JPS6025397B2 - Method for manufacturing glazed ceramic substrate - Google Patents

Method for manufacturing glazed ceramic substrate

Info

Publication number
JPS6025397B2
JPS6025397B2 JP18823580A JP18823580A JPS6025397B2 JP S6025397 B2 JPS6025397 B2 JP S6025397B2 JP 18823580 A JP18823580 A JP 18823580A JP 18823580 A JP18823580 A JP 18823580A JP S6025397 B2 JPS6025397 B2 JP S6025397B2
Authority
JP
Japan
Prior art keywords
ceramic substrate
glass
glazed ceramic
manufacturing
glazed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18823580A
Other languages
Japanese (ja)
Other versions
JPS57111287A (en
Inventor
良雄 毛利
勉 池田
巍 広石
欣二 佐野
泰裕 山本
雄二 山本
良二 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Priority to JP18823580A priority Critical patent/JPS6025397B2/en
Publication of JPS57111287A publication Critical patent/JPS57111287A/en
Publication of JPS6025397B2 publication Critical patent/JPS6025397B2/en
Expired legal-status Critical Current

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Description

【発明の詳細な説明】 本発明はセラミック基板上にガラスを被覆した所謂グレ
ーズドセラミック基板の製造方法に関し、表面平坦度の
高いグレーズドセラミック基板を提供しようとするもの
である。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a so-called glazed ceramic substrate in which a ceramic substrate is coated with glass, and is intended to provide a glazed ceramic substrate with high surface flatness.

セラミック基板上にガラスを被覆したグレーズドセラミ
ックは集積回路基板あるいはサーマルヘッド(サーマル
プリンタの感熱印字部等)基板などの電気回路用基板と
して汎〈採用されるようになって来ている。
Glazed ceramics, which are ceramic substrates coated with glass, have come to be widely used as substrates for electric circuits such as integrated circuit boards and thermal head (thermal printing parts of thermal printers, etc.) substrates.

前記した電気回路はグレーズドセラミック基板上に真空
蒸着法、スパッタリング法などによって薄膜を形成し、
それをフオトリングラフィなどによってパターニングし
て形成されるものであり、グレーズドセラミック基板に
は高い平坦度が要求される。セラミック基板上にガラス
を被覆する方法としてはスプレー法、ローラー法、転写
法、沈降法等があるが、本発明は、効率の点では優れて
いるものの平坦度が十分でなかったスクリーン印刷を採
用可能とし、高い生産性でグレ−ズドセラミック基板を
製造し得るようにするものであり、更には従来法の共通
の欠点とされていた発泡による平坦度の低下も大幅に改
善させた。
The electric circuit described above is produced by forming a thin film on a glazed ceramic substrate by vacuum evaporation, sputtering, etc.
It is formed by patterning it using photolithography or the like, and the glazed ceramic substrate is required to have high flatness. There are spray methods, roller methods, transfer methods, sedimentation methods, etc. as methods for coating glass on ceramic substrates, but the present invention uses screen printing, which is superior in terms of efficiency but lacks sufficient flatness. This makes it possible to manufacture glazed ceramic substrates with high productivity, and also significantly improves the reduction in flatness due to foaming, which was a common drawback of conventional methods.

即ち本発明のグレーズドセラミック基板の製造方法はペ
ースト化したガラスフリットをセラミック基板上にスク
リーン印刷した後これを焼成し、焼成された該セラミッ
ク基板上のガラス表面に再びペースト化したガラスフリ
ツトを印刷し、次いで焼成することを特徴とするもので
ある。本発明者らはスクリーン印刷法によってセラミッ
ク基板上に形成されたガラス被覆について鋭意研究し、
以下の知見を得ることにより本発明を完成させたもので
ある。
That is, the method for manufacturing a glazed ceramic substrate of the present invention involves screen printing a paste-formed glass frit onto a ceramic substrate, then firing it, and printing the paste-formed glass frit again on the glass surface of the fired ceramic substrate. It is characterized in that it is then fired. The present inventors have conducted intensive research on glass coatings formed on ceramic substrates by screen printing,
The present invention was completed by obtaining the following knowledge.

即ちセラミック基板上にガラスをスクリーン印刷法によ
ってコーティングするに際しては、所望の物性を有する
ガラスを一旦フリット化し、これに混練剤、粘度調節剤
などを加えてペースト化し、それをセラミック基板上に
スクリーン印刷するが、1回だけスクリーン印刷したも
のではその後の焼成工程でガラスとセラミックが反応し
て表面凹凸が発生し、実用に供し得るグレーズドセラミ
ック基板にはならないが、再度スクリーン印刷し、これ
を焼成、冷却すると、前記反応による表面凹凸は是正、
改善され、極めて良好な表面平坦度になる。セラミック
基板にコーティングするガラスの組成としては従来のS
i02−Pb○系のものでもよいが、本発明者等が開発
したSj0250〜60重量%、AI20310〜30
重量%、Ca○十Mg015〜30重量、Zr022〜
6重量%を主要成分とし、それにTi02,B20,Z
n0,PO0,P205,B203,Na20,K20
の1種以上を上記主要成分の一部と置換して又は単なる
付加で、必要に応じて加えたものを用いると、耐熱性お
よび耐薬品性向上に一層効果がある。
That is, when coating glass on a ceramic substrate by screen printing, glass having the desired physical properties is first fritted, a kneading agent, a viscosity modifier, etc. are added to it to form a paste, and then it is screen printed on the ceramic substrate. However, if screen printing is performed only once, the glass and ceramic will react during the subsequent firing process and surface irregularities will occur, making it impossible to create a glazed ceramic substrate that can be put to practical use. When cooled, the surface irregularities caused by the reaction are corrected,
improved, resulting in very good surface flatness. The composition of the glass coated on the ceramic substrate is conventional S.
Although it may be of the i02-Pb○ series, Sj0250-60% by weight and AI20310-30 developed by the present inventors
Weight%, Ca○10 Mg015~30 Weight, Zr022~
6% by weight as main components, and Ti02, B20, Z
n0, PO0, P205, B203, Na20, K20
If one or more of these are used as a substitute for a part of the above main components or simply added, if necessary, the heat resistance and chemical resistance will be more effectively improved.

