JPS60256039A - Preparation of ultrasonic probe - Google Patents

Abstract

PURPOSE:To prevent the disturbance in the arrangement of a piezoelectric vibrator, by strengthening the fixation of the piezoelectric vibrator not only at the cutting processing time of a piezoelectric vibration plate but also at the press bonding time of an acoustic matching layer. CONSTITUTION:A piezoelectric vibration plate 5 and a dummy plate 6 having high rigidity are adhered by heat-meltable wax 7. After grooves 3 are provided to be piezoelectric vibration plate 5 integrated with the dummy plate 6 by cutting processing, the piezoelectric vibrator 1 split by grooves 3 is bonded and fixed to an ultrasonic absorber 2. Next, the heat-meltable wax 7 is softened by heating to detach the dummy plate 6 from the piezoelectric vibrator 1 and, thereafter, a resin 8 is penetrated in and allowed to fill the grooves 3 in such a state that the heat-meltable wax 7 was adhered and cured to fix the piezoelectric vibrator 1. After the heat-meltable wax 7 is removed by a solvent, an acoustic matching layer 4 is adhered to the piezoelectric vibrator 1 under pressure. By this constitution, the deformation of the ultrasonic absorber and the disturbance in the arrangement of the ultrasonic absorber and the disturbance in the arrangement of the piezoelectric vibrator can be prevented not only at the cutting processing time of the piezoelectric vibration plate but also at the bonding time of the acoustic matching layer.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a flaw detector and an ultrasonic diagnostic bag for non-destructive testing.

Structure of the conventional example and its problems In Fig. 1, which shows the basic structure of a conventional ultrasonic probe, (1) is a piezoelectric vibrator, (2) is an ultrasonic absorber, and (2) is an ultrasonic absorber.
3) is a cut groove, and (4) is an acoustic matching layer.

In this case, the top surface of the piezoelectric vibrator (1) is not parallel to the top surface of the acoustic matching layer (4), and the orientation and arrangement position of the piezoelectric vibrator (1) is disordered.

Next, a conventional method of manufacturing an ultrasonic probe will be explained using FIGS. 2 and 3. As shown in Figure 2, after bonding the piezoelectric diaphragm (5) onto the ultrasonic absorber (2), use a scriber, wire saw, etc. to attach the piezoelectric diaphragm (5) to the ultrasonic absorber (2). Totomoshi: Cutting (forming grooves (3)) is performed as shown in Figure 3. The ultrasonic absorber (2) has a piezoelectric vibrator (1) divided by cutting a piezoelectric diaphragm (5).
) and absorbs the downwardly propagating ultrasonic waves generated by the piezoelectric vibrator (1), and the reflected waves from the bottom surface of the ultrasonic absorber (2) enter the piezoelectric vibrator (1). It is generally made of anti-vibration rubber, cork, or other materials that are extremely easily deformed by external forces. In addition, since the ultrasonic absorber (2) is also cut at the same time when the piezoelectric diaphragm (5) is cut, the ultrasonic absorber (2) is The body (2) deforms and the piezoelectric vibrator (1)
When the arrangement of the piezoelectric vibrators (1) is disturbed, as in the case of a crab, the arrangement of the piezoelectric vibrators (1) is easily disturbed.

The ultrasonic beams generated from the piezoelectric vibrator (1) are not uniform in array pitch and direction, and cannot be generated uniformly. It becomes impossible to obtain accurate information when injecting ultrasound waves into the interior of a specimen and receiving reflected ultrasound waves from the specimen.

OBJECTS OF THE INVENTION The present invention solves the above-mentioned problems, and aims to provide a method for manufacturing an ultrasonic probe in which the arrangement of piezoelectric vibrators is not disturbed.

Structure of the Invention In order to achieve the above object, the present invention provides the following steps: After bonding a piezoelectric diaphragm and a highly rigid dummy plate with hot-melt wax,
By cutting grooves in the piezoelectric diaphragm, a large number of piezoelectric vibrators spaced apart by the grooves are arranged on a dummy plate, and the piezoelectric vibrators integrated with the dummy plate are attached to an ultrasonic absorber using adhesive. The dummy plate is removed from the piezoelectric vibrator by softening the hot-melt wax, and then the groove between the piezoelectric vibrators is filled with resin, the hot-melt wax is removed, and the piezoelectric vibrator is removed. The present invention provides a method for manufacturing an ultrasonic probe by adhesively fixing an acoustic matching layer on the probe.

DESCRIPTION OF THE EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 4 to 8. In addition, in these figures, figures 1 to 3
Components that are the same as those shown in the figures are provided with the same reference numerals.

First, in the first step, as shown in Fig. 4, a piezoelectric diaphragm (5) and a highly rigid dummy plate (6) are interposed between the heat-melting wax (7) and heated. It is bonded by melting and cooling and hardening. Next, as shown in Fig. 5, grooves (3
), the piezoelectric vibrator (1) separated (divided) by the groove (3) is placed on the ultrasonic absorber (2) using adhesive, as shown in Figure 6. Fix with adhesive. This adhesive fixes.

In order to prevent displacement of the piezoelectric vibrator (1) due to the pressure applied at that time, the heating must be carried out within a temperature range in which the hot-melt wax (7) does not soften. Next, after softening the hot melt wax (7) by heating and removing the dummy plate (6) from the piezoelectric vibrator (1), as shown in FIG. With the heat-melting wax (7) attached, the resin (8) is infiltrated and filled into the cut groove (3). After hardening the resin (8) in a temperature range in which the thermofusible flux (7) does not melt to strengthen the fixation of the piezoelectric vibrator (1), it is attached to the piezoelectric vibrator (1) and a groove (3) is cut. Heat-melting wax partially penetrated into the (7)
Clean and remove with a solvent, etc. Finally, an acoustic matching layer (4) is placed on the piezoelectric vibrator (1) as shown in FIG.
Adhere under pressure. In FIG. 8, (9) is adhesive that has entered the area where the hot-melt flux (7) has been removed.

According to the above manufacturing method, when the piezoelectric vibrator (1) is cut, the piezoelectric vibrator (1) is fixed to the highly rigid dummy plate (6), so no alignment disorder occurs, and the piezoelectric vibrator (1) is cut with the required alignment accuracy. The vibrator (1) can be adhesively fixed onto the ultrasonic absorber (2), and when the acoustic matching layer (4) is pressure-adhered to the surface of the piezoelectric vibrator (1), the ultrasonic absorber (2) can be adhesively fixed. Because there is no cutting groove and at least the lower part of the piezoelectric vibrator (1) is fixed and reinforced by the resin (8) filled in the cutting groove (3), the arrangement of the piezoelectric vibrator (1) is prevented. This can be prevented, and an ultrasonic probe with extremely excellent alignment accuracy can be obtained.

As described in detail, according to the method of manufacturing an ultrasonic probe of the present invention, the piezoelectric probe is bonded to the dummy plate bonded to the piezoelectric diaphragm during the groove cutting process and the acoustic matching layer is bonded under pressure. In combination with a resin that fixes and strengthens the vibrator, it has an excellent effect in manufacturing an ultrasonic probe in which extremely small piezoelectric vibrators are arranged with high precision.

[Brief explanation of drawings]

□□4,,)□Wave probe - PI O□O 4 Fig. 1 Fig. 2 and Fig.
8 through 8 are cross-sectional views showing a method of manufacturing an ultrasonic probe according to an embodiment of the present invention. (1) Piezoelectric vibrator, (2) Ultrasonic absorber, (3
)...(8)...Resin, (9)...Adhesive agent Yoshihiro MorimotoFigure 3

Claims (1)

[Claims] 1. After bonding the piezoelectric diaphragm and a highly rigid dummy plate with hot-melt wax, grooves are cut into the piezoelectric diaphragm to create a large number of piezoelectric vibrators spaced apart by the grooves on the dummy plate. After the piezoelectric vibrators integrated with the dummy plates are pressure-bonded to the ultrasonic absorber using an adhesive, the dummy plates are removed from the piezoelectric vibrators by softening the hot melt wax, and then the piezoelectric vibrators are A method of manufacturing an ultrasonic probe by filling the groove between the transducers with resin, removing the heat-melting wax, and adhesively fixing an acoustic matching layer on the piezoelectric transducer.