JPS60246265A - 繊維強化炭化珪素質材料の製造方法 - Google Patents

繊維強化炭化珪素質材料の製造方法

Info

Publication number
JPS60246265A
JPS60246265A JP59102714A JP10271484A JPS60246265A JP S60246265 A JPS60246265 A JP S60246265A JP 59102714 A JP59102714 A JP 59102714A JP 10271484 A JP10271484 A JP 10271484A JP S60246265 A JPS60246265 A JP S60246265A
Authority
JP
Japan
Prior art keywords
silicon carbide
carbide material
fiber
carbon
reinforced silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59102714A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6354665B2 (enrdf_load_stackoverflow
Inventor
幸文 酒井
恭一 岡本
健 保科
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP59102714A priority Critical patent/JPS60246265A/ja
Publication of JPS60246265A publication Critical patent/JPS60246265A/ja
Publication of JPS6354665B2 publication Critical patent/JPS6354665B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP59102714A 1984-05-23 1984-05-23 繊維強化炭化珪素質材料の製造方法 Granted JPS60246265A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59102714A JPS60246265A (ja) 1984-05-23 1984-05-23 繊維強化炭化珪素質材料の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59102714A JPS60246265A (ja) 1984-05-23 1984-05-23 繊維強化炭化珪素質材料の製造方法

Publications (2)

Publication Number Publication Date
JPS60246265A true JPS60246265A (ja) 1985-12-05
JPS6354665B2 JPS6354665B2 (enrdf_load_stackoverflow) 1988-10-28

Family

ID=14334932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59102714A Granted JPS60246265A (ja) 1984-05-23 1984-05-23 繊維強化炭化珪素質材料の製造方法

Country Status (1)

Country Link
JP (1) JPS60246265A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62152706A (ja) * 1985-12-27 1987-07-07 黒崎窯業株式会社 耐火物中の繊維分散方法
JPH03141638A (ja) * 1989-10-26 1991-06-17 Toshiba Ceramics Co Ltd 半導体ウェハ搬送用治具の製造方法
US5256448A (en) * 1990-10-25 1993-10-26 British Technology Group Ltd. Sol-gel method of making silicon carbide and of protecting a substrate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62152706A (ja) * 1985-12-27 1987-07-07 黒崎窯業株式会社 耐火物中の繊維分散方法
JPH03141638A (ja) * 1989-10-26 1991-06-17 Toshiba Ceramics Co Ltd 半導体ウェハ搬送用治具の製造方法
US5256448A (en) * 1990-10-25 1993-10-26 British Technology Group Ltd. Sol-gel method of making silicon carbide and of protecting a substrate

Also Published As

Publication number Publication date
JPS6354665B2 (enrdf_load_stackoverflow) 1988-10-28

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