JPS60248228A - バブリング装置 - Google Patents

バブリング装置

Info

Publication number
JPS60248228A
JPS60248228A JP10371284A JP10371284A JPS60248228A JP S60248228 A JPS60248228 A JP S60248228A JP 10371284 A JP10371284 A JP 10371284A JP 10371284 A JP10371284 A JP 10371284A JP S60248228 A JPS60248228 A JP S60248228A
Authority
JP
Japan
Prior art keywords
condenser
raw material
gas
pipe
mixed gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10371284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0142739B2 (enExample
Inventor
Ichiro Tsuchiya
一郎 土屋
Masanobu Yoshida
吉田　公信
Hiroaki Takimoto
滝本　弘明
Hiroshi Yokota
弘 横田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP10371284A priority Critical patent/JPS60248228A/ja
Publication of JPS60248228A publication Critical patent/JPS60248228A/ja
Publication of JPH0142739B2 publication Critical patent/JPH0142739B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP10371284A 1984-05-24 1984-05-24 バブリング装置 Granted JPS60248228A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10371284A JPS60248228A (ja) 1984-05-24 1984-05-24 バブリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10371284A JPS60248228A (ja) 1984-05-24 1984-05-24 バブリング装置

Publications (2)

Publication Number Publication Date
JPS60248228A true JPS60248228A (ja) 1985-12-07
JPH0142739B2 JPH0142739B2 (enExample) 1989-09-14

Family

ID=14361329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10371284A Granted JPS60248228A (ja) 1984-05-24 1984-05-24 バブリング装置

Country Status (1)

Country Link
JP (1) JPS60248228A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61257232A (ja) * 1985-05-08 1986-11-14 Nippon Tairan Kk 液体材料ガス発生方法
JPH0621740U (ja) * 1992-08-21 1994-03-22 徳山曹達株式会社 混合ガスモノマー供給装置
EP0696472A1 (en) 1994-08-05 1996-02-14 Shin-Etsu Handotai Company Limited Method and apparatus for supply of liquid raw material gas
US5776255A (en) * 1992-12-24 1998-07-07 Canon Kabushiki Kaisha Chemical vapor deposition apparatus
EP0951052A3 (en) * 1998-03-27 2003-03-05 Kosho Komiya Bubbler apparatus and condenser for use with the bubbler apparatus
KR100990792B1 (ko) * 2003-05-02 2010-10-29 신에쓰 가가꾸 고교 가부시끼가이샤 다공질 유리 모재 원료 가스의 공급 장치

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61257232A (ja) * 1985-05-08 1986-11-14 Nippon Tairan Kk 液体材料ガス発生方法
JPH0621740U (ja) * 1992-08-21 1994-03-22 徳山曹達株式会社 混合ガスモノマー供給装置
US5776255A (en) * 1992-12-24 1998-07-07 Canon Kabushiki Kaisha Chemical vapor deposition apparatus
EP0605205B1 (en) * 1992-12-24 1999-08-11 Canon Kabushiki Kaisha Method for chemical vapor deposition and apparatus therefor
EP0696472A1 (en) 1994-08-05 1996-02-14 Shin-Etsu Handotai Company Limited Method and apparatus for supply of liquid raw material gas
EP0951052A3 (en) * 1998-03-27 2003-03-05 Kosho Komiya Bubbler apparatus and condenser for use with the bubbler apparatus
KR100990792B1 (ko) * 2003-05-02 2010-10-29 신에쓰 가가꾸 고교 가부시끼가이샤 다공질 유리 모재 원료 가스의 공급 장치

Also Published As

Publication number Publication date
JPH0142739B2 (enExample) 1989-09-14

Similar Documents

Publication Publication Date Title
TW387820B (en) Process for producing a high-purity liquid chemical which can be used in the microelectronics industry
FI88807C (fi) Anordning foer avkylning av syntesgas i slaeckningskylare
TW410211B (en) Apparatus and method for distilling waste liquids
GB1582955A (en) Condensation of the vapour of a volatile liquid
JPS60248228A (ja) バブリング装置
JP2018108588A (ja) 圧力調整されたマルチリアクタシステム
US1451399A (en) Process of producing halogen acids
JP3375050B2 (ja) 廃硫酸連続精製装置及び精製方法
CN107774001A (zh) 一种竖管降膜蒸发器
US3540986A (en) Distillation condensation apparatus with vapor compression and semipermeable membrane
FR2634881A1 (fr) Procede pour amener du gaz dans une solution salee et dispositif pour sa mise en oeuvre
GB1586113A (en) Process and apparatus for concentrating corrosive liquid using radiant heat
JPH02145768A (ja) 液体原料気化装置
US833271A (en) Distilling apparatus.
HU176256B (en) Process for preparing a developing gas containing ammonia to evaporate from an aqueous ammonia solution for the development of copying materials of diazo-type
RU2661121C2 (ru) Кожухотрубное устройство для рекуперации тепла из горячего технологического потока
US697912A (en) Apparatus for distilling water.
WO2001070366A1 (fr) Dégazeur et procédé de dégazage
SU768405A1 (ru) Способ массотеплообмена между газом и двухкомпонентной смесью жидкости и установка дл его осуществлени
US616187A (en) blair
US3303232A (en) Process for separating condensed hydrocarbons from natural gas and reducing pressure on the gas
US328316A (en) Frank t
US1588699A (en) Evaporation of chlorine
US460365A (en) Still
TW201837011A (zh) 丙烯的純化方法和純化設備