JPS60259374A - 低圧研磨装置 - Google Patents

低圧研磨装置

Info

Publication number
JPS60259374A
JPS60259374A JP11371684A JP11371684A JPS60259374A JP S60259374 A JPS60259374 A JP S60259374A JP 11371684 A JP11371684 A JP 11371684A JP 11371684 A JP11371684 A JP 11371684A JP S60259374 A JPS60259374 A JP S60259374A
Authority
JP
Japan
Prior art keywords
grinding wheel
polishing
grindstone
axis
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11371684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0420741B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Seido Koda
幸田　盛堂
Koji Ishibashi
幸治 石橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Kiko Co Ltd
Original Assignee
Osaka Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Kiko Co Ltd filed Critical Osaka Kiko Co Ltd
Priority to JP11371684A priority Critical patent/JPS60259374A/ja
Publication of JPS60259374A publication Critical patent/JPS60259374A/ja
Publication of JPH0420741B2 publication Critical patent/JPH0420741B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP11371684A 1984-06-01 1984-06-01 低圧研磨装置 Granted JPS60259374A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11371684A JPS60259374A (ja) 1984-06-01 1984-06-01 低圧研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11371684A JPS60259374A (ja) 1984-06-01 1984-06-01 低圧研磨装置

Publications (2)

Publication Number Publication Date
JPS60259374A true JPS60259374A (ja) 1985-12-21
JPH0420741B2 JPH0420741B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-06

Family

ID=14619334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11371684A Granted JPS60259374A (ja) 1984-06-01 1984-06-01 低圧研磨装置

Country Status (1)

Country Link
JP (1) JPS60259374A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100942303B1 (ko) * 2007-12-20 2010-02-16 주식회사 에이디피엔지니어링 척의 가동 지지 장치
CN105751054A (zh) * 2016-03-09 2016-07-13 应达利电子股份有限公司 一种石英晶片加工工艺
TWI656938B (zh) * 2017-12-11 2019-04-21 住華科技股份有限公司 裁切設備及應用其之裁切方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481590A (en) * 1977-12-12 1979-06-29 Hitachi Ltd Profile-grinder

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481590A (en) * 1977-12-12 1979-06-29 Hitachi Ltd Profile-grinder

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100942303B1 (ko) * 2007-12-20 2010-02-16 주식회사 에이디피엔지니어링 척의 가동 지지 장치
CN105751054A (zh) * 2016-03-09 2016-07-13 应达利电子股份有限公司 一种石英晶片加工工艺
CN105751054B (zh) * 2016-03-09 2018-11-27 应达利电子股份有限公司 一种石英晶片加工工艺
TWI656938B (zh) * 2017-12-11 2019-04-21 住華科技股份有限公司 裁切設備及應用其之裁切方法

Also Published As

Publication number Publication date
JPH0420741B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-06

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