なおセラミック基板としてはアルミナ、ベリリヤ、マグ
ネシア、ステアタイト、フオルステラィト、ジルコニア
各基板などの適宜のものを用いることができる。本発明
の特徴は、セラミック基板上にペースト化したガラスフ
リットをスクリーン印刷した後これを加熱焼成し、冷却
したのち更にその上に再び上記ペースト化したガラスフ
リットをスクリーン印刷し、加熱焼成することにある。
As the ceramic substrate, appropriate materials such as alumina, beryllia, magnesia, steatite, forsterite, and zirconia substrates can be used. The feature of the present invention is that after screen-printing a paste-formed glass frit on a ceramic substrate, it is heated and fired, and after cooling, the above-mentioned paste-formed glass frit is screen-printed again on top of it, and then heated and fired. be.

このようにすると、ガラスとセラミックの反応による発
泡で表面凹凸が発生するという従来技術が有していた欠
点を除去して表面を平滑にすることができる。即ちグレ
ーズドセラミックの製造に際してはガラスフリットの製
造過程においてガラス中に含まれていた泡などの気体成
分、あるいは焼成工程中に混入する空気が溶融過程にお
いて発泡し、ガラス表面に凹部を形成することがあり、
これが従来法の主要欠陥の1つであるが、本発明におい
ては熔融ガラス層が2度に分けて形成されることから、
各溶融ガラス層は薄くなり(1′2になる)この結果容
易に脱泡される、また1層目に凹凸が生じたとしても2
層目コーティングでこれが補修される、等により、欠陥
発生は大幅に抑制し得るという大きな効果を収めること
ができる。またこの発明の方法によれば転移温度の高い
ガラス層が得られる。なお本発明の実施に際しては必要
に応じて更に多段階に亘ってガラス被覆を形成してもよ
く、また各段階において形成されるガラス被覆の厚みは
全て等しくする必要はなく、条件に応じて適当に変更し
得る。
In this way, it is possible to eliminate the drawback of the conventional technology that surface irregularities occur due to foaming caused by the reaction between glass and ceramic, and to make the surface smooth. In other words, when manufacturing glazed ceramics, gas components such as bubbles contained in the glass during the manufacturing process of glass frit, or air mixed in during the firing process, may foam during the melting process and form recesses on the glass surface. can be,
This is one of the main deficiencies of the conventional method, but in the present invention, the molten glass layer is formed in two steps.
Each molten glass layer becomes thinner (1'2), and as a result, it is easily defoamed, and even if the first layer is uneven, the
By repairing this with layered coating, etc., the occurrence of defects can be significantly suppressed, which is a great effect. Further, according to the method of the present invention, a glass layer having a high transition temperature can be obtained. Note that when carrying out the present invention, the glass coating may be formed in multiple stages as necessary, and the thickness of the glass coating formed in each stage does not need to be the same, but may be formed as appropriate depending on the conditions. can be changed to

Claims (1)

【特許請求の範囲】[Claims] 1 ペースト化したガラスフリツトをセラミツク基板上
にスクリーン印刷した後これを焼成し、焼成された該セ
ラミツク基板上のガラス表面に再びペースト化したガラ
スフリツトをスクリーン印刷し、次いで焼成することを
特徴とするグレーズドセラミツク基板の製造方法。
1. A glazed ceramic product characterized by screen-printing paste-formed glass frit on a ceramic substrate, then firing it, screen-printing paste-formed glass frit again on the glass surface of the fired ceramic substrate, and then firing it. Substrate manufacturing method.
JP18823580A 1980-12-27 1980-12-27 Method for manufacturing glazed ceramic substrate Expired JPS6025397B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18823580A JPS6025397B2 (en) 1980-12-27 1980-12-27 Method for manufacturing glazed ceramic substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18823580A JPS6025397B2 (en) 1980-12-27 1980-12-27 Method for manufacturing glazed ceramic substrate

Publications (2)

Publication Number Publication Date
JPS57111287A JPS57111287A (en) 1982-07-10
JPS6025397B2 true JPS6025397B2 (en) 1985-06-18

Family

ID=16220148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18823580A Expired JPS6025397B2 (en) 1980-12-27 1980-12-27 Method for manufacturing glazed ceramic substrate

Country Status (1)

Country Link
JP (1) JPS6025397B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02211093A (en) * 1989-02-08 1990-08-22 Sony Corp Controller for stepping motor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5998586A (en) * 1982-11-29 1984-06-06 富士通株式会社 Glazed ceramic substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02211093A (en) * 1989-02-08 1990-08-22 Sony Corp Controller for stepping motor

Also Published As

Publication number Publication date
JPS57111287A (en) 1982-07-10

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