260393A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55113141A (en) * | 1979-02-24 | 1980-09-01 | Fujitsu Ltd | Photo recording medium |
| JPS5670984A (en) * | 1979-11-15 | 1981-06-13 | Toppan Printing Co Ltd | Laser engraving method and mask sheet used therefor |
| JPS5672445A (en) * | 1979-11-19 | 1981-06-16 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Production of photomask |
| JPS5763291A (en) * | 1980-10-03 | 1982-04-16 | Tdk Corp | Optical recording medium |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6149988A (en) * | 1986-09-26 | 2000-11-21 | Semiconductor Energy Laboratory Co., Ltd. | Method and system of laser processing |
| US6261856B1 (en) | 1987-09-16 | 2001-07-17 | Semiconductor Energy Laboratory Co., Ltd. | Method and system of laser processing |
| US6404476B1 (en) | 1989-09-01 | 2002-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Device having an improved connective structure between two electrodes |
| US6956635B2 (en) | 1989-09-01 | 2005-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal device and manufacturing method therefor |
| JPH05196949A (ja) * | 1992-06-26 | 1993-08-06 | Semiconductor Energy Lab Co Ltd | 微細パターンの光加工方法 |
| WO1997011589A1 (de) * | 1995-09-21 | 1997-03-27 | Fa. Lpkf Cad/Cam Systeme Gmbh | Beschichtung zur strukturierten erzeugung von leiterbahnen auf der oberfläche von elektrisch isolierenden substraten |
| JP2015004840A (ja) * | 2013-06-21 | 2015-01-08 | スタンレー電気株式会社 | 透明電極を有する電気装置とその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0356557B2 (enrdf_load_stackoverflow) | 1991-08-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |