JPS6024578B2 - スパツタ装置 - Google Patents
スパツタ装置Info
- Publication number
- JPS6024578B2 JPS6024578B2 JP2065975A JP2065975A JPS6024578B2 JP S6024578 B2 JPS6024578 B2 JP S6024578B2 JP 2065975 A JP2065975 A JP 2065975A JP 2065975 A JP2065975 A JP 2065975A JP S6024578 B2 JPS6024578 B2 JP S6024578B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- vacuum
- sputtering
- atmosphere
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004544 sputter deposition Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 14
- 108010083687 Ion Pumps Proteins 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 102000006391 Ion Pumps Human genes 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2065975A JPS6024578B2 (ja) | 1975-02-18 | 1975-02-18 | スパツタ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2065975A JPS6024578B2 (ja) | 1975-02-18 | 1975-02-18 | スパツタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5194111A JPS5194111A (show.php) | 1976-08-18 |
| JPS6024578B2 true JPS6024578B2 (ja) | 1985-06-13 |
Family
ID=12033328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2065975A Expired JPS6024578B2 (ja) | 1975-02-18 | 1975-02-18 | スパツタ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6024578B2 (show.php) |
-
1975
- 1975-02-18 JP JP2065975A patent/JPS6024578B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5194111A (show.php) | 1976-08-18 |
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