JPS60256814A - 微小変位駆動装置 - Google Patents

微小変位駆動装置

Info

Publication number
JPS60256814A
JPS60256814A JP59112085A JP11208584A JPS60256814A JP S60256814 A JPS60256814 A JP S60256814A JP 59112085 A JP59112085 A JP 59112085A JP 11208584 A JP11208584 A JP 11208584A JP S60256814 A JPS60256814 A JP S60256814A
Authority
JP
Japan
Prior art keywords
drive
shaft
piezoelectric
displacement
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59112085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0477323B2 (enrdf_load_stackoverflow
Inventor
Kazuma Suzuki
数馬 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rion Co Ltd
Original Assignee
Rion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rion Co Ltd filed Critical Rion Co Ltd
Priority to JP59112085A priority Critical patent/JPS60256814A/ja
Publication of JPS60256814A publication Critical patent/JPS60256814A/ja
Publication of JPH0477323B2 publication Critical patent/JPH0477323B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP59112085A 1984-05-31 1984-05-31 微小変位駆動装置 Granted JPS60256814A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59112085A JPS60256814A (ja) 1984-05-31 1984-05-31 微小変位駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59112085A JPS60256814A (ja) 1984-05-31 1984-05-31 微小変位駆動装置

Publications (2)

Publication Number Publication Date
JPS60256814A true JPS60256814A (ja) 1985-12-18
JPH0477323B2 JPH0477323B2 (enrdf_load_stackoverflow) 1992-12-08

Family

ID=14577710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59112085A Granted JPS60256814A (ja) 1984-05-31 1984-05-31 微小変位駆動装置

Country Status (1)

Country Link
JP (1) JPS60256814A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6115572A (ja) * 1984-06-29 1986-01-23 Canon Inc 振動により駆動する装置
JPS62216677A (ja) * 1986-03-18 1987-09-24 神鋼電機株式会社 楕円振動機
JPS63294271A (ja) * 1987-05-22 1988-11-30 Nec Corp 超音波モ−タ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5814379A (ja) * 1981-07-20 1983-01-27 Toshiba Corp 偏向ア−ム装置
JPS5958811U (ja) * 1982-10-04 1984-04-17 ソニー株式会社 微小移動位置決め装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5814379A (ja) * 1981-07-20 1983-01-27 Toshiba Corp 偏向ア−ム装置
JPS5958811U (ja) * 1982-10-04 1984-04-17 ソニー株式会社 微小移動位置決め装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6115572A (ja) * 1984-06-29 1986-01-23 Canon Inc 振動により駆動する装置
JPS62216677A (ja) * 1986-03-18 1987-09-24 神鋼電機株式会社 楕円振動機
JPS63294271A (ja) * 1987-05-22 1988-11-30 Nec Corp 超音波モ−タ

Also Published As

Publication number Publication date
JPH0477323B2 (enrdf_load_stackoverflow) 1992-12-08

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